Vibration Nullification of MEMS Devices using Input Shaping

Size: px
Start display at page:

Download "Vibration Nullification of MEMS Devices using Input Shaping"

Transcription

1 Vibration Nullification of MEMS Devices using Input Shaping Scott Jordan and Eric Lawrence, Polytec PI ABSTRACT The active silicon microstructures known as Micro-Electromechanical Systems (MEMS) are improving many existing technologies through simplification and cost reduction. Many industries have already capitalized on MEMS technology such as those in fields as diverse as telecommunications, computing, projection displays, automotive safety, defense and biotechnology. As they grow in sophistication and complexity, the familiar pressures to further reduce costs and increase performance grow for those who design and manufacture MEMS devices and the engineers who specify them for their end applications. One example is MEMS optical switches that have evolved from simple, bistable on/off elements to microscopic, freelypositionable beam steering optics. These can be actuated to discrete angular positions or to continuously-variable angular states through applied command signals. Unfortunately, elaborate closed-loop actuation schemes are often necessitated in order to stabilize the actuation. Furthermore, preventing one actuated micro-element from vibrationally cross-coupling with its neighbors is another reason costly closed-loop approaches are thought to be necessary. The Laser Doppler Vibrometer (LDV) is a valuable tool for MEMS characterization that provides non-contact, real-time measurements of velocity and/or displacement response. The LDV is a proven technology for production metrology to determine dynamical behaviors of MEMS elements, which can be a sensitive indicator of manufacturing variables such as film thickness, etch depth, feature tolerances, handling damage and particulate contamination. They are also important for characterizing the actuation dynamics of MEMS elements for implementation of a patented controls technique called Input Shaping, which we show here can virtually eliminate the vibratory resonant response of MEMS elements even when subjected to the most severe actuation profiles. Figure 1. Vibrometer displacement measurement of MEMS device when exposed to narrow pulse of 150 Volt amplitude. Figure 2. Open loop actuation of device using square wave excitation with the embeddable Input Shaping algorithm applied to the MEMS control, resulting in virtually vibration-free actuation with instant settling. ScottJ@polytecpi.com, Fall River Dr., San Jose, CA USA EricL@polytecpi.com, Bell Ave, Suite 3A, Tustin, CA USA

2 In this paper, we will demonstrate the use of the LDV to determine how the application of this compact, efficient algorithm can improve the performance of both open- and closed-loop MEMS devices, eliminating the need for costly closed-loop approaches. This can greatly reduce the complexity, cost and yield of MEMS design and manufacture. Keywords: MEMS, Input Shaping, vibration cancellation, active damping, speed optimization 1. BACKGROUND Silicon micro-electromechanical systems (MEMS) have been an important semiconductor category for approximately eight years. MEMS is now an established commercial technology and has been commercialized in both passive and active implementations. MEMS technology is the basis for most automotive airbag sensors and many video and PC projection units. The latter were the first optical MEMS application, coming on the market approximately eight years ago. In particular, the use of active silicon micromirror arrays for optical switching is an area of great economic and technical promise for the telecommunications industry, which must flexibly provision and route optical data communications over long fiber trunks and then around and through dense regional and metropolitan areas. As data rates increase, it becomes less and less practical to perform this switching electronically. Optical MEMS switches and cross-connects allow optical data channels to be switched directly without an optical-to-electronic-to-optical conversion. MEMS manufacturing and control present unique challenges. The perforated wafers are difficult to handle, and the micromechanisms are delicate and very sensitive to particulate contamination. Yield issues have meant that only a handful of semiconductor companies manufacture large quantities of MEMS silicon notably Texas Instruments and JDS Uniphase s Chronos subsidiary. Optical MEMS are available both in bistable and multiply- or continuously-positionable formats. Bistable MEMS designs usually employ at least one hard-stop to define a repeatable position for the moving element. This presents its own dynamical issues. MEMS technology is rapidly expanding beyond its core sensor and micro-optical markets to include active mechanisms which perform a wider variety of motions, including long-travel motions and multiple-degree of freedom motions. Miniature tripod and other parallel kinematic multi-axis designs have been demonstrated, for example by researchers at Sandia National Laboratory. While commercial applications of these designs are still some years off, the physical challenges posed in their manufacture and control are evident today. 2. VIBRATION IN MEMS MEMS devices exhibit classical Hookes resonant behavior when disturbed and when actuated. Figure 1 shows representative behavior, as imaged by a laser Doppler vibrometer, when a MEMS micromirror is actuated to a (nonhardstopped) set point with a step command. The motion of the unit towards its eventual set point is characterized by resonant behavior, manifested as overshoot and ringing at a characteristic frequency. As is typical, the damping is light (, as would be expected from the monolithic silicon from which MEMS devices are manufactured, and the overshoot is typically on the order of the commanded step or even greater. Interestingly, this vibrational behavior is also a reasonably sensitive measure of the MEMS device s health and quality of manufacture: for example, an over-etched MEMS device may exhibit an anomalously low resonant frequency. MEMS dynamics are readily imaged using non-contact laser Doppler vibrometry. A variety of instruments based on this principle are available, including Polytec s single-point and differential units and scanning systems capable of imaging a large area for sophisticated modal analysis. These have found broad application in the MEMS industry for both developmental diagnostics and production metrology.

3 3. ADDRESSING VIBRATION Conventionally, the usual approach to eliminating overshoot and ringing in any active device would be to integrate position feedback elements and implement a closed-loop control system. However, this is effective only against in-loop (observable) vibrations. It also extracts penalties in cost, complexity, reliability, yield and bandwidth. And in the case of an array of densely-packed MEMS elements, it does nothing to avert the possibility that rapid actuation of one element might disturb its neighboring elements through recoil transmitted through their common substrate. Any disturbance thus transmitted could be addressed only within the responsiveness of the adjacent units servos. Since servos are error-driven, this guarantees that disturbances propagating from MEMS to MEMS would result in unwanted modulation of the devices positions resulting, for example, in modulation of the optical signals they are reflecting. Fortunately, recent technical advances have produced a novel control technology suitable for any type of open- or closed-loop actuations which improves throughput by typically three orders of magnitude by eliminating settling dwells and allowing the most aggressive motion profiles. This same technology has proven its value in improving optical MEMS actuation speed an increasingly critical consideration for differentiating between various MEMS providers. A review of vibrational physics is worthwhile here. After a motion, the amplitude of the resonant ringing of each element in a structure scales as e -t/τ, where τ is the time constant for each element s resonant characteristics i. For structures with damping characteristics typical of precision mechanisms (see Table 1), τ ~ (ω n ζ) 1 where ω n is the resonant angular frequency and ζ is the damping ratio for the resonance. ζ is commonly defined as the ratio of the damping for the resonance versus critical damping (ζ= C/C c ) and varies from 0 (no damping) to 1 (critical damping) (see Figure 3). Fres (Hz) ωn (rad/sec) Table 1. Time constant W for various damping coefficients, ], and resonant frequencies, Z n ζ τ

4 Mechanical Damping 2.5 Position Zeta = Zeta = 0.01 Zeta = 0.1 Zeta = tim e Figure 3. Generic mechanical damping behavior after a rapid motion, shown for various damping ratios, ]. The amplitude of the ringing diminishes with time as e -t/, where W ~ (Z n ]) -1. Clearly, physics dictates worsening process throughputs as actuation tolerances tighten. Today, damping is not the only tool for eliminating out-of-loop resonances. A patented ii, real-time feedforward technology called Input Shaping was developed based on research at the Massachusetts Institute of Technology and commercialized by Convolve, Inc., (New York, NY; Commercially, it is an integrated option for Polytec PI s latest digital piezo positioning controllers (Figure 4), in which it is marketed as the Mach Throughput Coprocessor. Here it takes the form of a compact algorithm which scales and sequences any positioning command in real-time to result in optimally fast positioning with zero residual vibration in the motion device, load and adjacent componentry. For motor control, the technology is available as an option from Galil, Delta Tau and Motion Engineering (MEI). Figure 4. Piezo controller (shown with PCI fiber interface) includes patented vibration-cancellation technology This robust and easily-implemented technology acts transparently in real time to prevent the motion-driven excitation of resonances throughout the system, including all fixturing and ancillary componentry. The Throughput Coprocessor is also available implemented in a stand-alone unit intended for upgrading existing open- and closed-loop nanopositioning systems with analog inputs. In this implementation, it is inserted in series between the commanding computer or waveform generator and the analog input of the piezo nanopositioning system. This is a useful format for investigating the application of Input Shaping on MEMS actuation.

5 Figure 5. In Polytec PI s NanoAutomation implementation, Input Shaping is applied in series between the commanding PC or position-waveform generator and the input to the piezo nanopositioning controller. For investigating MEMS dynamics, a stand-alone implementation has proven effective used in the same way. 4. A MACRO WORLD EXAMPLE OF INPUT SHAPING APPLICATION Fabrication of Fiber Bragg Gratings (FBGs) is a good example of an application that benefits from this technology. FBGs are important elements of optical networks that select an individual wavelength from the multitude of waves running down a multiplexed fiber. The FBG is a diffraction grating fashioned deep within a fiber or waveguide through interferometric optical exposure. To improve the spectral characteristics of the finite-length grating, grating transitions are apodized via nanometer-precision scanning motions of optics in the exposure apparatus iii using a high-quality piezo nanopositioning stage. The process is exquisitely demanding, but the results are tremendous: a simple, compact, rugged, entirely passive device capable of precisely isolating a single wavelength. As more and more channels are crammed down a fiber, the selectivity of FBGs must keep pace. Inaccuracies from vibrations of structures throughout the tool begin to count. Not only must the positioners in the tooling perform to nanometer-scale levels, but all unwanted relative motions in all components of the tooling must be suppressed. Airisolation tables address ambient disturbances, but resonances driven by the scanning can still take hundreds of milliseconds to damp out an unacceptable throughput penalty. Input Shaping addresses this directly by literally eliminating the resonances before they start (compare Figure 6 and Figure 7). Figure 6. Quasi-sinusoidal phase-mask dither waveform is corrupted by fixturing resonances. Figure 7. Same input waveform as in Figure 6, with structural resonances nullified. The benefit is even more impressive for harsher motions such as sawtoothwaves. Elimination of structural resonances results in higher-fidelity Bragg gratings: narrower channelwidths, higher efficiency.

6 Figure 8. Coarse/fine air-bearing/piezo stage. The closed-loop piezo stage is used for high-throughput nm-scale mask position modulation in FBG manufacture; vibration-nullification technology shown in Figure 7 allows higher production throughput while optimizing grating fidelity for narrower channel-width and improved efficiency. (Photo courtesy Dover Instruments.) 5. VIBRATION CANCELLATION IN MEMS Input Shaping obviously poses a tantalizing possibility for avoiding the cost and complexity of closing the loop around a MEMS element to address its overshoot and resonant ringing (and that of its neighbors) as seen in Figure 1. The compactness of the Input Shaping algorithm and its robustness to unit-to-unit variations makes it highly practical for embedding into MEMS controllers for four purposes: Optimization of MEMS elemental positioning times Elimination of settling intervals in open- and closed-loop actuation Prevention of parasitic excitation of adjacent elements in MEMS arrays Bandwidth increase (gain-boosting) in closed-loop actuation, eliminating overshoot-and-ringing issues in underdamped actuation. The benefits of applying Input Shaping to MEMS controls are readily quantifiable by using a Polytec laser Doppler vibrometer. Although Input Shaping works with any type of motion point-to-point, continuous waveform, random we chose square-wave actuation for our tests since these present the most severe dynamical forces to the devices under test. Figure 9 through Figure 12 show LDV displacement and spectral measurements before and after implementing Input Shaping in series with the position-command signal for an open-loop MEMS switching/scanning element. The implementation process is a simple one, requiring a straightforward measurement of the resonant characteristics of the MEMS device using the vibrometer. This defines the real-time operating parameters for configuring the Input Shaping. The resonances of each micro-optical element are instantly eliminated, regardless of actuation profile. The resonant reaction of neighboring MEMS elements is eliminated as well.

7 Figure 9. Displacement response of MEMS micromirror to open-loop square-wave input, as measured with a Polytec laser Doppler vibrometer. Ringing response of the mirror is observed. Figure 10. Same device as in Figure 9, with the embeddable Input Shaping algorithm applied to the MEMS controls. Figure 11. Spectral plot of vibrometry data for device in Figure 9, without Input Shaping. Note the substantial resonance peak. Figure 12. Spectral plot of Vibrometry data in Figure 10, showing the nullification of resonances by Input Shaping in the MEMS controls. The resonance peak seen in Figure 11 is eliminated. Even in closed-loop actuations, Input Shaping poses advantages. Proportional and integral gains can often be significantly boosted as well, with Input Shaping addressing the overshoot and oscillation about the terminal position that are otherwise characteristic of overboosted/underdamped applications. This can further improve the switching throughput of many devices compared to critical damping. However, the elimination of resonant behavior as demonstrated in Figure 10 may eliminate the need for closed-loop actuation in the first place a significant cost-andcomplexity advantage. In any case, a closed-loop implementation may still be necessary for calibrated actuation of multiply- or continuously-positionable MEMS elements, but it would no longer be required for dynamical reasons. The spectral plots shown in Figure 11 and Figure 12 illustrate a fundamental difference between Input Shaping and active damping, alignment stabilization or other after-the-fact compensation of unwanted resonant behavior. In those situations, compensation occurs after the device is observed to have begun ringing, with the aim of counteracting the unwanted motion or extracting energy from the resonance and converting it into heat or storing it elsewhere in the system. These all take time, since basically the horse is out of the barn and the damage must be undone. Furthermore, these classical compensation approaches act only on observable (in-the-loop) errors. Input Shaping, by comparison, prevents energy from entering the resonant mode in the first place and is effective on unobservable errors, such as those imposed upon adjacent structures. Optimized implementations of Input Shaping further address the uniquely nonlinear actuation physics of specific MEMS designs, including hard-stopped units. To further illuminate the impact of Input Shaping on MEMS dynamics, the Polytec s Micro Scanning Vibrometer (MSV) was used for mapping a device s deflection shape response. This system is shown below in Figure 13. By scanning the vibrometer s laser beam in x and y direction, the LDV technique can be extended to full-area measurement and display. This technique scans an area on a point-by-point basis to measure the velocity field of the structure. From these data the operating deflection shape at any given frequency or time sample can be determined. The data compiled

8 from this measurement is shown in Figure 14 as 3D time domain animation to quantify the devices actuation. The authors of this paper can supply the actual animated AVI file showing of this response upon request via . Figure 13. The Micro-Scanning Vibrometer. Figure 14. The Polytec Micro Scanning Vibrometer shown in Figure 13 was used to compile time domain animations of actuated MEMS dynamic response. (Animations available by from authors.) Top: squarewave actuation of the MEMS micromirror with Input Shaping. Both a frame of the animation and the time plot of the mirror s position are shown. Bottom: square-wave actuation position-vs.-time plot without Input Shaping. The desired square-wave motion profile is almost indiscernible against the resonant response of the element.

9 6. CONCLUSION MEMS are a new type of device that present some challenges familiar from classical mechanics. Just as settling behavior has come to dominate the process-throughput times in applications ranging from semiconductor lithography to disk-drive track-profiling head tests, settling time is now the primary application pacer for many MEMS attenuation, switching and cross-connect applications. And the same easily-implemented, patented controls technology which has proven so effective in boosting throughput and enhancing precision in production nanopositioning applications can now be applied to improving the actuation speed and competitiveness of MEMS devices and systems. The compact Input Shaping algorithm is a practical and highly embeddable addition to MEMS controller circuits for both open- and closed-loop actuation. In fact, the dramatic benefits of Input Shaping on open-loop actuation may eliminate the need for closed-loop approaches in the first place, resulting in significant cost savings and a potentially simpler, more reliable MEMS device. 7. ACKNOWLEDGMENTS The authors would like to thank Mark Tanquary of Convolve, Inc., and David Oliver of Polytec PI for their assistance in this research. The assistance of Applied MEMS in providing devices to test is appreciated. i A fine references for the physics of resonant vibrations is Modern Control Engineering by Katsuhiko Ogata (Prentice- Hall, 1970, ref. Pp ). A remarkable on-line reference can be found at ii This technology is protected by one or more of the following US and foreign Patents licensed from Convolve, Inc.: US 4,916,635; US 5,638,267; Europe; Korea, and other Patents pending. Mach, Throughput Coprocessor and NanoAutomation are trademarks of Polytec PI, Inc. Input Shaping is a trademark of Convolve, Inc. iii Ibid.

High-speed wavefront control using MEMS micromirrors T. G. Bifano and J. B. Stewart, Boston University [ ] Introduction

High-speed wavefront control using MEMS micromirrors T. G. Bifano and J. B. Stewart, Boston University [ ] Introduction High-speed wavefront control using MEMS micromirrors T. G. Bifano and J. B. Stewart, Boston University [5895-27] Introduction Various deformable mirrors for high-speed wavefront control have been demonstrated

More information

The Air Bearing Throughput Edge By Kevin McCarthy, Chief Technology Officer

The Air Bearing Throughput Edge By Kevin McCarthy, Chief Technology Officer 159 Swanson Rd. Boxborough, MA 01719 Phone +1.508.475.3400 dovermotion.com The Air Bearing Throughput Edge By Kevin McCarthy, Chief Technology Officer In addition to the numerous advantages described in

More information

Silicon Light Machines Patents

Silicon Light Machines Patents 820 Kifer Road, Sunnyvale, CA 94086 Tel. 408-240-4700 Fax 408-456-0708 www.siliconlight.com Silicon Light Machines Patents USPTO No. US 5,808,797 US 5,841,579 US 5,798,743 US 5,661,592 US 5,629,801 US

More information

Novel laser power sensor improves process control

Novel laser power sensor improves process control Novel laser power sensor improves process control A dramatic technological advancement from Coherent has yielded a completely new type of fast response power detector. The high response speed is particularly

More information

Active Vibration Isolation of an Unbalanced Machine Tool Spindle

Active Vibration Isolation of an Unbalanced Machine Tool Spindle Active Vibration Isolation of an Unbalanced Machine Tool Spindle David. J. Hopkins, Paul Geraghty Lawrence Livermore National Laboratory 7000 East Ave, MS/L-792, Livermore, CA. 94550 Abstract Proper configurations

More information

3D Optical Motion Analysis of Micro Systems. Heinrich Steger, Polytec GmbH, Waldbronn

3D Optical Motion Analysis of Micro Systems. Heinrich Steger, Polytec GmbH, Waldbronn 3D Optical Motion Analysis of Micro Systems Heinrich Steger, Polytec GmbH, Waldbronn SEMICON Europe 2012 Outline Needs and Challenges of measuring Micro Structure and MEMS Tools and Applications for optical

More information

Wavelength Control and Locking with Sub-MHz Precision

Wavelength Control and Locking with Sub-MHz Precision Wavelength Control and Locking with Sub-MHz Precision A PZT actuator on one of the resonator mirrors enables the Verdi output wavelength to be rapidly tuned over a range of several GHz or tightly locked

More information

Conventional geophone topologies and their intrinsic physical limitations, determined

Conventional geophone topologies and their intrinsic physical limitations, determined Magnetic innovation in velocity sensing Low -frequency with passive Conventional geophone topologies and their intrinsic physical limitations, determined by the mechanical construction, limit their velocity

More information

Chapter 1 Introduction

Chapter 1 Introduction Chapter 1 Introduction 1-1 Preface Telecommunication lasers have evolved substantially since the introduction of the early AlGaAs-based semiconductor lasers in the late 1970s suitable for transmitting

More information

Fiber Optic Device Manufacturing

Fiber Optic Device Manufacturing Precision Motion Control for Fiber Optic Device Manufacturing Aerotech Overview Accuracy Error (µm) 3 2 1 0-1 -2 80-3 40 0-40 Position (mm) -80-80 80 40 0-40 Position (mm) Single-source supplier for precision

More information

1.6 Beam Wander vs. Image Jitter

1.6 Beam Wander vs. Image Jitter 8 Chapter 1 1.6 Beam Wander vs. Image Jitter It is common at this point to look at beam wander and image jitter and ask what differentiates them. Consider a cooperative optical communication system that

More information

Module 5: Experimental Modal Analysis for SHM Lecture 36: Laser doppler vibrometry. The Lecture Contains: Laser Doppler Vibrometry

Module 5: Experimental Modal Analysis for SHM Lecture 36: Laser doppler vibrometry. The Lecture Contains: Laser Doppler Vibrometry The Lecture Contains: Laser Doppler Vibrometry Basics of Laser Doppler Vibrometry Components of the LDV system Working with the LDV system file:///d /neha%20backup%20courses%2019-09-2011/structural_health/lecture36/36_1.html

More information

Polarization Optimized PMD Source Applications

Polarization Optimized PMD Source Applications PMD mitigation in 40Gb/s systems Polarization Optimized PMD Source Applications As the bit rate of fiber optic communication systems increases from 10 Gbps to 40Gbps, 100 Gbps, and beyond, polarization

More information

of harmonic cancellation algorithms The internal model principle enable precision motion control Dynamic control

of harmonic cancellation algorithms The internal model principle enable precision motion control Dynamic control Dynamic control Harmonic cancellation algorithms enable precision motion control The internal model principle is a 30-years-young idea that serves as the basis for a myriad of modern motion control approaches.

More information

Index. Cambridge University Press Silicon Photonics Design Lukas Chrostowski and Michael Hochberg. Index.

Index. Cambridge University Press Silicon Photonics Design Lukas Chrostowski and Michael Hochberg. Index. absorption, 69 active tuning, 234 alignment, 394 396 apodization, 164 applications, 7 automated optical probe station, 389 397 avalanche detector, 268 back reflection, 164 band structures, 30 bandwidth

More information

Diffraction, Fourier Optics and Imaging

Diffraction, Fourier Optics and Imaging 1 Diffraction, Fourier Optics and Imaging 1.1 INTRODUCTION When wave fields pass through obstacles, their behavior cannot be simply described in terms of rays. For example, when a plane wave passes through

More information

CHAPTER 2 POLARIZATION SPLITTER- ROTATOR BASED ON A DOUBLE- ETCHED DIRECTIONAL COUPLER

CHAPTER 2 POLARIZATION SPLITTER- ROTATOR BASED ON A DOUBLE- ETCHED DIRECTIONAL COUPLER CHAPTER 2 POLARIZATION SPLITTER- ROTATOR BASED ON A DOUBLE- ETCHED DIRECTIONAL COUPLER As we discussed in chapter 1, silicon photonics has received much attention in the last decade. The main reason is

More information

Advanced Motion Control Optimizes Mechanical Micro-Drilling

Advanced Motion Control Optimizes Mechanical Micro-Drilling Advanced Motion Control Optimizes Mechanical Micro-Drilling The following discussion will focus on how to implement advanced motion control technology to improve the performance of mechanical micro-drilling

More information

Compact Nanopositioning System Family with Long Travel Ranges

Compact Nanopositioning System Family with Long Travel Ranges P-620.1 P-629.1 PIHera Piezo Linear Stage Compact Nanopositioning System Family with Long Travel Ranges Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded

More information

Photonics and Optical Communication

Photonics and Optical Communication Photonics and Optical Communication (Course Number 300352) Spring 2007 Dr. Dietmar Knipp Assistant Professor of Electrical Engineering http://www.faculty.iu-bremen.de/dknipp/ 1 Photonics and Optical Communication

More information

Part 2: Second order systems: cantilever response

Part 2: Second order systems: cantilever response - cantilever response slide 1 Part 2: Second order systems: cantilever response Goals: Understand the behavior and how to characterize second order measurement systems Learn how to operate: function generator,

More information

Automatic Testing of Photonics Components

Automatic Testing of Photonics Components Automatic Testing of Photonics Components Fast, Accurate, and Suitable for Industry Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 1 of 5 Silicon photonics

More information

Synchronization Control Scheme for Hybrid Linear Actuator Based on One Common Position Sensor with Long Travel Range and Nanometer Resolution

Synchronization Control Scheme for Hybrid Linear Actuator Based on One Common Position Sensor with Long Travel Range and Nanometer Resolution Sensors & Transducers 2014 by IFSA Publishing, S. L. http://www.sensorsportal.com Synchronization Control Scheme for Hybrid Linear Actuator Based on One Common Position Sensor with Long Travel Range and

More information

P-611.Z Piezo Z-Stage

P-611.Z Piezo Z-Stage Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www.pi.ws. Cat120E

More information

Micro-nanosystems for electrical metrology and precision instrumentation

Micro-nanosystems for electrical metrology and precision instrumentation Micro-nanosystems for electrical metrology and precision instrumentation A. Bounouh 1, F. Blard 1,2, H. Camon 2, D. Bélières 1, F. Ziadé 1 1 LNE 29 avenue Roger Hennequin, 78197 Trappes, France, alexandre.bounouh@lne.fr

More information

Advanced Motion Control Optimizes Laser Micro-Drilling

Advanced Motion Control Optimizes Laser Micro-Drilling Advanced Motion Control Optimizes Laser Micro-Drilling The following discussion will focus on how to implement advanced motion control technology to improve the performance of laser micro-drilling machines.

More information

M-041 M-044 Tip/Tilt Stage

M-041 M-044 Tip/Tilt Stage M-041 M-044 Tip/Tilt Stage Piezo Drive Option for Nanometer Precision Ordering Information Linear Actuators & Motors M-041.00 Small Tilt Stage, Manual Micrometer Drive M-041.D01 Small Tilt Stage, DC-Motor

More information

Fiber Bragg Grating Dispersion Compensation Enables Cost-Efficient Submarine Optical Transport

Fiber Bragg Grating Dispersion Compensation Enables Cost-Efficient Submarine Optical Transport Fiber Bragg Grating Dispersion Compensation Enables Cost-Efficient Submarine Optical Transport By Fredrik Sjostrom, Proximion Fiber Systems Undersea optical transport is an important part of the infrastructure

More information

Motion Solutions for Digital Pathology. White Paper

Motion Solutions for Digital Pathology. White Paper Motion Solutions for Digital Pathology White Paper Design Considerations for Digital Pathology Instruments With an ever increasing demand on throughput, pathology scanning applications are some of the

More information

Periodic Error Correction in Heterodyne Interferometry

Periodic Error Correction in Heterodyne Interferometry Periodic Error Correction in Heterodyne Interferometry Tony L. Schmitz, Vasishta Ganguly, Janet Yun, and Russell Loughridge Abstract This paper describes periodic error in differentialpath interferometry

More information

CONTROL IMPROVEMENT OF UNDER-DAMPED SYSTEMS AND STRUCTURES BY INPUT SHAPING

CONTROL IMPROVEMENT OF UNDER-DAMPED SYSTEMS AND STRUCTURES BY INPUT SHAPING CONTROL IMPROVEMENT OF UNDER-DAMPED SYSTEMS AND STRUCTURES BY INPUT SHAPING Igor Arolovich a, Grigory Agranovich b Ariel University of Samaria a igor.arolovich@outlook.com, b agr@ariel.ac.il Abstract -

More information

Solution of Pipeline Vibration Problems By New Field-Measurement Technique

Solution of Pipeline Vibration Problems By New Field-Measurement Technique Purdue University Purdue e-pubs International Compressor Engineering Conference School of Mechanical Engineering 1974 Solution of Pipeline Vibration Problems By New Field-Measurement Technique Michael

More information

profile Using intelligent servo drives to filter mechanical resonance and improve machine accuracy in printing and converting machinery

profile Using intelligent servo drives to filter mechanical resonance and improve machine accuracy in printing and converting machinery profile Drive & Control Using intelligent servo drives to filter mechanical resonance and improve machine accuracy in printing and converting machinery Challenge: Controlling machine resonance the white

More information

Nanometer-level repeatable metrology using the Nanoruler

Nanometer-level repeatable metrology using the Nanoruler Nanometer-level repeatable metrology using the Nanoruler Paul T. Konkola, a) Carl G. Chen, Ralf K. Heilmann, Chulmin Joo, Juan C. Montoya, Chih-Hao Chang, and Mark L. Schattenburg Massachusetts Institute

More information

FemtoFAB. Femtosecond laser micromachining system. tel fax Konstitucijos ave. 23C LT Vilnius, Lithuania

FemtoFAB. Femtosecond laser micromachining system. tel fax Konstitucijos ave. 23C LT Vilnius, Lithuania FemtoFAB Femtosecond laser micromachining system Konstitucijos ave. 23C LT-08105 Vilnius, Lithuania tel. +370 5 272 57 38 fax +370 5 272 37 04 info@wophotonics.com www.wophotonics.com INTRODUCTION FemtoFAB

More information

Designing an MR compatible Time of Flight PET Detector Floris Jansen, PhD, Chief Engineer GE Healthcare

Designing an MR compatible Time of Flight PET Detector Floris Jansen, PhD, Chief Engineer GE Healthcare GE Healthcare Designing an MR compatible Time of Flight PET Detector Floris Jansen, PhD, Chief Engineer GE Healthcare There is excitement across the industry regarding the clinical potential of a hybrid

More information

Real-Time Scanning Goniometric Radiometer for Rapid Characterization of Laser Diodes and VCSELs

Real-Time Scanning Goniometric Radiometer for Rapid Characterization of Laser Diodes and VCSELs Real-Time Scanning Goniometric Radiometer for Rapid Characterization of Laser Diodes and VCSELs Jeffrey L. Guttman, John M. Fleischer, and Allen M. Cary Photon, Inc. 6860 Santa Teresa Blvd., San Jose,

More information

Theory and Applications of Frequency Domain Laser Ultrasonics

Theory and Applications of Frequency Domain Laser Ultrasonics 1st International Symposium on Laser Ultrasonics: Science, Technology and Applications July 16-18 2008, Montreal, Canada Theory and Applications of Frequency Domain Laser Ultrasonics Todd W. MURRAY 1,

More information

Characterization of Silicon-based Ultrasonic Nozzles

Characterization of Silicon-based Ultrasonic Nozzles Tamkang Journal of Science and Engineering, Vol. 7, No. 2, pp. 123 127 (24) 123 Characterization of licon-based Ultrasonic Nozzles Y. L. Song 1,2 *, S. C. Tsai 1,3, Y. F. Chou 4, W. J. Chen 1, T. K. Tseng

More information

System Inputs, Physical Modeling, and Time & Frequency Domains

System Inputs, Physical Modeling, and Time & Frequency Domains System Inputs, Physical Modeling, and Time & Frequency Domains There are three topics that require more discussion at this point of our study. They are: Classification of System Inputs, Physical Modeling,

More information

Proceedings A Comb-Based Capacitive MEMS Microphone with High Signal-to-Noise Ratio: Modeling and Noise-Level Analysis

Proceedings A Comb-Based Capacitive MEMS Microphone with High Signal-to-Noise Ratio: Modeling and Noise-Level Analysis Proceedings A Comb-Based Capacitive MEMS Microphone with High Signal-to-Noise Ratio: Modeling and Noise-Level Analysis Sebastian Anzinger 1,2, *, Johannes Manz 1, Alfons Dehe 2 and Gabriele Schrag 1 1

More information

A COMPACT, AGILE, LOW-PHASE-NOISE FREQUENCY SOURCE WITH AM, FM AND PULSE MODULATION CAPABILITIES

A COMPACT, AGILE, LOW-PHASE-NOISE FREQUENCY SOURCE WITH AM, FM AND PULSE MODULATION CAPABILITIES A COMPACT, AGILE, LOW-PHASE-NOISE FREQUENCY SOURCE WITH AM, FM AND PULSE MODULATION CAPABILITIES Alexander Chenakin Phase Matrix, Inc. 109 Bonaventura Drive San Jose, CA 95134, USA achenakin@phasematrix.com

More information

BMC s heritage deformable mirror technology that uses hysteresis free electrostatic

BMC s heritage deformable mirror technology that uses hysteresis free electrostatic Optical Modulator Technical Whitepaper MEMS Optical Modulator Technology Overview The BMC MEMS Optical Modulator, shown in Figure 1, was designed for use in free space optical communication systems. The

More information

A Laser-Based Thin-Film Growth Monitor

A Laser-Based Thin-Film Growth Monitor TECHNOLOGY by Charles Taylor, Darryl Barlett, Eric Chason, and Jerry Floro A Laser-Based Thin-Film Growth Monitor The Multi-beam Optical Sensor (MOS) was developed jointly by k-space Associates (Ann Arbor,

More information

Integrated Photonics based on Planar Holographic Bragg Reflectors

Integrated Photonics based on Planar Holographic Bragg Reflectors Integrated Photonics based on Planar Holographic Bragg Reflectors C. Greiner *, D. Iazikov and T. W. Mossberg LightSmyth Technologies, Inc., 86 W. Park St., Ste 25, Eugene, OR 9741 ABSTRACT Integrated

More information

MEM380 Applied Autonomous Robots I Winter Feedback Control USARSim

MEM380 Applied Autonomous Robots I Winter Feedback Control USARSim MEM380 Applied Autonomous Robots I Winter 2011 Feedback Control USARSim Transforming Accelerations into Position Estimates In a perfect world It s not a perfect world. We have noise and bias in our acceleration

More information

Optical Waveguide Types

Optical Waveguide Types 8 Refractive Micro Optics Optical Waveguide Types There are two main types of optical waveguide structures: the step index and the graded index. In a step-index waveguide, the interface between the core

More information

CHASSIS DYNAMOMETER TORQUE CONTROL SYSTEM DESIGN BY DIRECT INVERSE COMPENSATION. C.Matthews, P.Dickinson, A.T.Shenton

CHASSIS DYNAMOMETER TORQUE CONTROL SYSTEM DESIGN BY DIRECT INVERSE COMPENSATION. C.Matthews, P.Dickinson, A.T.Shenton CHASSIS DYNAMOMETER TORQUE CONTROL SYSTEM DESIGN BY DIRECT INVERSE COMPENSATION C.Matthews, P.Dickinson, A.T.Shenton Department of Engineering, The University of Liverpool, Liverpool L69 3GH, UK Abstract:

More information

Copyright 2002 by the Society of Photo-Optical Instrumentation Engineers.

Copyright 2002 by the Society of Photo-Optical Instrumentation Engineers. Copyright 22 by the Society of Photo-Optical Instrumentation Engineers. This paper was published in the proceedings of Optical Microlithography XV, SPIE Vol. 4691, pp. 98-16. It is made available as an

More information

PACS Nos v, Fc, Yd, Fs

PACS Nos v, Fc, Yd, Fs A Shear Force Feedback Control System for Near-field Scanning Optical Microscopes without Lock-in Detection J. W. P. Hsu *,a, A. A. McDaniel a, and H. D. Hallen b a Department of Physics, University of

More information

R. J. Jones Optical Sciences OPTI 511L Fall 2017

R. J. Jones Optical Sciences OPTI 511L Fall 2017 R. J. Jones Optical Sciences OPTI 511L Fall 2017 Semiconductor Lasers (2 weeks) Semiconductor (diode) lasers are by far the most widely used lasers today. Their small size and properties of the light output

More information

648. Measurement of trajectories of piezoelectric actuators with laser Doppler vibrometer

648. Measurement of trajectories of piezoelectric actuators with laser Doppler vibrometer 648. Measurement of trajectories of piezoelectric actuators with laser Doppler vibrometer V. Grigaliūnas, G. Balčiūnas, A.Vilkauskas Kaunas University of Technology, Kaunas, Lithuania E-mail: valdas.grigaliunas@ktu.lt

More information

The rapid evolution of

The rapid evolution of Shock Testing Miniaturized Products by George Henderson, GHI Systems Smaller product designs mandate changes in test systems and analysis methods. Don t be shocked by the changes. Figure 1. Linear Shock

More information

UNIVERSITY OF UTAH ELECTRICAL ENGINEERING DEPARTMENT LABORATORY PROJECT NO. 3 DESIGN OF A MICROMOTOR DRIVER CIRCUIT

UNIVERSITY OF UTAH ELECTRICAL ENGINEERING DEPARTMENT LABORATORY PROJECT NO. 3 DESIGN OF A MICROMOTOR DRIVER CIRCUIT UNIVERSITY OF UTAH ELECTRICAL ENGINEERING DEPARTMENT EE 1000 LABORATORY PROJECT NO. 3 DESIGN OF A MICROMOTOR DRIVER CIRCUIT 1. INTRODUCTION The following quote from the IEEE Spectrum (July, 1990, p. 29)

More information

Thermal tuning of volume Bragg gratings for high power spectral beam combining

Thermal tuning of volume Bragg gratings for high power spectral beam combining Thermal tuning of volume Bragg gratings for high power spectral beam combining Derrek R. Drachenberg, Oleksiy Andrusyak, Ion Cohanoschi, Ivan Divliansky, Oleksiy Mokhun, Alexei Podvyaznyy, Vadim Smirnov,

More information

Basic methods in imaging of micro and nano structures with atomic force microscopy (AFM)

Basic methods in imaging of micro and nano structures with atomic force microscopy (AFM) Basic methods in imaging of micro and nano P2538000 AFM Theory The basic principle of AFM is very simple. The AFM detects the force interaction between a sample and a very tiny tip (

More information

MICROMACHINED INTERFEROMETER FOR MEMS METROLOGY

MICROMACHINED INTERFEROMETER FOR MEMS METROLOGY MICROMACHINED INTERFEROMETER FOR MEMS METROLOGY Byungki Kim, H. Ali Razavi, F. Levent Degertekin, Thomas R. Kurfess G.W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta,

More information

Getting the Best Performance from Challenging Control Loops

Getting the Best Performance from Challenging Control Loops Getting the Best Performance from Challenging Control Loops Jacques F. Smuts - OptiControls Inc, League City, Texas; jsmuts@opticontrols.com KEYWORDS PID Controls, Oscillations, Disturbances, Tuning, Stiction,

More information

A novel tunable diode laser using volume holographic gratings

A novel tunable diode laser using volume holographic gratings A novel tunable diode laser using volume holographic gratings Christophe Moser *, Lawrence Ho and Frank Havermeyer Ondax, Inc. 85 E. Duarte Road, Monrovia, CA 9116, USA ABSTRACT We have developed a self-aligned

More information

Fibre Laser Doppler Vibrometry System for Target Recognition

Fibre Laser Doppler Vibrometry System for Target Recognition Fibre Laser Doppler Vibrometry System for Target Recognition Michael P. Mathers a, Samuel Mickan a, Werner Fabian c, Tim McKay b a School of Electrical and Electronic Engineering, The University of Adelaide,

More information

MEMS Optical Scanner "ECO SCAN" Application Notes. Ver.0

MEMS Optical Scanner ECO SCAN Application Notes. Ver.0 MEMS Optical Scanner "ECO SCAN" Application Notes Ver.0 Micro Electro Mechanical Systems Promotion Dept., Visionary Business Center The Nippon Signal Co., Ltd. 1 Preface This document summarizes precautions

More information

Advances in Silicon Technology Enables Replacement of Quartz-Based Oscillators

Advances in Silicon Technology Enables Replacement of Quartz-Based Oscillators Advances in Silicon Technology Enables Replacement of Quartz-Based Oscillators I. Introduction With a market size estimated at more than $650M and more than 1.4B crystal oscillators supplied annually [1],

More information

NEW LASER ULTRASONIC INTERFEROMETER FOR INDUSTRIAL APPLICATIONS B.Pouet and S.Breugnot Bossa Nova Technologies; Venice, CA, USA

NEW LASER ULTRASONIC INTERFEROMETER FOR INDUSTRIAL APPLICATIONS B.Pouet and S.Breugnot Bossa Nova Technologies; Venice, CA, USA NEW LASER ULTRASONIC INTERFEROMETER FOR INDUSTRIAL APPLICATIONS B.Pouet and S.Breugnot Bossa Nova Technologies; Venice, CA, USA Abstract: A novel interferometric scheme for detection of ultrasound is presented.

More information

Principles of Active Vibration Control: Basics of active vibration control methods

Principles of Active Vibration Control: Basics of active vibration control methods Principles of Active Vibration Control: Basics of active vibration control methods INTRODUCTION Vibration control is aimed at reducing or modifying the vibration level of a mechanical structure. Contrary

More information

Motion Solutions for Digital Pathology

Motion Solutions for Digital Pathology Parker Hannifin Electromechanical Dvision N. A. 1140 Sandy Hill Road Irwin, PA 1564203049 724-861-8200 www.parkermotion.com Motion Solutions for Digital Pathology By: Brian Handerhan and Jim Monnich Design

More information

Very High Frequency Calibration of Laser Vibrometer up to 350 khz

Very High Frequency Calibration of Laser Vibrometer up to 350 khz Very High Frequency Calibration of Laser Vibrometer up to 350 khz Requirements, Solutions and Traceability Dr. Martin Brucke, Frank Schulz There is simply no substitute for knowing what you re doing Jeff

More information

Wavelength Stabilization of HPDL Array Fast-Axis Collimation Optic with integrated VHG

Wavelength Stabilization of HPDL Array Fast-Axis Collimation Optic with integrated VHG Wavelength Stabilization of HPDL Array Fast-Axis Collimation Optic with integrated VHG C. Schnitzler a, S. Hambuecker a, O. Ruebenach a, V. Sinhoff a, G. Steckman b, L. West b, C. Wessling c, D. Hoffmann

More information

High-Coherence Wavelength Swept Light Source

High-Coherence Wavelength Swept Light Source Kenichi Nakamura, Masaru Koshihara, Takanori Saitoh, Koji Kawakita [Summary] Optical technologies that have so far been restricted to the field of optical communications are now starting to be applied

More information

Principles of operation 5

Principles of operation 5 Principles of operation 5 The following section explains the fundamental principles upon which Solartron Metrology s linear measurement products are based. > Inductive technology (gauging and displacement)

More information

Response spectrum Time history Power Spectral Density, PSD

Response spectrum Time history Power Spectral Density, PSD A description is given of one way to implement an earthquake test where the test severities are specified by time histories. The test is done by using a biaxial computer aided servohydraulic test rig.

More information

Active Vibration Control in Ultrasonic Wire Bonding Improving Bondability on Demanding Surfaces

Active Vibration Control in Ultrasonic Wire Bonding Improving Bondability on Demanding Surfaces Active Vibration Control in Ultrasonic Wire Bonding Improving Bondability on Demanding Surfaces By Dr.-Ing. Michael Brökelmann, Hesse GmbH Ultrasonic wire bonding is an established technology for connecting

More information

MAGNETIC LEVITATION SUSPENSION CONTROL SYSTEM FOR REACTION WHEEL

MAGNETIC LEVITATION SUSPENSION CONTROL SYSTEM FOR REACTION WHEEL IMPACT: International Journal of Research in Engineering & Technology (IMPACT: IJRET) ISSN 2321-8843 Vol. 1, Issue 4, Sep 2013, 1-6 Impact Journals MAGNETIC LEVITATION SUSPENSION CONTROL SYSTEM FOR REACTION

More information

hurryscan, hurryscan II

hurryscan, hurryscan II hurryscan, hurryscan II more Information at: universal and compatible These compact scan heads from SCANLAB provide optimal solutions for nearly all challenges found in industrial laser materials processing.

More information

Position Control of a Servopneumatic Actuator using Fuzzy Compensation

Position Control of a Servopneumatic Actuator using Fuzzy Compensation Session 1448 Abstract Position Control of a Servopneumatic Actuator using Fuzzy Compensation Saravanan Rajendran 1, Robert W.Bolton 2 1 Department of Industrial Engineering 2 Department of Engineering

More information

attosnom I: Topography and Force Images NANOSCOPY APPLICATION NOTE M06 RELATED PRODUCTS G

attosnom I: Topography and Force Images NANOSCOPY APPLICATION NOTE M06 RELATED PRODUCTS G APPLICATION NOTE M06 attosnom I: Topography and Force Images Scanning near-field optical microscopy is the outstanding technique to simultaneously measure the topography and the optical contrast of a sample.

More information

MEMS. Platform. Solutions for Microsystems. Characterization

MEMS. Platform. Solutions for Microsystems. Characterization MEMS Characterization Platform Solutions for Microsystems Characterization A new paradigm for MEMS characterization The MEMS Characterization Platform (MCP) is a new concept of laboratory instrumentation

More information

Multiply Resonant EOM for the LIGO 40-meter Interferometer

Multiply Resonant EOM for the LIGO 40-meter Interferometer LASER INTERFEROMETER GRAVITATIONAL WAVE OBSERVATORY - LIGO - CALIFORNIA INSTITUTE OF TECHNOLOGY MASSACHUSETTS INSTITUTE OF TECHNOLOGY LIGO-XXXXXXX-XX-X Date: 2009/09/25 Multiply Resonant EOM for the LIGO

More information

Laser Telemetric System (Metrology)

Laser Telemetric System (Metrology) Laser Telemetric System (Metrology) Laser telemetric system is a non-contact gauge that measures with a collimated laser beam (Refer Fig. 10.26). It measure at the rate of 150 scans per second. It basically

More information

Vibration Fundamentals Training System

Vibration Fundamentals Training System Vibration Fundamentals Training System Hands-On Turnkey System for Teaching Vibration Fundamentals An Ideal Tool for Optimizing Your Vibration Class Curriculum The Vibration Fundamentals Training System

More information

VeraPath Optical Encoder Technology

VeraPath Optical Encoder Technology TECHNICAL NOTES: OPTICAL TECHNOLOGIES VeraPath Optical Encoder Technology TN-1002 REV 160602 The Challenge MicroE s PurePrecision technology has enabled designers of precision motion control systems in

More information

HIGH PRECISION OPERATION OF FIBER BRAGG GRATING SENSOR WITH INTENSITY-MODULATED LIGHT SOURCE

HIGH PRECISION OPERATION OF FIBER BRAGG GRATING SENSOR WITH INTENSITY-MODULATED LIGHT SOURCE HIGH PRECISION OPERATION OF FIBER BRAGG GRATING SENSOR WITH INTENSITY-MODULATED LIGHT SOURCE Nobuaki Takahashi, Hiroki Yokosuka, Kiyoyuki Inamoto and Satoshi Tanaka Department of Communications Engineering,

More information

LINEAR MODELING OF A SELF-OSCILLATING PWM CONTROL LOOP

LINEAR MODELING OF A SELF-OSCILLATING PWM CONTROL LOOP Carl Sawtell June 2012 LINEAR MODELING OF A SELF-OSCILLATING PWM CONTROL LOOP There are well established methods of creating linearized versions of PWM control loops to analyze stability and to create

More information

Study on Repetitive PID Control of Linear Motor in Wafer Stage of Lithography

Study on Repetitive PID Control of Linear Motor in Wafer Stage of Lithography Available online at www.sciencedirect.com Procedia Engineering 9 (01) 3863 3867 01 International Workshop on Information and Electronics Engineering (IWIEE) Study on Repetitive PID Control of Linear Motor

More information

Frequency Noise Reduction of Integrated Laser Source with On-Chip Optical Feedback

Frequency Noise Reduction of Integrated Laser Source with On-Chip Optical Feedback MITSUBISHI ELECTRIC RESEARCH LABORATORIES http://www.merl.com Frequency Noise Reduction of Integrated Laser Source with On-Chip Optical Feedback Song, B.; Kojima, K.; Pina, S.; Koike-Akino, T.; Wang, B.;

More information

Optical RI sensor based on an in-fiber Bragg grating. Fabry-Perot cavity embedded with a micro-channel

Optical RI sensor based on an in-fiber Bragg grating. Fabry-Perot cavity embedded with a micro-channel Optical RI sensor based on an in-fiber Bragg grating Fabry-Perot cavity embedded with a micro-channel Zhijun Yan *, Pouneh Saffari, Kaiming Zhou, Adedotun Adebay, Lin Zhang Photonic Research Group, Aston

More information

MEMS for RF, Micro Optics and Scanning Probe Nanotechnology Applications

MEMS for RF, Micro Optics and Scanning Probe Nanotechnology Applications MEMS for RF, Micro Optics and Scanning Probe Nanotechnology Applications Part I: RF Applications Introductions and Motivations What are RF MEMS? Example Devices RFIC RFIC consists of Active components

More information

Chapter 5. Tracking system with MEMS mirror

Chapter 5. Tracking system with MEMS mirror Chapter 5 Tracking system with MEMS mirror Up to now, this project has dealt with the theoretical optimization of the tracking servo with MEMS mirror through the use of simulation models. For these models

More information

Contents: Movement & Positioning News M&P 23, 1997, Text Only Version

Contents: Movement & Positioning News M&P 23, 1997, Text Only Version Contents: Sub-Nanometer Measurements Revolutionary 6-Axis Manipulator Hexapod Robot Improved Digital Piezo Controller Modular PZT Flexure Stages PZT Multilayer Benders for Fiberoptic Switching Windows

More information

THE BENEFITS OF DSP LOCK-IN AMPLIFIERS

THE BENEFITS OF DSP LOCK-IN AMPLIFIERS THE BENEFITS OF DSP LOCK-IN AMPLIFIERS If you never heard of or don t understand the term lock-in amplifier, you re in good company. With the exception of the optics industry where virtually every major

More information

Stabilizing an Interferometric Delay with PI Control

Stabilizing an Interferometric Delay with PI Control Stabilizing an Interferometric Delay with PI Control Madeleine Bulkow August 31, 2013 Abstract A Mach-Zhender style interferometric delay can be used to separate a pulses by a precise amount of time, act

More information

Simple interferometric fringe stabilization by CCD-based feedback control

Simple interferometric fringe stabilization by CCD-based feedback control Simple interferometric fringe stabilization by CCD-based feedback control Preston P. Young and Purnomo S. Priambodo, Department of Electrical Engineering, University of Texas at Arlington, P.O. Box 19016,

More information

Optical Communications and Networking 朱祖勍. Sept. 25, 2017

Optical Communications and Networking 朱祖勍. Sept. 25, 2017 Optical Communications and Networking Sept. 25, 2017 Lecture 4: Signal Propagation in Fiber 1 Nonlinear Effects The assumption of linearity may not always be valid. Nonlinear effects are all related to

More information

Laser Diode. Photonic Network By Dr. M H Zaidi

Laser Diode. Photonic Network By Dr. M H Zaidi Laser Diode Light emitters are a key element in any fiber optic system. This component converts the electrical signal into a corresponding light signal that can be injected into the fiber. The light emitter

More information

Experiment 1: Amplifier Characterization Spring 2019

Experiment 1: Amplifier Characterization Spring 2019 Experiment 1: Amplifier Characterization Spring 2019 Objective: The objective of this experiment is to develop methods for characterizing key properties of operational amplifiers Note: We will be using

More information

Non-contact Measurement of Quality Factor for Monolithic Cylindrical Fused Silica Resonators

Non-contact Measurement of Quality Factor for Monolithic Cylindrical Fused Silica Resonators Joint International Information Technology, Mechanical and Electronic Engineering Conference (JIMEC 6) Non-contact Measurement of Quality Factor for Monolithic Cylindrical Fused Silica Resonators Dongya

More information

A tunable Si CMOS photonic multiplexer/de-multiplexer

A tunable Si CMOS photonic multiplexer/de-multiplexer A tunable Si CMOS photonic multiplexer/de-multiplexer OPTICS EXPRESS Published : 25 Feb 2010 MinJae Jung M.I.C.S Content 1. Introduction 2. CMOS photonic 1x4 Si ring multiplexer Principle of add/drop filter

More information

Suppression of Stimulated Brillouin Scattering

Suppression of Stimulated Brillouin Scattering Suppression of Stimulated Brillouin Scattering 42 2 5 W i de l y T u n a b l e L a s e r T ra n s m i t te r www.lumentum.com Technical Note Introduction This technical note discusses the phenomenon and

More information

Small, Low Power, High Performance Magnetometers

Small, Low Power, High Performance Magnetometers Small, Low Power, High Performance Magnetometers M. Prouty ( 1 ), R. Johnson ( 1 ) ( 1 ) Geometrics, Inc Summary Recent work by Geometrics, along with partners at the U.S. National Institute of Standards

More information

CHAPTER 6 INTRODUCTION TO SYSTEM IDENTIFICATION

CHAPTER 6 INTRODUCTION TO SYSTEM IDENTIFICATION CHAPTER 6 INTRODUCTION TO SYSTEM IDENTIFICATION Broadly speaking, system identification is the art and science of using measurements obtained from a system to characterize the system. The characterization

More information

Description of options, upgrades and accessories for the laser beam stabilization system Compact

Description of options, upgrades and accessories for the laser beam stabilization system Compact Description of options, upgrades and accessories for the laser beam stabilization system Compact The basic configuration of the Compact laser beam stabilization system is fully equipped for stabilization

More information