Development of High-peak Power Yb-doped Fiber Laser in Large Core Fiber

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1 Development of High-peak Power Yb-doped Fiber Laser in Large Core Fiber Institute of Laser Engineering Osaka University Hidetsugu Yoshida Koji Tsubakimoto Hisanori Fujita Masahiro Nakatsuka Noriaki Miyanaga 1

2 Contents High average power LD-pumped YAG lasers for EUV lithography Development of high-peak and high-average power Yb-doped large-core fiber laser system. (1) Background. (2) Front-end laser system of single-mode and polarization-maintain Yb fiber laser. (3) Several large-core fiber amplifiers (a) Yb-doped large core fiber with second air-hole cladding (63/590µm m and 68/590µm) (b) Yb-doped LMA fiber (90/140/400µm) (4) Conclusion 2

3 Yb-doped Regenerative amplifier replace to Yb -doped fiber laser for high average Nd:YAG Nd:YAG laser Fiber Amp. Fiber Amp. Pre Amp 5W 20 W Reg.Amp Fiber Osc. (Regen. Amp) Fiber Front-end 2 x 4 mm Rod, 2 pass Main Amp. 8 x 10/13 mm Composite Rod 5000 W /SBS Pulse Compression /Control of Focus Pattern to Target Chamber 3

4 Output Power (W) Output power characteristics of high average Nd:YAG laser Input Pulse : 100 khz, 10 ns Pumping : ON/OFF =40/160 ms, 5 Hz, 20 % Duty Pump power 30.4kW Pump power 28.8kW Output power 5.24 kw O-O Efficiency 17.2% NFP FFP D=10mm Input Power (W) DL x 2.7 (F=28) 4

5 Front-end laser system of single-mode and polarization-maintain Yb fiber laser 1030 nm FBG-FL 1053 nm FBG-FL 1064nm FBG-FL 1080 nm FBG-FL LN Modulator 20 ns µ Pulse shape control 13 GHz 100-ps step Yb:fiber 20m µ 980 nm LD 325 mw Output khz Power monitor Temp. control. 980 nm LD 200 mw Yb:fiber 20m Yb:fiber 20m Power monitor 980 nm LD 325 mw 980 nm LD 325 mw 980 nm LD 325 mw 5

6 Generation system for optional pulse shape Generation system of optional pulse shape Yb:fiber laser system Output 6

7 Generation of optional laser pulse corresponding to electrical pulse shape PC Electrical pulse Laser pulse (a) (b) (c) 7

8 Comparison with regenerative amplifier Yb-doped and Yb -doped LMA fiber laser Yb:fiber(LMA) amplifier Regenerative amp. + Pre amp. Reg. output 5W(1mJ, 5kHz) Now : Output 120W (1.2mJ, 100kHz) Pre-amp W (0.3mJ, 100kHz) In future: Output 300W (3-5mJ, kHz) Repetition rate Pulse duration Beam quality Efficiency 5kHz (PC limit) 3 ns (cavity length) good(m2=1.5-2) low 1-100kHz (Repetitious) Optional pulse shape and width (1-100ns) Excellent (M2=1.1) High 8

9 Experimental layout of Yb-doped LMA and MMF fiber amplifiers Yb fiber laser system Isolator Input power 10mW(10nJ, 100kHz) t=3.2, 10, 30 ns PM-Yb fiber LMA 30µm/400µm L=4.3m 10W LD 978nm, 100W 915nm, 200W Optical stage Optical stage Isolator H.W. Plate LD 978nm 30 W Yb fiber (1) PCF-MMF 63,68/590µm L=6 m (2) LMA90/140/400µm L=2.8 m 100W(1mJx100kHz) 9

10 High power operation of PM-Yb LMA(30/400µm) fiber amplifier λ p =975nm, L=4.2m,D=100mm, NA0.06 Absorption13dB Output power (W) nm 1064 nm 1080 nm Max.output 30W t=10 ns 300µJ / pulse 100kHz X 1.1 D.L LD input power (W) 10

11 Laser output spectrum and polarization degree of PM-Yb LMA(30/400µm) fiber amplifier 10-2 Contrast ratio = 1: 95 1/95 Intensity (a.u.) dB Intensity (a.u.) Wavelength (nm) Rotation angle (degree) 11

12 Experimental layout of Yb-doped LMA and MMF fiber amplifiers Yb fiber laser system Isolator Input power 10mW(10nJ, 100kHz) t=3.2, 10, 30 ns PM-Yb fiber LMA 30µm/400µm L=4.3m 10W LD 978nm, 100W 915nm, 200W Optical stage Optical stage Isolator H.W. Plate LD 978nm 30 W Yb fiber (1) PCF- MMF63,68/590µm L=6 m (2) LMA90/140/400µm L=2.8 m 100W(1mJx100kHz) 12

13 High power operation of 63/590µm m MMF fiber amplifier λ p =915nm, L=6m, D=250mm, NA0.11, Absorption12dB(93.7%) Output power (W) Input power 0.1 W 0.8 W 1.4 W λ=1064nm, 15, 30ns, 100kHz Max.output 122 W Max.energy 1.2 mj Efficiency 73 % 1st cladding Core 63µm 2nd cladding µm Absorbed LD power (W) 13

14 High power operation of 68/590µm m MMF fiber amplifier λ p =915nm, L=6.4m, D=250mm,NA0.07, Absorption 7.7dB (82.9%) Output power (W) Input power 0.2 W 1.0 W 1.5 W λ=1064nm, 15ns, 100kHz 1st cladding Max.output 98 W Max.energy 0.98 mj Efficiency 67 % 20 2nd cladding Core 68µm 590µm Absorbed LD power (W) 14

15 High energy operation of 68/590µm m MMF fiber amplifier λ p =915nm, L=6.4m, D=250mm, NA0.07, Absorption7.7dB (82.9%) Output energy (mj/pulse) kHz 75kHz 50kHz λ=1064nm, 15ns, 100kHz 1.85mJ 1.2mJ 1 mj Max.energy 1.85 mj 50 khz Absorbed LD power (W) 15

16 High power operation of 90/140/400µm 90/140/400µm LMA fiber amplifier (I) λp=975nm, L=2.8m,D=150mm, NA0.06 Absorption49.5dB(99.9%) Max. output : 37W, Efficiency: 54%, Max. gain: Input W 1.76 W 4.2 W 6.0 W Output power (W) µm Clad 400µm 25 NFP Core 140µm 20 FFP 15 D.L. x LD pump power (W)

17 High power operation for 90/140/400µm m LMA fiber amplifier (II) λ p =975nm, L=2.8m,D=150mm, NA0.06 Absorption49.5dB(99.9%) Peak power / pulse (kw) mj (460kW) 4.6mJ (160kW) 3 ns 10 ns 30 ns 1.6mJ (500kW) Q-SW YAG 20W( ns) IPG(40mJ,500ns,12.5kHz) Laser damage SPI Pulse waveforms 3.2ns 10 ns 29 ns Repetition rate (khz) 17

18 Output beam quality dependence on several core NA-values and diameters. Nmode=V2/4 =(πdnacore/λ)2 / 4 LMA; 2.4 < V < 5 Core diameter (µm) High power laser Single mode mode 0.1 Core NA Telecom

19 Output energy per pulse in the world Max. output energy 82mJ, Average power 500W. Output energy (mj) W, Mitsubishi(24mJ, 2kHz) 0.24W(9.6mJ, 25Hz) 200W, IPG(10mJ,20kHz) 120W(6mJ, 20kHz) 12W, Jena (4mJ, 3kHz) 23W, (4.6mJ,5kHz) 200µm 100µm 50µm 30µm U. Michigan 2W(82mJ, 25Hz) 0.68W(27mJ, 25Hz) 500W, IPG(40mJ,12.5kHz) 16W, (1.6mJ,10kHz) 122W, (1.2mJ,100kHz) 59W, (0.59mJ,100kHz) 30W, (0.3mJ,100kHz) Pulse width (ns) 1.15W, Southampton (2.3mJ, 500Hz) 100W, Jena (2mJ, 50kHz) 19

20 Conclusion Development of high-peak and high-average power Yb doped large core fiber laser system. (1) Front-end laser system of single-mode and polarization-maintain Yb fiber laser. (a) (a) Four wavelengths of 1030, 1053, 1064 and 1080 nm (b) Generation of optional pulse shapes (c) Output power over 30W (300µJ, 100kHz) (2) Several large-core fiber amplifiers (a) Yb: MMF(63/590mm) Output power 122W(10-15ns,1.2mJ,100kHz), Efficiency 73% (b) Yb:MMA(68/590mm) Output power 98W(10ns,100kHz), Efficiency 67% Max. output energy 1.85mJ(50kHz) (c) Yb:LMA(90/140/400mm) Output power 37W(10ns,100kHz) D.L. x 1.3 Max. output energy 4.6mJ(10,30 ns at 5kHz) Max. peak power 500kW(3.2 ns) 20

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