Contents Silicon Photonic Wire Waveguides: Fundamentals and Applications

Transcription

1 1 Silicon Photonic Wire Waveguides: Fundamentals and Applications.. 1 Koji Yamada 1.1 Introduction Fundamental Design of Silicon Photonic Wire Waveguides Guided Modes Effect of Geometrical Errors and Birefringence Propagation Loss and Radiation Loss in Bending Coupling to External Fiber Fundamental Propagation Performance Fabrication Propagation Performance Simple Applications of Silicon Photonic Wire Waveguides Passive Devices Dynamic Devices Nonlinear Functions Polarization Manipulation Polarization Splitter and Rotator Polarization Diversity Summary References Index Polarization Control in Silicon Photonic Waveguide Components Using Cladding Stress Engineering Dan-Xia Xu 2.1 Introduction SOI Waveguides: General Considerations Single-Mode Condition Higher Order Mode Filtering Waveguide Birefringence: Geometrical Effects Waveguide Cross-Section Scaling of the Geometrical Birefringence with Core Size Dispersion and Group Index Birefringence xi

2 xii 2.4 Cladding Stress-Induced Birefringence: Theory and Modeling Photoelastic Effect Ordinary and Normalized Plane Strain Models Cladding Stress-Induced Birefringence in Waveguides Stress-Induced Mode Mismatch Stress-Induced Effect on the Group Index Birefringence Scaling of Stress-Induced Birefringence with the Core Size Cladding Stress Engineering: Applications Polarization-Independent AWGs Polarization-Independent Ring Resonator, Mach-Zehnder Interferometer, and Directional Coupler Broadband Polarization Splitter in a Zero-Order AWG Configuration Trimming of Birefringence in Passive Components Phase Matching in Raman and Other Nonlinear Processes and Active Birefringence Tuning Stress-Induced Pockels Electro-optic Effect in Silicon Conclusions References Index Interfacing Silicon Nanophotonic Integrated Circuits and Single-Mode Optical Fibers with Diffraction Gratings Günther Roelkens and Dries Van Thourhout 3.1 Nanophotonic SOI Waveguide Circuits Solutions to the Fiber-Chip Coupling Problem Fundamentals of Fiber-Chip Diffraction Grating Couplers High-Efficiency Fiber-Chip Grating Couplers Multi-band Fiber-Chip Grating Couplers Polarization Independent Fiber-Chip Coupling Integration of Opto-electronic Components Small Footprint Fiber-Chip Coupling Structures Optical Probing of Nanophotonic Integrated Circuits Conclusions References Appendix Index Development and Application of Er-Doped Silicon-Rich Silicon Nitrides and Er Silicates for On-Chip Light Sources Jee Soo Chang, Kiseok Suh, Moon-Seung Yang, and Jung H. Shin 4.1 Introduction Si Photonics and Light Sources Er as an Optical Dopant Silicon-Rich Silicon Nitride and Er Silicates... 99

3 xiii 4.2 Er-Doped Silicon-Rich Silicon Nitride Experimental Results and Discussion Conclusion Er Silicates Experimental Results and Discussion Applications of Er-Doped SRSN: High-Q Microdisks Experimental Results and Discussion Conclusion References Index Germanium as a Material to Enable Silicon Photonics R. Ichikawa, S. Takita, Y. Ishikawa, and K. Wada 5.1 Introduction Material Design Device Design: Tandem Cells Materials and Device Characteristics: (Ge) Buffer on Si and Ge Solar Cell on Si Summary References Index Silicon Photonics: The System on Chip Perspective Alberto Scandurra 6.1 Introduction The System on Chip Paradigm On-Chip Communication On-Chip Bus Network on Chip SoC Integration Issues Electrical Interconnect Classification Electrical Interconnect Metrics On-Chip Optical Interconnect The PICMOS Project The WADIMOS Project Conclusion References Index High-Speed Photonic Integrated Chip on a Silicon Platform Ling Liao, Ansheng Liu, Hat Nguyen, Juthika Basak, Mario Paniccia, Yoel Chetrit, and Doron Rubin

4 xiv 7.1 Introduction Silicon Photonic Integrated Chip Design Integrated Chip Fabrication Device Performance High-Speed Performance of the Stand-Alone Silicon MZM Performance of the Standalone MUX/DEMUX DC Performance of an Integrated DEMUX, MZM, and MUX Chip High-Speed Performance of the Silicon PIC Conclusion References Index CMOS Photonics: A Platform for Optoelectronics Integration Thierry Pinguet, Steffen Gloeckner, Gianlorenzo Masini, and Attila Mekis 8.1 Introduction Enabling a CMOS Process for Photonics Integration Rationale for Front-End Integration SOI Substrate Design Waveguide Integration Photolithography Active Optical Device Integration Germanium Module Process Control and Monitoring Other Integration Elements Photonic Device Library Electronics Libraries: The Inspiration Library Hierarchy and Design Flow Device Concepts Design Selection: The Design-of-Experiment Approach The Role of Process Variability in Design Selection Design Verification and Device Models Design and Testing Infrastructure: The Tools of Success Wafer-Scale Optoelectronic Testing Design Automation Tools Example of CMOS Photonic System Conclusions References Index Photonics and Electronics Integration J.-M. Fedeli, B. Ben Bakir, L. Grenouillet, D. Marris-Morini, and L.Vivien 9.1 Introduction Ways to Integrate Photonics Devices on an Electronic Wafer...218

5 xv Above IC Fabrication Combined Fabrication Back-Side Fabrication Passive Photonic Circuitry Guided Structures Amorphous Silicon Waveguide Fabrication Optical Couplers Efficient and Polarization Insensitive In-Plane Fiber Couplers Silicon-Based Optical Modulator Germanium Waveguide Photodetectors Laser Fabrication on 200 mm Wafer Die to Wafer Bonding of III V Semiconductor on Silicon Design and Fabrication of InP Lasers with Microelectronics Tools Conclusion References Index Index...251