TriPleX : The Low Loss Passive Photonics Platform Industrial applications through Multi Project Wafer runs
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1 TriPleX : The Low Loss Passive Photonics Platform Industrial applications through Multi Project Wafer runs Technology examples TriPleX October 2015
2 Who we are? LioniX is a leading provider in co-development of products and manufacturing of components based on cutting-edge micro/nano technology for its (OEM) customers 2
3 Core competences 3
4 Outline TriPleX geometry Examples along the wavelength axis Visible light filtering Fluorescence detection Micro Ring Resonators OCT OBFN/MWP 4
5 TriPleX TM waveguide concept single mode Operating range from 405 nm to 2350 nm low loss reproducible LPCVD based Adjustable birefringence LPCVD SiO2 Low refractive index Layer quality is excellent Stress: Compressive Dn(TE-TM) = negative LPCVD Si3N4 High refractive index Layer quality is excellent Stress: Tensile Dn(TE-TM) = positive Multilayer waveguide 5
6 TriPleX TM fabrication process 6
7 TriPleX TM : some geometries... Adjustable polarization properties (sensors telecom) Low optical attenuation Small bend radii (small footprint!) Design by geometry Silicon and glass compatible 7
8 Tapering: high low index waveguides Low index contrast Medium index contrast High index contrast 50 nm 200 nm Mode profiles from 1 µm to > 10 µm Modefield conversion Pitch conversion Low loss 8
9 Low propagation losses Zhuang, Leimeng and Marpaung, D.A.I. and Burla, M. and Beeker, W. and Leinse, A. and Roeloffzen, C.G.H. (2011) Low-loss, high-indexcontrast Si 3 N 4 /SiO 2 optical waveguides for optical delay lines in microwave photonics signal processing Optics express, 19 (23). pp "An Ultra-Low-Loss (<0.1 db/m) Planar Silica Waveguide Platform," Bauters, Jared F; Heck, Martijn J R; John, Demis D; Barton, Jonathon S; Bruinink, Christiaan M; Leinse, Arne; Heideman, René G; Blumenthal, Daniel J; Bowers, John E, IEEE Photonics Newsletter, December 2011, p. 4-6, December 9, (2011) 9
10 10
11 Access to waveguide technology Technology accessible via Multi Project Wafer runs Photonic Design Kit in PhoeniX software 3 month license to PhoeniX software to run PDK included in MPW participation PDK training provided at beginning of MPW 1000,- (per person)* 50% discount for academic participants 500,- (per person)* At fixed tape out deadline design submission Die size: 16x16 (or 8x32) mm Companies ,- Academics 8.500,- ( 500 will be reimbursed for each design that is submitted in the MPW) 11
12 Specifications TriPleX TM waveguide Optical λ = 1.55 μm TE00 Effective index of the mode ± Group index of the mode ~1.71 Channel birefringence of a straight waveguide Straight waveguide loss > db/cm Company presentation 12
13 MPW access: Design Library with BBBs Complex structures based on simple building blocks 13
14 Complex chip design based on simple building blocks 14
15 Special academic discount => MPW participation only 8.5 keuro for academia Registration => 15
16 Visible light application 1 TriPleX Multi-wavelength Beam Combiner 16
17 Conventional beam combiner Approaches Conventional beam combining using bulk optics, expensive, bulky and labour intensive! Schäfter & Kirchhoff (D) kineflex fiber collimators from Point Source (UK) - now Qioptiq (Fr) 17
18 Wavelength combining through integrated filters Mach-Zehnder Interferometer based lattice filter Micro-Ring Resonator based lattice filter Schematic representation of an MZI based lattice filter (left) and a MRR (right). Typical spectral responses are shown below the filter types. 18
19 Normalized transmission [db] 8-channel integrated laser-beam combiner Projection of the waveguide modes at the endfacet. Wavelengths 8-ch beam combiner 405 nm 445 nm 488 nm 532 nm 561 nm 591 nm 640 nm 680 nm 19
20 Fully integrated packaged system 20
21 Visible light application 2: Stabilized laser source
22 Laser Laser Laser Laser Combiner and stabilizer PIC
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25 Application examples: Optofluidics TriPleX indx lifecare - solidstate biosensor 25
26 26
27 Opto-fluidics: evanescent field based sensing types Fluorescence fluorescent light captured by waveguide through use of dye excitation Absorption (scattering) fluid absorbs (scatters) light Refractive index (e.g. MRR*) modal field, Neff changes *Published in IEEE JSTQE, p , vol.18, no.5, Sept
28 28
29 29
30 30
31 Fluorescence based sensing platform Sample : 10 pm toxin A Reprinted from Analytical Chemistry, Vol. 82, No. 21, November 1, 2010 Courtesy of PLC Diagnostics (now indx) 31
32 Optofluidic applications 2 TriPleX Refractive-index sensing 32
33 Transmission Label-free refractive index sensing Micro-Ring Resonator 1 0,9 0,8 0,7 0,6 0,5 0,4 0,3 Drop port 0,2 Add port 0, WaveLength
34 Micro-Ring Resonator Light input: VCSEL with wavelength modulated signal around 850 nm Light output: Photodiode to detect drop response Acquisition of data DAQ-Card Signal processing PC with LabView algorithms for peak detection/phase detection
35 35
36 differential Shift (picometer) shift (picometer) Single MRR has limitations in sensitivity due to drift, temperature influence. Improvement expected by the introduction of a reference MRR to compensate for the temperature drift of the VCSEL 0,5 signal ring reference ring 0,4 1,6 0,3 1,4 0,2 1,2 0, ,8-0,1 2 0,6-0,2 0,4-0,3 3 0,2 4-0,4 5-0, Time (s) sequential exchange of pure water (MilliQ) with very diluted ethanol solutions (0.0056% (w/w) in MilliQ) => 3.5x10-6 RIU 36
37 Medical imaging application TriPleX Integrated OCT system 37
38 Optical Coherence Tomography applications based on TriPleX waveguides From bench to bedside and from cleanroom to clinic? Courtesy Ton van Leeuwen ) AgentschapNL: IOP Photonic Devices Smartmix MEMPHIS 38
39 Optical Coherence Tomography (OCT) OCT is the optical analogue of ultrasound imaging OCT enables mm-scale morphological and functional imaging 39
40 measuring principle Low coherence interferometry reference mirror tissue lichtsource DL 2ln 2 2 D detector Image acquisition is slow due to the moving parts in the system Typical resolutions are: SLD Ti:Sapphire laser 0 = 1300 nm 800 nm D = 100 nm 125 nm DL = 8 mu 3 mu 40
41 Speed enhancement for OCT Stationary reference mirror Spectral domain detection of LCI signals, using Fast spectrometer for detection
42 Speed enhancement for OCT Stationary reference mirror Spectral domain detection of LCI signals, using Fast spectrometer for detection Wavelength-swept laser source reference mirror Fast sweeping source tissue 42
43 Bulk optics and integrated optics swept source OCT setup Reference arm Sample arm V.D. Nguyen, N. Weiss, W.P. Beeker, M. Hoekman, A. Leinse, R.G. Heideman, T.G. van Leeuwen, and J. Kalkman, Integratedoptics-based sweptsource optical coherence tomography, Optics Letters 37, 4820 (2012) Sample arm Reference arm 43
44 First images with fully integrated optics swept source OCT setup OCT measurements Optics Letters in preparation OCT image of three layers tissue phantom (µ s = 4 mm -1 ) SNR ~ 80 db 44
45 TriPleX based OCT at Imec (realized in MPW) G. Yurtsever, et al., Photonic integrated Mach-Zehnder interferometer with an on-chip reference arm for optical coherence tomography, Biomedical Optics Express, Vol. 5 Issue 4, pp (2014) 45
46 Microwave Photonics Application 1 TriPleX Optical Beam-forming Network 46
47 MWP systems based on TTD Required : Broadband, continuous and squint-free beamsteering Antenna tile To receive : Digital video broadcasting via satellite (DVB-S) signal Solution : Phased-array antenna with large number of elements Photonic + beamformer Aim: Live television channels and broadband communication at passenger seats 47
48 Beam direction Wavefront Case 2: Angled reception (delay on) Antenna elements Delay = T Delay = T Beam former Combiner Combiner Delay = 2T Combiner 48
49 Delay (ns) Delay (ns) Integrated optics chip solution Optical waveguide Chromium heaters for thermo-optical tuning Tunable coupler Phase shifter to change the resonance frequency Normalized frequency k = 0.2 k = 0.4 k = Normalized frequency 49
50 Delay (ns) Cascaded optical ring resonator Single ORR provides tunable delay, but it is band limited Trade-off between maximum delay and delay bandwidth Solution cascade more than one ORRs ORR Sum Ripple ORR ORR 2 ORR Normalized frequency More ORRs cascaded more bandwidth but more ripple Trade-off between bandwidth, the number of ORR and the delay ripple Next step : to arrange the combiners and the ORRs to make a beamformer 50
51 51
52 Special academic discount => MPW participation only 8.5 keuro for academia Registration => 52
53 Questions? 53
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