High Accuracy Positioning Sensors EG Series Features

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1 High ccuracy Positioning s EG Series Features Ultra-small sensor head Non-contact, stable detection in wide temperature range Highly stable amplifier provides 1 µm. Mil repeatability Hi/Lo tolerance detection with a single controller Wide variety of sensor head types Description Repeatability of 1 µm. Mil The EG Series incorporates a highly stable amplifier circuit, providing a repeatability of 1 µm. Mil. This sensor is ideal for detecting slight differences in shape or for confirming die closure. Stable detection in wide temperature range KEENCE s original built-in compensator circuit minimizes temperature-oriented sensitivity fluctuation. Once set, the sensitivity does not require adjustment. Detecting distance () x x SH-1 (Typical) Target: x x 1 () iron Temperature ( C) Detecting Distance Standard Up to (1.38") Oil-resistant Up to () Heat-resistant Up to 8 (.31") Detection of tolerances with single sensor head (EG-57) single sensor can be used to detect missing or loose screws or a missing washer. NG GO NG Missing washer Normal Loose screw Flush-mounting in metal possible Shielded sensor heads are available for mounting in various locations. They can also be easily flush-mounted in metal objects such as machine covers, casings and frames. Oil-resistant cable The EG Series sensor heads employ oil-resistant cable to ensure extended usage. Heat-resistant sensor head Heat-resistant sensor heads are available which withstand temperatures up to C. (SH-89, 816, and 8) Stable hysteresis The hysteresis is stable and can be held to as low as µm.39 Mil (SH-5, 8, and 1). Refer to P.517 for a list of products complying with EMC directive.

2 High ccuracy Positioning s EG pplications Normal Loose Missing Detection of loose and missing screws in audio cassette tape CRT screen shadow mask positioning Confirmation of tightness of mold halves on injection molding machine Detection of liquid level in solder bath (Heat-resistant type) Selection Chart Type Size Shape Detecting distance Model.8 dia..11".6 SH- Cylindrical 3.8 dia..15" 5. dia..1" 1 SH-3 SH-5 Shielded Threaded 8 dia..31" M SH-8 SH-1 M1 5 SH-11 Thin t=.8.19" 5 SH-61 Threaded/Oil-resistant M 8 SH dia.57" 6." SH-16 Non-shielded Cylindrical/Threaded dia. 7" dia. 1.57" 9." dia. 1.7" 18 SH- SH- SH- Cylindrical 9 dia. 3.5" 1.38" SH-9 Shielded Cylindrical/Heat-resistant Threaded/Heat-resistant 9. dia..37" M16.5 to to 1 to to SH-89 SH-816 Nonshielded Cylindrical/Heat-resistant /Threaded dia. 7" to 8 to.31" SH-8 31

3 EG-5 EG-55 EG-5 EG-5 EG-57 EG High ccuracy Positioning s mplifier Shape Power supply Features Output mode Model 11 to VDC DC-driven N.O./ N.C. selectable NPN EG-5 1 to VDC DC-driven with disconnection alarm output DIN-rail mountable N.O./ N.C. selectable NPN EG-5 1/1, / VC C-driven NPN SPDT 5 VC relay EG /1, / VC C-driven djuster dial included NPN SPDT 5 VC relay EG /1, / VC C-driven Tolerance setting capability SPST-NO 5 VC.5 relay nalog voltage monitoring output EG This product does not comply with the EMC directive.. Please contact KEENCE for information on products that comply with the EMC directive. Specifications Type Model H- Stable detecting range Maximum detecting distance Detectable object Standard target ( iron, t=1.") Repeatability Hysteresis 1. S H-3 to.6 Cylindrical Standard Shielded Threaded S SH-5 SH-8 SH-1 SH-11 to to 1 to to to x 5.1.".3.1" Ferrous metal (see Characteristics for nonferrous metals) 5 x 5.1.".5." 5 x 5.1.".1." x..8".1." x..8".1." 15 x 15..8".15.6" T emperature fluctuation.3% / C.3% / C.8% / C.8% / C.8% / C.%/ C Enclosure rating mbient temperature - to +6 C - to +6 C - to +6 C - to +6 C - to +6 C - to +6 C R elative humidity to 85 % to 85 % to 85 % to 85 % to 85 % to 85 % Vibration Weight (including nuts a nd 3-m 9.8' cable) g to 55 Hz, 1.5 double amplitude in,, and Z directions, hours respectively g 5 g bove values obtained when the detecting distance is set at of the maximum stable detecting distance. 1. The SH- cannot be used in combination with the EG g 55 g 63 g 3

4 High ccuracy Positioning s EG Type Model Stable detecting range Maximum detecting distance Detectable object Standard target ( iron, t=1.") Repeatability Hysteresis Standard Shielded Flat-on. O il-resistant Shielded Threaded Standard bove values obtained when the detecting distance is set at of the maximum stable detecting distance. 1. Contact KEENCE with regard to using the EG-57 in combination with SH-,,, 9, 89, 816 and 8.. Not designed for iersed use. Non-shielded Cylindrical & Threaded SH-61 SH-8 SH-16 SH- SH- SH- to 5 to to 6." to 9." to 1.7" to " 15 7" 1.57" 15 x 15..8".15.6" Ferrous metal (see Characteristics for nonferrous metals) x..8".5." x.5.".15.6" 5 x 5.98".8.3"..8" x.1.".3.1" x 1.57".15.6".5." T emperature fluctuation.%/ C. / C.8%/ C.8%/ C.8%/ C.8%/ C Enclosure rating mbient temperature - to +6 C - to +6 C - to +6 C - to +6 C - to +6 C - to +6 C R elative humidity Vibration Weight (including nuts a nd 3-m 9.8' cable) 6 g to 55 Hz, 1.5 double amplitude in,, and Z directions, hours respectively 5 g 73 g 195 g 5 g 8 g Standard. H eat-resistant Type. M odel Non-shielded Cylindrical 1 H-9 Stable detecting range Maximum detecting distance Cylindrical Shielded Threaded Non-shielded Cylindrical & Threaded S SH-89 SH-816 SH-8 to 1.38".5 to 1 to to 8.31" 7.76" Detectable object Ferrous metal (see Characteristics for nonferrous metals) Standard target ( iron, t=1.") Repeatability Hysteresis 15 x " 15 x 15 x x.3.1"..8".5.".8.3".1.".."..".." T emperature fluctuation.8%/ C.%/ C.%/ C.%/ C Enclosure rating I P-67 mbient temperature - to +6 C - to + C - to + C - to + C R elative humidity Vibration Weight (including nuts and 3 -m 9.8' cable) to 55 Hz, 1.5.6" double amplitude in,, and Z directions, hours respectively 65 g 55 g 83 g bove values obtained when the detecting distance is set at of the maximum stable detecting distance. 1. Contact KEENCE with regard to using the EG-57 in combination with SH-,,, 9, 89, 816 and 8.. Precautions when using heat-resistant sensor head: Use the sensor within the stable detecting range. The heat-resistant sensor head is not waterproof; do not use this sensor head in a location directly exposed to liquid or steam. 17 g 33

5 EG High ccuracy Positioning s mplifier Type Model EG-5 EG-5 G-5 Operation mode Sensitivity adjustment Control output Connections EG-5. T ransistor (NPN) 11 to V DC 6 5 N.O./N.C. (switch-selectable) Control output DC N.O./N.C. (switch-selectable) EG-5 C 15-turn trier 15-turn trier 15-turn trier 7 6 C adj-dial Shield C, tolerance setting E E G-55 E G-57 N.O./N.C. switch-selectable (contact output only) -turn potentiometer dial External synchronization, analog voltage switch-selectable -turn potentiometer dials m max. m max. m max. m max. m max. ( V max.) Residual ( V max.) Residual ( V max.) Residual ( V max.) Residual ( V max.) Residual voltage: 1 V max. voltage: 1 V max. voltage: 1 V max. voltage: 1 V max. voltage: 1 V max. R elay contact Disconnection alarm output (NPN) Respontime se Transistor m max. ( V max.) Residual voltage: 1 V max. SPDT, 5 VC, SPDT, 5 VC, max. (resistive load) max. (resistive load) DPST (N.O.), 5 VC,.5 max. (resistive load) 1 ms 1 ms 1 ms 1 ms 1 ms R elay contact ms ms 3 ms O FF delay time 65 ms (contact output only) Power supply 11 to VDC: % max. 1 to VDC: % max. 1/1// VC ±%, 5/6 Hz P ower/current consumption m max. m max. 5 V max. 5 V max. 5 V max.. T emperature fluctuation 1.8%/ C.8%/ C.8%/ C.8%/ C.8%/ C mbient temperature to +5 C to +5 C to +5 C to +5 C to +5 C R elative humidity Vibration Weight to 55 Hz, 1.5 double amplitude in,, and Z directions, hours respectively 1 g 75 g 3 g bove values obtained when the detecting distance is set at of the maximum stable detecting distance. 1. special amplifier unit for SH-, SH-, SH-, SH-9, SH-89, SH-816, SH-8 is available.. NPN output can easily be converted to PNP output by connecting the optional OP-518 PNP Output Converter. 3. This product does not comply with EMC directives.. Please contact KEENCE for information on products that comply with the EMC directive. g 39 g EG-5/ No connection Shield / VC Relay contact output 1/1 VC COM N.C. N.O EG Control output 1 to V DC Disconnection alarm output / VC Relay contact output 1/1 VC ( output) (B output) N.O. COM N.O Control output V or 3 Synchronization terminals 5 Shield 6 No connection When external synchronization terminals and 3 are short-circuited, the relay output resets to its initial setting, and the indicator turns off. Synchronization signals can also be input through an open collector Control output Control output ( output) (B output) or Shield V Synchronization terminals head When external synchronization terminals and 5 are shortcircuited, the relay output and NPN output are reset and the indicator turns off. Terminals and 5 can also be used for analog voltage output (monitor output) by switching over the sliding selector switch located on the left side of the amplifier unit.

6 High ccuracy Positioning s EG djustment EG-5/5/5/55 Set the sensor-head-selector switch (located on the right side of the amplifier unit casing) in correspondence with the type of sensor head being used. selector switch group group B, 3, 5, 8, 1, 11, 61, 8 16,,,, 9, 89, 816, 8 High-accuracy detection 1. With no target, turn the power on and confirm that the indicator is off. If the indicator is on, turn the trier counterclockwise until the indicator turns off. Target differentiation djustment procedures for target differentiation are basically identical to those for target detection. Determine detection sensitivity for a normal product as position and detective product as position B. Set the trier midway between the points. EG-57 Set the sensor-head-selector switch (located on the right side of the amplifier unit casing) in correspondence with the type of sensor head being used. selector switch group group B 3, 5, 8, 1, 11, 61, With a target in place, turn the trier clockwise until the indicator lights. Target detection 1. With no target, turn the power on and confirm that the indicator is off. If the indicator is on, turn the trier counterclockwise until the indicator turns off.. With a target in place, turn the trier clockwise until the indicator lights. Point B B 1. For sensor group, turn tolerance setting trier all the way counterclockwise. For sensor group B, turn tolerance setting trier B all the way clockwise.. Set the tolerance range as follows: Set the upper and lower limits of the tolerance range within the stable detecting area of the sensor. The upper and lower limits are the nearest and furthest points, respectively, from the sensor at which the target is detected. B 3. With no target, turn the trier clockwise until the indicator lights. Point B 3. For sensor group, place the target at the lower limit of the tolerance range. Turn trier clockwise and lock it at the position where indicator turns off. Set B. Set the trier midway between points and B. B. For sensor group B, place the target at the upper limit of the tolerance range. Turn trier B counterclockwise and lock it at the position where indicator B turns off. Characteristics Detecting range (Typical) SH- SH-3 SH-5 Detecting distance () Stable detecting Stable detecting distance distance % %.6.. Detecting distance () Detecting distance () Stable detecting distance % () () () 35

7 EG High ccuracy Positioning s Detecting range (Typical) SH-8 SH-1 SH-11 Detecting distance () % Detecting distance () %." Detecting distance () % () " -.31" () () SH-61 SH-8 SH-16 Detecting distance () % Detecting distance () % Detecting distance () %.8"." " -.31" () () () Detecting distance () SH % ().3".".8"." Detecting distance () SH %.9"."." SH % () () Detecting distance ().98" SH-9 SH-89 SH-816 Detecting distance () " Detecting distance () " % %. Detecting distance ().. % " -1.57" ".36" () () () 36

8 High ccuracy Positioning s EG SH-8 Detecting distance vs. size and material of target (Typical) xx xx SH- ( x x 1) set to.6 SH-3 ( x x 1) set to.9 Detecting distance () 8.. %.31" Detecting distance () luminum Detecting distance ().6.. luminum ".7".63" () One side of target () ".7".63" One side of target () Detecting distance () Detecting distance ().6.. xx xx xx SH-5 ( x x 1) set to SH-8 ( x x 1) set to. SH-1 ( x x 1) set to. luminum ".7".63" One side of target () Detecting distance () luminum ".7".63" One side of target ().9" Detecting distance () luminum ".7".63" One side of target () 1.57"x1.57"x 1.57"x1.57"x xx SH-11 ( x x 1) set to 5. SH-61 ( x x 1) set to 5. SH-8 ( x x 1) set to. 6.." 6.."..9" luminum Detecting distance (). 3.. luminum Detecting distance () luminum.9" ".63".9" 6" One side of target () ".63".9" 6" One side of target () ".7".63" One side of target () Detecting distance () 1.57"x1.57"x." 1.57"x1.57"x.".7"x.7"x.7" SH-16 ( x x 1) set to 6. SH- ( x x 1) set to 9. SH- (1 x 1 x 1) set to luminum.31".8"." ".63".9" 6" One side of target () Detecting distance () 1..7" " 1 9.." " 6.." " 6 3. luminum ".63".9" 6" One side of target () Detecting distance ().63".55".7".31"." luminum ".36" 3.15" One side of target () 37

9 EG High ccuracy Positioning s.7"x.7"x 15.75"x15.75"x 1.38" xx SH- (1 x 1 x 1) set to 18. SH-9 ( x x 1) set to. SH-89 ( x x 1) set to. Detecting distance () luminum.9" 3".7"."." Detecting distance () luminum 1.77" 1.57" 1.38".98" Detecting distance () 1 luminum ".36" 3.15" One side of target () " 6." 9.5" 1.59" One side of target () One side of target () Detecting distance () xx xx." SH-816 ( x x 1) set to. SH-8 ( x x 1) set to 9. luminum Detecting distance () "." luminum One side of target () One side of target () Hints on Correct Use Selecting a sensor head Such items as target size, material, and desired detecting distance are important for determining the appropriate sensor head. First, refer to the CHRCTERISTICS charts Detecting distance vs. size and material of target (Typical) to select a sensor head which provides the desired detecting distance in relation to the size and material of the target. Then, select the smallest sensor head possible, taking into consideration the area and operating environment of the location in which the sensor head is to be installed. Generally, if there are no limitations on the distance between the sensor head and target, the smaller the outer diameter of the sensor head, the higher the accuracy. Example: With reference to the characteristics charts, if the target is 5 x 5 stainless steel and a detecting distance of 1 is required, SH-8 would be the optimal sensor head. Detecting distance () SH-8 set to..9". luminum.31".7" ".55".63" One side of target () Improving horizontal positioning accuracy Place the sensor head / and target as shown on the right. If the trier is set to the position at Midpoint of stable detecting range. which the indicator turns on, a horizontal positioning accuracy close to the rated vertical positioning accuracy can be obtained. Target To extend sensor cable Use a coaxial cable to connect the sensor head to the controller. Limit the cable length to within m 3.8'. (For models SH-, limit cable length to within 5 m. 16.') 38

10 High ccuracy Positioning s EG Characteristics charts Detecting range These charts show loci produced by a target (defined in each chart) traveling parallel to the detecting surface of the sensor head when the detecting distance is set at and % of the maximum stable detecting distance. Distance set at % of max. stable detecting distance Distance set at of max. stable detecting distance Detecting distance () () Target Detecting distance vs. size and material of target These charts show detecting distance which changes with side of the target when a square metal target (t=1 ) is used and the detecting distance is set at % of the maximum stable detecting distance. Calculation of positioning accuracy Repeatability can be calculated using the following formula: Detecting distance () Repeatability= t = 1 luminum One side of target () Target Temperature fluctuation of sensor head+temperature fluctuation of amplifier x stable detecting distance x (Temperature change) Example: Using the SH-5 sensor head, if the detecting distance of the sensor head is set at one-half the rated stable detecting distance at an ambient temperature of C, and if the temperature changes ± C, the positioning accuracy is as follows (where the temperature fluctuations of both the sensor head and amplifier unit are.8%/ C.) ( ) x.5 x (± C) = ±.8.3" Target Set distance:.5 Mounting Cylindrical type Secure the sensor head with a screw at a position 5 or more from the tip of the head. Tightening torque:. N m max. (For model SH- 8:.6 N m max.) Threaded type When mounting the threaded-type sensor head, do not tighten beyond the torque specified in the following table. Interference When installing two or more sensor heads of the same model face-to-face or in parallel, separate by the distance specified in the following table to prevent interference. Model Distance [Note] The values shown above are specified when the trier of the amplifier is set to % of the stable detecting range. The values in parentheses apply when an antiinterference adapter is connected to the sensor head. Connect the anti-interference adapter parallel to the sensor head. Model SH-8 SH-1 SH-11 SH-16 SH- SH- SH- SH-816 SH-8 M3 screw 5 min. Tightening torque 8 N m N m N m N m N m N m N m N m N m F ace-to-face ( min.) Parallel ( min. ) S H- 6 (3)." () 11 (.8).3" (.11") S H-3 6 (3)." () 1 (.8).7" (.19") S H-5 15 (9).59" (."") (5.) (.1") S H-8 (1) 1.18" (3") 38 (8) 1.5" (.31") S H-1 () 1.57" () () () S H () 1." (7") 7 (1).91" (.55") S H () 1." (7") 1 (1) 3" (.55") S H-8 () 1.38" () 58 (8).8" (.31") S H-16 () 1.57" () 155 () 6." () S H- 1 (1) 5.51" (.7") 1 (3).8" (6") S H- () 7.87" (3.9") 1 () 5.1" (1.57") S H- 1 (8) 5.51" (3.15") (5) 1.6" (1.97") S H-89 6 (5).36" (1.77") 55 (18).17" () S H (9) 6." (3.5") 86 (1) 3.39" (3") S H-8 (16) 7.87" (6.") (16) 8.7" (6.38") SH-5 nti-interference adapter (optional) 39

11 EG High ccuracy Positioning s pplication of output For model EG-57 amplifier: If the synchronization terminals are short-circuited, the relay and NPN output stops and the indicator turns off. Synchronization signals can also be input through an open collector. When obtaining output outside tolerance range When obtaining output within tolerance range When obtaining upper and lower limit outputs Trier setting Solid-state output Relay output B ON ON Tolerance B ON ON Tolerance B ON ON Tolerance 1 3 Use relay output Surrounding metal Shielded-type sensors can be flush-mounted in a metal base. s of the non-shielded type, however, should be mounted according to the guidelines given below in order to minimize interference from the surrounding metal. ø D d M odel D ( min. ) d ( min. ) SH-16 SH " SH- 7.76" 5.98" " SH- 3.9" SH " Precautions Heat-resistant sensor head Use the sensor head within the stable detecting range. The heat-resistant sensor head is not waterproof. Do not use the sensor head in locations directly exposed to liquid or steam. Oil-resistant sensor head Model SH-8 is oil-resistant under normal operation conditions. However, iersing it in oil may result in damage to the sensor head. Dimensions SH-.7 1 SH Unit: Inch ø.8 ø coaxial cable ø.11 ø SH-3 18 SH-5 ø 3.8 ø.6 coaxial cable ø.15" ø." 18 SH-8 ø 5. ø 3. coaxial cable ø.1 ø.13" M1 x P1 P SH-61 ø.13" ø 3. coaxial cable cross-flats: 19.75" t = 3.5.1" 1.55" ø.13" ø 3. coaxial cable 3 x ø 3.3 ø.13" 7.8" mounting hole Detecting surface 6." 6.".19" SH-8.98" " 18 ø 8 ø 3. coaxial cable ø.31" ø.13" SH-1 18 ø.13" ø 3. coaxial cable M x P1 cross-flats: 1 P t=3 t=.55 M8 x P 1 P SH-16." 6 ø.57" ø 1.5 M16 x P 1 P.55" 1 ø ø 3 coaxial cable cross-flats: 1, t = 3.7, t= ø 3. coaxial cable ø.13" cross-flats: 1, t = 3", t= 3

12 High ccuracy Positioning s EG SH- 15 ø 7" cross-flats: 19.7" t = 3.5.1" ø 5. coaxial cable ø.1" M1 x P 1 P SH-8 ø ø7".1" 3.5 cross-flats: 19, t = ", t=.1" M1 x P 1 P ø.17" ø. 15 Unit: Inch SH-.98" 5 mplifier EG-5 x ø 5 ø mounting hole ø ø cross-flats: 19 t = 3.5.1".75" ø 5. coaxial cable ø.1" M1 x P 1 P " 3.5" 3.15" SH-.98" 5 " 6 1.6".68" ø ø1.57" cross-flats: 19 t = 3.5.1".75" ø 5. coaxial cable ø.1" M1 x P 1 P EG-5 x ø.5 ø.18" mounting hole SH-9 3.5" 9.99" " 3.5". 1.39" 9 3.5" 76.99" ø 5. coaxial cable ø.1" " 1.6" " 1.38" Detecting surface x ø 5.5 ø." mouting hole.39 EG-5/55/57 x ø 5 ø mounting hole.9" SH-89 ø 9. ø.37" 18 ø.5 ø." " 3.5" 3.15" SH-816 cross-flats: 1, t = M16 x P 1 3", t= P." 56.6" 67 EG-5 has no dial..68" 68 EG-55 has one dial. ø.5 ø." EG-57 has two dials. 331