SUPPLEMENTARY INFORMATION
|
|
- Victor Neal
- 5 years ago
- Views:
Transcription
1 Transfer printing stacked nanomembrane lasers on silicon Hongjun Yang 1,3, Deyin Zhao 1, Santhad Chuwongin 1, Jung-Hun Seo 2, Weiquan Yang 1, Yichen Shuai 1, Jesper Berggren 4, Mattias Hammar 4, Zhenqiang Ma 2*, and Weidong Zhou 1* 1 Department of Electrical Engineering, NanoFAB Center, University of Texas at Arlington, TX 76019, USA 2 Department of Electrical and Computer Engineering, University of Wisconsin-Madison, WI 53706, USA 3 Semerane, Inc., 202 E. Border St., Suite 149, Arlington, TX 76010, USA 4 KTH-Royal Institute of Technology, School of Information and Communication Technology, Electrum 229, Kista, Sweden * s: mazq@engr.wisc.edu; wzhou@uta.edu Supplemental Information (SI) NATURE PHOTONICS 1
2 Supplemental Information (SI) I. Fabrication process The MR-VCSEL devices were constructed on Si substrates with transfer-printing stacked multiple layers by sandwiching an InGaAsP QW active layer in between two single layer Si membrane reflectors (top and bottom Si-MRs). The fabrication process of MR-VCSEL is illustrated in Figure S1 schematically. High quality patterned photonic crystal Si reflectors were fabricated via e-beam lithography and reactive ion etching (RIE) process on SOI substrates purchased from Soitec, with 340 nm Si device layer and 2 µm buried oxide (BOX) SiO 2 layer. A low-index PECVD SiO 2 layer was then deposited on the top of the patterned Si to form the bottom MR. The PDMS stamp based transfer printing process is used and optimized for inking and printing patterned photonic crystal Si NMs with high hole-to-neck ratios. The PDMS stamp is made of SYLGARD 184 silicone elastomer with an optimized mixing ratio between lot-matched base and curing agent. After thoroughly mixing the base and the curing agents, the air introduced during the mixing step is reduced by gentle agitation. After pouring the mixture into a pre-cleaned mold container, a vacuum de-airing process is applied. A final PDMS stamp is then formed after a two-hour curing step in an oven at about 70 o C. Previous studies have been carried out in detail to understand the kinetics of peeling an elastomer layer (PDMS stamp) off a rigid substrate (NMs). 1,2 Employing the PDMS stamp based transfer printing process, various types of crystalline semiconductor materials have been successfully transferred onto foreign substrates. 3-6 Here we used our PDMS stamps to transfer InGaAsP QW active layer and disks to the SiO 2 layer coated on top of the bottom Si MR. The top MR was patterned and released from SOI substrates. 2 NATURE PHOTONICS
3 SUPPLEMENTARY INFORMATION Using the PDMS stamp printing transfer process, the top MR was transfer printed to a transparent glass substrate. The top Si MR attached to the glass substrate was then transferred to the top of the InGaAsP QW disks to complete the MR-VCSEL device fabrication. Both the top MR and the bottom MR are in the form of a single piece, while the InGaAsP disks are separated from each other, forming an array of disks. Note: the transfer printing method that was employed in this work is readily scalable to full wafer size. Figure S1 MR-VCSEL fabrication based on nanomembrane (NM) PDMS stamp printing process. a, Schematic illustration of multi-layer PDMS transfer printing process for the formation of a MR-VCSEL array. b, Schematic of a complete, individual MR-VCSEL device. II. MR-VCSEL Cavity Design In order to achieve lasing with a low threshold, it is highly desirable to design MR- VCSEL cavity with the following characteristics: (a) The cavity mode should spectrally match well with that of the QW peak; (b) The cavity mode should have an optimal field distribution for spatial matching with the QW active region; (c) The cavity mode optical confinement factor should be maximized to enable low gain threshold requirements; and NATURE PHOTONICS 3
4 (d) The cavity should be designed such that the waveguide mode should be spectrally separated from the cavity mode. Figure S2 Characteristics of the designed MR-VCSEL cavity. a, MR-VCSEL cavity structure configuration, where t 0 = 2 m, t 1 = t 5 = 340 nm, t 3 = 465 nm, t 2 = t 4 = 400 nm, and glass substrate t 6. b, Simulated reflection spectra for top (R t ) and bottom (R b ) MRs. c, Calculated cavity resonance mode based on cavity reflection (solid blue line) and phase resonant conditions (dashed red line). d, Field distribution of cavity mode (red), along with index profile in the cavity (blue). Figure S2(a) shows the schematic of a MR-VCSEL cavity under investigation. The cavity consists of six different layers (t 1 to t 6 ), sitting on top of a SOI substrate with SiO 2 BOX layer thickness of t 0. Using the InGaAsP QW cavity and the top and the bottom MRs fabricated from the Soitec SOI structure, the following parameters are fixed in our design: t 0 = 2 μm, t 1 = t 5 = 340 nm, and t 3 = 465 nm. The photonic crystal (PC) lattice 4 NATURE PHOTONICS
5 SUPPLEMENTARY INFORMATION parameters of the top and the bottom MRs are optimized during the MR design. For the cavity case shown in Figure S2, the square lattice PC structures have a lattice constant a = 860 nm for both the top and the bottom MRs. However, different air hole radii are used, with r = 0.46a and r = 0.45a, for the top and the bottom MR, respectively. Considering the partial filling of oxide inside the air holes by PECVD, an effective index of n f = 1.2 was used here, which offers the best matching between the measured and the simulated reflection spectra. 7,8 The low index oxide buffer layer thicknesses t 2 and t 4 were optimized through our design process. A glass substrate was also incorporated in the design (layer t 6 ). Both infinite and finite structures were simulated using periodic boundary condition (PBC) and perfect matched layer condition (PML). Shown in Figure S2(b) are the demonstrations of the reflection characteristics of the top and bottom MRs, where high reflection (>98%) covers a wavelength range of 1420 to 1530 nm. Two different techniques were employed here to identify the cavity mode. The first one is the calculation of the reflection of the complete cavity structure. From the reflection dip located at the high reflection band range, we can find the cavity mode according to its resonant transmission property. The reflection of MR-VCSEL with t 2 = t 4 = 400 nm is plotted in Figure S2(c) (the blue line), which is calculated using Rigorous Coupled-Wave Analysis (RCWA) technique. The reflection dip is located at 1478 nm. To confirm this cavity mode, different method was employed based on the phase resonant condition (total phase change of one round-trip in cavity is equal to integer times of 2 ). The phase calculation details can be found in Ref. 9. After obtaining the reflection phase change ( ) of the top and the bottom MR, the resonant cavity mode can be decided. The NATURE PHOTONICS 5
6 phase of the mode in the cavity is shown in Figure S2(c), which is plotted in the red dash dotted line. One can find that the mode located at 1478 nm has a 2 phase change. Finally, we investigated the properties of quality factor and field distribution of this cavity mode. By employing FDTD technique, a short temporal Gaussian pulse is used to excite the cavity mode. The quality factor of the cavity mode at 1478 nm is calculated to be 4,300. Then a longer temporal Gaussian pulse is used to excite only this cavity mode and the stable field is recorded after the source is turned off for a long time. The E-field of the standing wave distribution is demonstrated in Figure S2(d), where the cavity index profile is also plotted. The confinement factor is calculated to be Γ = 5.6% - 6%. This value is comparable to the confinement factor of conventional DBR-based VCSEL structures. Based on rate equation analysis and the field penetration characteristics of MRs, 9 the gain threshold for the MR-VCSEL is ~843 cm -1, assuming top and bottom MR reflectivities of 98.2% and 99.6%, respectively. III. MR-VCSEL Optical Characterization and Output Power Optically-pumped MR-VCSELs were characterized with a 320 mm focal length monochrometer based photoluminescence (PL) setup. The MR-VCSEL sample was mounted inside a cryostat with ambient temperature control from T = 10 K to T = 300 K. A continuous wave (c.w.) green laser (532 nm wavelength) was launched surface-normal onto the MR-VCSEL via a long working distance objective lens. Notice that the optical pump power was calibrated as the incident power onto MR-VCSEL, assuming the lasing beam size is similar or smaller than the MR-VCSEL lateral dimension (~100 m). The actual power absorbed by the lasing cavity may be smaller, considering the top mirror reflection, and the QW absorption layer thickness. The use of 532 nm c.w. laser as the 6 NATURE PHOTONICS
7 SUPPLEMENTARY INFORMATION pumping laser source also induces excessive energy loss (heat) on MR-VCSEL cavity region, which leads to increased lasing threshold and reduced power efficiency. Light emitted from the MR-VCSEL was collected via the same long working distance objective lens and separated with a cold mirror (which passes 1550 nm infrared light and reflects 532 nm visible light). Light output spectra were collected for different pumping power levels at different ambient temperatures. The lasing peak power was taken as the output power. In order to estimate the output power levels, a 1550 nm commercial DFB laser source was placed at the sample location and the output of the DFB laser was launched into the PL setup, while keeping the same optical configuration as that of the MR-VCSEL light collection. Based on the correlation between the lock-in amplifier readout and the actual lasing power of the 1550 nm DFB laser, we estimated the output power of the MR-VCSEL by using the output of the lock-in amplifier. References 1 Meitl, M. et al. Transfer printing by kinetic control of adhesion to an elastomeric stamp. Nature Mater. 5, (2005). 2 Rogers, J. A., Someya, T. & Huang, Y. Materials and mechanics for stretchable electronics. Science 327, 1603 (2010). 3 Yuan, H. C. & Ma, Z. Microwave thin-film transistors using Si nanomembranes on flexible polymer substrate. Appl. Phys. Lett. 89, (2006). 4 Zhou, W. et al. J. Phys. D. 42, (2009). NATURE PHOTONICS 7
8 5 Sun, L. et al. Flexible electronics: 12 GHz Thin Film Transistors on Transferrable Silicon Nanomembranes for High Performance Flexible Electronics (Small 22/2010). Small 6, 2473 (2010). 6 Yoon, J. et al. GaAs photovoltaics and optoelectronics using releasable multilayer epitaxial assemblies. Nature 465, (2010). 7 Yang, H. et al. Resonance control of membrane reflectors with effective index engineering. Appl. Phys. Lett. 95, (2009). 8 Qiang, Z. et al. Design of Fano Broadband Reflectors on SOI. Photonics Technology Letters, IEEE 22, (2010). 9 Zhao, D., Ma, Z. & Zhou, W. Field penetrations in photonic crystal Fano reflectors. Opt. Express 18, (2010). 8 NATURE PHOTONICS
Printed Large-Area Single-Mode Photonic Crystal Bandedge Surface- Emitting Lasers on Silicon
Printed Large-Area Single-Mode Photonic Crystal Bandedge Surface- Emitting Lasers on Silicon Deyin Zhao a, Shihchia Liu a, Hongjun Yang, Zhenqiang Ma, Carl Reuterskiöld-Hedlund 3, Mattias Hammar 3, and
More informationSupplementary information for Stretchable photonic crystal cavity with
Supplementary information for Stretchable photonic crystal cavity with wide frequency tunability Chun L. Yu, 1,, Hyunwoo Kim, 1, Nathalie de Leon, 1,2 Ian W. Frank, 3 Jacob T. Robinson, 1,! Murray McCutcheon,
More informationSUPPLEMENTARY INFORMATION
Room-temperature continuous-wave electrically injected InGaN-based laser directly grown on Si Authors: Yi Sun 1,2, Kun Zhou 1, Qian Sun 1 *, Jianping Liu 1, Meixin Feng 1, Zengcheng Li 1, Yu Zhou 1, Liqun
More informationHeterogeneously Integrated InGaAs and Si Membrane Four-Color Photodetector Arrays
Heterogeneously Integrated InGaAs and Si Membrane Four-Color Photodetector Arrays Volume 8, Number 2, April 2016 Laxmy Menon Hongjun Yang, Member, IEEE Sang June Cho Solomon Mikael, Member, IEEE Zhenqiang
More informationDesign and Analysis of Resonant Leaky-mode Broadband Reflectors
846 PIERS Proceedings, Cambridge, USA, July 6, 8 Design and Analysis of Resonant Leaky-mode Broadband Reflectors M. Shokooh-Saremi and R. Magnusson Department of Electrical and Computer Engineering, University
More informationSUPPLEMENTARY INFORMATION
Room-temperature InP distributed feedback laser array directly grown on silicon Zhechao Wang, Bin Tian, Marianna Pantouvaki, Weiming Guo, Philippe Absil, Joris Van Campenhout, Clement Merckling and Dries
More informationCavity QED with quantum dots in semiconductor microcavities
Cavity QED with quantum dots in semiconductor microcavities M. T. Rakher*, S. Strauf, Y. Choi, N.G. Stolz, K.J. Hennessey, H. Kim, A. Badolato, L.A. Coldren, E.L. Hu, P.M. Petroff, D. Bouwmeester University
More informationVertical External Cavity Surface Emitting Laser
Chapter 4 Optical-pumped Vertical External Cavity Surface Emitting Laser The booming laser techniques named VECSEL combine the flexibility of semiconductor band structure and advantages of solid-state
More informationWaveguiding in PMMA photonic crystals
ROMANIAN JOURNAL OF INFORMATION SCIENCE AND TECHNOLOGY Volume 12, Number 3, 2009, 308 316 Waveguiding in PMMA photonic crystals Daniela DRAGOMAN 1, Adrian DINESCU 2, Raluca MÜLLER2, Cristian KUSKO 2, Alex.
More informationGuided resonance reflective phase shifters
Guided resonance reflective phase shifters Yu Horie, Amir Arbabi, and Andrei Faraon T. J. Watson Laboratory of Applied Physics, California Institute of Technology, 12 E. California Blvd., Pasadena, CA
More informationQuantum-Well Semiconductor Saturable Absorber Mirror
Chapter 3 Quantum-Well Semiconductor Saturable Absorber Mirror The shallow modulation depth of quantum-dot saturable absorber is unfavorable to increasing pulse energy and peak power of Q-switched laser.
More informationCHAPTER 2 POLARIZATION SPLITTER- ROTATOR BASED ON A DOUBLE- ETCHED DIRECTIONAL COUPLER
CHAPTER 2 POLARIZATION SPLITTER- ROTATOR BASED ON A DOUBLE- ETCHED DIRECTIONAL COUPLER As we discussed in chapter 1, silicon photonics has received much attention in the last decade. The main reason is
More informationSupplementary Materials for
advances.sciencemag.org/cgi/content/full/3/4/e1602570/dc1 Supplementary Materials for Toward continuous-wave operation of organic semiconductor lasers Atula S. D. Sandanayaka, Toshinori Matsushima, Fatima
More informationHybrid vertical-cavity laser integration on silicon
Invited Paper Hybrid vertical-cavity laser integration on Emanuel P. Haglund* a, Sulakshna Kumari b,c, Johan S. Gustavsson a, Erik Haglund a, Gunther Roelkens b,c, Roel G. Baets b,c, and Anders Larsson
More informationMode analysis of Oxide-Confined VCSELs using near-far field approaches
Annual report 998, Dept. of Optoelectronics, University of Ulm Mode analysis of Oxide-Confined VCSELs using near-far field approaches Safwat William Zaki Mahmoud We analyze the transverse mode structure
More informationSilicon-based photonic crystal nanocavity light emitters
Silicon-based photonic crystal nanocavity light emitters Maria Makarova, Jelena Vuckovic, Hiroyuki Sanda, Yoshio Nishi Department of Electrical Engineering, Stanford University, Stanford, CA 94305-4088
More informationIntroduction Fundamentals of laser Types of lasers Semiconductor lasers
ECE 5368 Introduction Fundamentals of laser Types of lasers Semiconductor lasers Introduction Fundamentals of laser Types of lasers Semiconductor lasers How many types of lasers? Many many depending on
More information2. Pulsed Acoustic Microscopy and Picosecond Ultrasonics
1st International Symposium on Laser Ultrasonics: Science, Technology and Applications July 16-18 2008, Montreal, Canada Picosecond Ultrasonic Microscopy of Semiconductor Nanostructures Thomas J GRIMSLEY
More informationLecture 6 Fiber Optical Communication Lecture 6, Slide 1
Lecture 6 Optical transmitters Photon processes in light matter interaction Lasers Lasing conditions The rate equations CW operation Modulation response Noise Light emitting diodes (LED) Power Modulation
More informationSpatial Investigation of Transverse Mode Turn-On Dynamics in VCSELs
Spatial Investigation of Transverse Mode Turn-On Dynamics in VCSELs Safwat W.Z. Mahmoud Data transmission experiments with single-mode as well as multimode 85 nm VCSELs are carried out from a near-field
More informationplasmonic nanoblock pair
Nanostructured potential of optical trapping using a plasmonic nanoblock pair Yoshito Tanaka, Shogo Kaneda and Keiji Sasaki* Research Institute for Electronic Science, Hokkaido University, Sapporo 1-2,
More informationSUPPLEMENTARY INFORMATION
Electrically pumped continuous-wave III V quantum dot lasers on silicon Siming Chen 1 *, Wei Li 2, Jiang Wu 1, Qi Jiang 1, Mingchu Tang 1, Samuel Shutts 3, Stella N. Elliott 3, Angela Sobiesierski 3, Alwyn
More informationOptodevice Data Book ODE I. Rev.9 Mar Opnext Japan, Inc.
Optodevice Data Book ODE-408-001I Rev.9 Mar. 2003 Opnext Japan, Inc. Section 1 Operating Principles 1.1 Operating Principles of Laser Diodes (LDs) and Infrared Emitting Diodes (IREDs) 1.1.1 Emitting Principles
More informationOptoelectronics ELEC-E3210
Optoelectronics ELEC-E3210 Lecture 4 Spring 2016 Outline 1 Lateral confinement: index and gain guiding 2 Surface emitting lasers 3 DFB, DBR, and C3 lasers 4 Quantum well lasers 5 Mode locking P. Bhattacharya:
More informationInfluence of dielectric substrate on the responsivity of microstrip dipole-antenna-coupled infrared microbolometers
Influence of dielectric substrate on the responsivity of microstrip dipole-antenna-coupled infrared microbolometers Iulian Codreanu and Glenn D. Boreman We report on the influence of the dielectric substrate
More informationSemiconductor Lasers Semiconductors were originally pumped by lasers or e-beams First diode types developed in 1962: Create a pn junction in
Semiconductor Lasers Semiconductors were originally pumped by lasers or e-beams First diode types developed in 1962: Create a pn junction in semiconductor material Pumped now with high current density
More informationSurface-Emitting Single-Mode Quantum Cascade Lasers
Surface-Emitting Single-Mode Quantum Cascade Lasers M. Austerer, C. Pflügl, W. Schrenk, S. Golka, G. Strasser Zentrum für Mikro- und Nanostrukturen, Technische Universität Wien, Floragasse 7, A-1040 Wien
More informationInGaAsP photonic band gap crystal membrane microresonators*
InGaAsP photonic band gap crystal membrane microresonators* A. Scherer, a) O. Painter, B. D Urso, R. Lee, and A. Yariv Caltech, Laboratory of Applied Physics, Pasadena, California 91125 Received 29 May
More informationphotolithographic techniques (1). Molybdenum electrodes (50 nm thick) are deposited by
Supporting online material Materials and Methods Single-walled carbon nanotube (SWNT) devices are fabricated using standard photolithographic techniques (1). Molybdenum electrodes (50 nm thick) are deposited
More informationUltralow-power all-optical RAM based on nanocavities
Supplementary information SUPPLEMENTARY INFORMATION Ultralow-power all-optical RAM based on nanocavities Kengo Nozaki, Akihiko Shinya, Shinji Matsuo, Yasumasa Suzaki, Toru Segawa, Tomonari Sato, Yoshihiro
More informationPhotonic crystal lasers in InGaAsP on a SiO 2 /Si substrate and its thermal impedance
Photonic crystal lasers in InGaAsP on a SiO 2 /Si substrate and its thermal impedance M. H. Shih, Adam Mock, M. Bagheri, N.-K. Suh, S. Farrell, S.-J. Choi, J. D. O Brien, and P. D. Dapkus Department of
More informationTwo bit optical analog-to-digital converter based on photonic crystals
Two bit optical analog-to-digital converter based on photonic crystals Binglin Miao, Caihua Chen, Ahmed Sharkway, Shouyuan Shi, and Dennis W. Prather University of Delaware, Newark, Delaware 976 binglin@udel.edu
More informationHigh-efficiency, high-speed VCSELs with deep oxidation layers
Manuscript for Review High-efficiency, high-speed VCSELs with deep oxidation layers Journal: Manuscript ID: Manuscript Type: Date Submitted by the Author: Complete List of Authors: Keywords: Electronics
More information12-GHz Thin-Film Transistors on Transferrable Silicon Nanomembranes for High-Performance Flexible Electronics
Flexible electronics 1-GHz Thin-Film Transistors on Transferrable Silicon Nanomembranes for High-Performance Flexible Electronics Lei Sun, Guoxuan Qin, Jung-Hun Seo, George K. Celler, Weidong Zhou, and
More informationSupporting Information: Achromatic Metalens over 60 nm Bandwidth in the Visible and Metalens with Reverse Chromatic Dispersion
Supporting Information: Achromatic Metalens over 60 nm Bandwidth in the Visible and Metalens with Reverse Chromatic Dispersion M. Khorasaninejad 1*, Z. Shi 2*, A. Y. Zhu 1, W. T. Chen 1, V. Sanjeev 1,3,
More informationDesign, Simulation and optimization of Midinfrared Ultra broadband HCG mirrors for 2.3µm VCSELs
International Research Journal of Applied and Basic Sciences 2014 Available online at www.irjabs.com ISSN 2251-838X / Vol, 8 (9): 1180-1186 Science Explorer Publications Design, Simulation and optimization
More informationFabrication of High-Speed Resonant Cavity Enhanced Schottky Photodiodes
Fabrication of High-Speed Resonant Cavity Enhanced Schottky Photodiodes Abstract We report the fabrication and testing of a GaAs-based high-speed resonant cavity enhanced (RCE) Schottky photodiode. The
More informationReview of Semiconductor Physics
Review of Semiconductor Physics k B 1.38 u 10 23 JK -1 a) Energy level diagrams showing the excitation of an electron from the valence band to the conduction band. The resultant free electron can freely
More informationSUPPLEMENTARY INFORMATION
SUPPLEMENTARY INFORMATION Supplementary Information Real-space imaging of transient carrier dynamics by nanoscale pump-probe microscopy Yasuhiko Terada, Shoji Yoshida, Osamu Takeuchi, and Hidemi Shigekawa*
More informationRobert G. Hunsperger. Integrated Optics. Theory and Technology. Sixth Edition. 4ü Spri rineer g<
Robert G. Hunsperger Integrated Optics Theory and Technology Sixth Edition 4ü Spri rineer g< 1 Introduction 1 1.1 Advantages of Integrated Optics 2 1.1.1 Comparison of Optical Fibers with Other Interconnectors
More informationIntegrated Focusing Photoresist Microlenses on AlGaAs Top-Emitting VCSELs
Integrated Focusing Photoresist Microlenses on AlGaAs Top-Emitting VCSELs Andrea Kroner We present 85 nm wavelength top-emitting vertical-cavity surface-emitting lasers (VCSELs) with integrated photoresist
More informationSupplementary Materials for
advances.sciencemag.org/cgi/content/full/4/2/e1700324/dc1 Supplementary Materials for Photocarrier generation from interlayer charge-transfer transitions in WS2-graphene heterostructures Long Yuan, Ting-Fung
More informationBistability in Bipolar Cascade VCSELs
Bistability in Bipolar Cascade VCSELs Thomas Knödl Measurement results on the formation of bistability loops in the light versus current and current versus voltage characteristics of two-stage bipolar
More informationIndex. BaF 2 crystal 41 biochemical sensor 7, 316, ,
Index acousto-optic effect 243 44 air bandedge 35, 266 air gap 188, 197, 224, 240 41 air holes 16 17, 52 53, 55, 64, 189, 192, 216 18, 241 43, 245, 266 68, 270 72, 298 99, 333 34, 336 37, 341 42 air pores
More informationInfrared Perfect Absorbers Fabricated by Colloidal Mask Etching of Al-Al 2 O 3 -Al Trilayers
Supporting Information Infrared Perfect Absorbers Fabricated by Colloidal Mask Etching of Al-Al 2 O 3 -Al Trilayers Thang Duy Dao 1,2,3,*, Kai Chen 1,2, Satoshi Ishii 1,2, Akihiko Ohi 1,2, Toshihide Nabatame
More informationSUPPLEMENTARY INFORMATION DOI: /NPHOTON
Contents Simulations... 1 Purcell factor estimation... 4 Fabrication... 4 Characterization results... 5 References... 7 Simulations The resonant modes and gain thresholds were found using COMSOL s -D and
More informationHigh-Speed Scalable Silicon-MoS 2 P-N Heterojunction Photodetectors
High-Speed Scalable Silicon-MoS 2 P-N Heterojunction Photodetectors Veerendra Dhyani 1, and Samaresh Das 1* 1 Centre for Applied Research in Electronics, Indian Institute of Technology Delhi, New Delhi-110016,
More informationSupporting information: Visualizing the motion of. graphene nanodrums
Supporting information: Visualizing the motion of graphene nanodrums Dejan Davidovikj,, Jesse J Slim, Santiago J Cartamil-Bueno, Herre S J van der Zant, Peter G Steeneken, and Warner J Venstra,, Kavli
More informationLow Thermal Resistance Flip-Chip Bonding of 850nm 2-D VCSEL Arrays Capable of 10 Gbit/s/ch Operation
Low Thermal Resistance Flip-Chip Bonding of 85nm -D VCSEL Arrays Capable of 1 Gbit/s/ch Operation Hendrik Roscher In 3, our well established technology of flip-chip mounted -D 85 nm backside-emitting VCSEL
More informationVERTICAL CAVITY SURFACE EMITTING LASER
VERTICAL CAVITY SURFACE EMITTING LASER Nandhavel International University Bremen 1/14 Outline Laser action, optical cavity (Fabry Perot, DBR and DBF) What is VCSEL? How does VCSEL work? How is it different
More informationHorizontal single and multiple slot waveguides: optical transmission at λ = 1550 nm
Horizontal single and multiple slot waveguides: optical transmission at λ = 1550 nm Rong Sun 1 *, Po Dong 2 *, Ning-ning Feng 1, Ching-yin Hong 1, Jurgen Michel 1, Michal Lipson 2, Lionel Kimerling 1 1Department
More informationSemiconductor Optical Communication Components and Devices Lecture 18: Introduction to Diode Lasers - I
Semiconductor Optical Communication Components and Devices Lecture 18: Introduction to Diode Lasers - I Prof. Utpal Das Professor, Department of lectrical ngineering, Laser Technology Program, Indian Institute
More informationLecture 4 INTEGRATED PHOTONICS
Lecture 4 INTEGRATED PHOTONICS What is photonics? Photonic applications use the photon in the same way that electronic applications use the electron. Devices that run on light have a number of advantages
More informationSemiconductor Lasers Semiconductors were originally pumped by lasers or e-beams First diode types developed in 1962: Create a pn junction in
Semiconductor Lasers Semiconductors were originally pumped by lasers or e-beams First diode types developed in 1962: Create a pn junction in semiconductor material Pumped now with high current density
More informationBasic concepts. Optical Sources (b) Optical Sources (a) Requirements for light sources (b) Requirements for light sources (a)
Optical Sources (a) Optical Sources (b) The main light sources used with fibre optic systems are: Light-emitting diodes (LEDs) Semiconductor lasers (diode lasers) Fibre laser and other compact solid-state
More informationDistribution Unlimited
REPORT DOCUMENTATION PAGE AFRL-SR-AR-TR_05_ Public reporting burden for this collection of information is estimated to average 1 hour per response, including I gathering and maintaining the data needed,
More informationFlip-Chip Integration of 2-D 850 nm Backside Emitting Vertical Cavity Laser Diode Arrays
Flip-Chip Integration of 2-D 850 nm Backside Emitting Vertical Cavity Laser Diode Arrays Hendrik Roscher Two-dimensional (2-D) arrays of 850 nm substrate side emitting oxide-confined verticalcavity lasers
More informationGraphene electro-optic modulator with 30 GHz bandwidth
Graphene electro-optic modulator with 30 GHz bandwidth Christopher T. Phare 1, Yoon-Ho Daniel Lee 1, Jaime Cardenas 1, and Michal Lipson 1,2,* 1School of Electrical and Computer Engineering, Cornell University,
More informationNovel Integrable Semiconductor Laser Diodes
Novel Integrable Semiconductor Laser Diodes J.J. Coleman University of Illinois 1998-1999 Distinguished Lecturer Series IEEE Lasers and Electro-Optics Society Definition of the Problem Why aren t conventional
More informationSUPPLEMENTARY INFORMATION
Optically reconfigurable metasurfaces and photonic devices based on phase change materials S1: Schematic diagram of the experimental setup. A Ti-Sapphire femtosecond laser (Coherent Chameleon Vision S)
More informationImproved Output Performance of High-Power VCSELs
Improved Output Performance of High-Power VCSELs 15 Improved Output Performance of High-Power VCSELs Michael Miller This paper reports on state-of-the-art single device high-power vertical-cavity surfaceemitting
More informationnd IEEE International Semiconductor Laser Conference (ISLC 2010) Kyoto, Japan September IEEE Catalog Number: ISBN:
2010 22nd IEEE International Semiconductor Laser Conference (ISLC 2010) Kyoto, Japan 26 30 September 2010 IEEE Catalog Number: ISBN: CFP10SLC-PRT 978-1-4244-5683-3 Monday, 27 September 2010 MA MA1 Plenary
More informationMonolithically-integrated long vertical cavity surface emitting laser incorporating a concave micromirror on a glass substrate
Monolithically-integrated long vertical cavity surface emitting laser incorporating a concave micromirror on a glass substrate Rafael I. Aldaz, Michael W. Wiemer, David A.B. Miller, and James S. Harris
More informationOptomechanical enhancement of doubly resonant 2D optical nonlinearity
Supporting information Optomechanical enhancement of doubly resonant 2D optical nonlinearity Fei Yi 3+, Mingliang Ren 3+, Jason C Reed 3, Hai Zhu 3, Jiechang Hou 3, Carl H. Naylor 4, Alan T. Charlie Johnson
More informationIntegrated High Speed VCSELs for Bi-Directional Optical Interconnects
Integrated High Speed VCSELs for Bi-Directional Optical Interconnects Volodymyr Lysak, Ki Soo Chang, Y ong Tak Lee (GIST, 1, Oryong-dong, Buk-gu, Gwangju 500-712, Korea, T el: +82-62-970-3129, Fax: +82-62-970-3128,
More informationSupplementary Materials for
www.sciencemag.org/cgi/content/full/science.1234855/dc1 Supplementary Materials for Taxel-Addressable Matrix of Vertical-Nanowire Piezotronic Transistors for Active/Adaptive Tactile Imaging Wenzhuo Wu,
More information3550 Aberdeen Ave SE, Kirtland AFB, NM 87117, USA ABSTRACT 1. INTRODUCTION
Beam Combination of Multiple Vertical External Cavity Surface Emitting Lasers via Volume Bragg Gratings Chunte A. Lu* a, William P. Roach a, Genesh Balakrishnan b, Alexander R. Albrecht b, Jerome V. Moloney
More informationA continuous-wave Raman silicon laser
A continuous-wave Raman silicon laser Haisheng Rong, Richard Jones,.. - Intel Corporation Ultrafast Terahertz nanoelectronics Lab Jae-seok Kim 1 Contents 1. Abstract 2. Background I. Raman scattering II.
More informationIndex (CMP) 319, CMOS, see complementary metal-oxide semiconductor CMOS inverters 374 CMP, see chemical mechanical
Index α-series 75, 77, 86, 88 89 active materials 151 153 Anderson localization 143, 145, 147, 149 APDs, see avalanche photodiode detectors aperiodic photonic structures 8, 58 aperiodic structures, rotational
More informationAdvanced semiconductor lasers
Advanced semiconductor lasers Quantum cascade lasers Single mode lasers DFBs, VCSELs, etc. Quantum cascade laser Reminder: Semiconductor laser diodes Conventional semiconductor laser CB diode laser: material
More informationSUPPORTING INFORMATION
SUPPORTING INFORMATION Vertically Emitting Indium Phosphide Nanowire Lasers Wei-Zong Xu,2,4, Fang-Fang Ren,2,4, Dimitars Jevtics 3, Antonio Hurtado 3, Li Li, Qian Gao, Jiandong Ye 2, Fan Wang,5, Benoit
More informationNew Waveguide Fabrication Techniques for Next-generation PLCs
New Waveguide Fabrication Techniques for Next-generation PLCs Masaki Kohtoku, Toshimi Kominato, Yusuke Nasu, and Tomohiro Shibata Abstract New waveguide fabrication techniques will be needed to make highly
More informationLow threshold continuous wave Raman silicon laser
NATURE PHOTONICS, VOL. 1, APRIL, 2007 Low threshold continuous wave Raman silicon laser HAISHENG RONG 1 *, SHENGBO XU 1, YING-HAO KUO 1, VANESSA SIH 1, ODED COHEN 2, OMRI RADAY 2 AND MARIO PANICCIA 1 1:
More informationNanophotonics: Single-nanowire electrically driven lasers
Nanophotonics: Single-nanowire electrically driven lasers Ivan Stepanov June 19, 2010 Single crystaline nanowires have unique optic and electronic properties and their potential use in novel photonic and
More informationVertical Cavity Surface Emitting Laser (VCSEL) Technology
Vertical Cavity Surface Emitting Laser (VCSEL) Technology Gary W. Weasel, Jr. (gww44@msstate.edu) ECE 6853, Section 01 Dr. Raymond Winton Abstract Vertical Cavity Surface Emitting Laser technology, typically
More informationSupporting Information
Supporting Information Mode imaging and selection in strongly coupled nanoantennas Jer-Shing Huang 1,*, Johannes Kern 1, Peter Geisler 1, Pia Weimann 2, Martin Kamp 2, Alfred Forchel 2, Paolo Biagioni
More informationImpact of the light coupling on the sensing properties of photonic crystal cavity modes Kumar Saurav* a,b, Nicolas Le Thomas a,b,
Impact of the light coupling on the sensing properties of photonic crystal cavity modes Kumar Saurav* a,b, Nicolas Le Thomas a,b, a Photonics Research Group, Ghent University-imec, Technologiepark-Zwijnaarde
More informationImplant Confined 1850nm VCSELs
Implant Confined 1850nm VCSELs Matthew M. Dummer *, Klein Johnson, Mary Hibbs-Brenner, William K. Hogan Vixar, 2950 Xenium Ln. N. Plymouth MN 55441 ABSTRACT Vixar has recently developed VCSELs at 1850nm,
More informationTunable Color Filters Based on Metal-Insulator-Metal Resonators
Chapter 6 Tunable Color Filters Based on Metal-Insulator-Metal Resonators 6.1 Introduction In this chapter, we discuss the culmination of Chapters 3, 4, and 5. We report a method for filtering white light
More informationSub-50 nm period patterns with EUV interference lithography
Microelectronic Engineering 67 68 (2003) 56 62 www.elsevier.com/ locate/ mee Sub-50 nm period patterns with EUV interference lithography * a, a a b b b H.H. Solak, C. David, J. Gobrecht, V. Golovkina,
More informationSUPPLEMENTARY INFORMATION
Supplementary Information "Large-scale integration of wavelength-addressable all-optical memories in a photonic crystal chip" SUPPLEMENTARY INFORMATION Eiichi Kuramochi*, Kengo Nozaki, Akihiko Shinya,
More informationMicro-sensors - what happens when you make "classical" devices "small": MEMS devices and integrated bolometric IR detectors
Micro-sensors - what happens when you make "classical" devices "small": MEMS devices and integrated bolometric IR detectors Dean P. Neikirk 1 MURI bio-ir sensors kick-off 6/16/98 Where are the targets
More informationMonolithically integrated InGaAs nanowires on 3D. structured silicon-on-insulator as a new platform for. full optical links
Monolithically integrated InGaAs nanowires on 3D structured silicon-on-insulator as a new platform for full optical links Hyunseok Kim 1, Alan C. Farrell 1, Pradeep Senanayake 1, Wook-Jae Lee 1,* & Diana.
More informationA thin foil optical strain gage based on silicon-on-insulator microresonators
A thin foil optical strain gage based on silicon-on-insulator microresonators D. Taillaert* a, W. Van Paepegem b, J. Vlekken c, R. Baets a a Photonics research group, Ghent University - INTEC, St-Pietersnieuwstraat
More informationFabrication of antenna integrated UTC-PDs as THz sources
Invited paper Fabrication of antenna integrated UTC-PDs as THz sources Siwei Sun 1, Tengyun Wang, Xiao xie 1, Lichen Zhang 1, Yuan Yao and Song Liang 1* 1 Key Laboratory of Semiconductor Materials Science,
More informationHigh Speed pin Photodetector with Ultra-Wide Spectral Responses
High Speed pin Photodetector with Ultra-Wide Spectral Responses C. Tam, C-J Chiang, M. Cao, M. Chen, M. Wong, A. Vazquez, J. Poon, K. Aihara, A. Chen, J. Frei, C. D. Johns, Ibrahim Kimukin, Achyut K. Dutta
More informationInstruction manual and data sheet ipca h
1/15 instruction manual ipca-21-05-1000-800-h Instruction manual and data sheet ipca-21-05-1000-800-h Broad area interdigital photoconductive THz antenna with microlens array and hyperhemispherical silicon
More informationGeneration of a Line Focus for Material Processing from an Array of High Power Diode Laser Bars R. Baettig, N. Lichtenstein, R. Brunner, J.
Generation of a Line Focus for Material Processing from an Array of High Power Diode Laser Bars R. Baettig, N. Lichtenstein, R. Brunner, J. Müller, B. Valk, M. Kreijci, S. Weiss Overview This slidepack
More informationSupplementary Figure 1 Schematic illustration of fabrication procedure of MoS2/h- BN/graphene heterostructures. a, c d Supplementary Figure 2
Supplementary Figure 1 Schematic illustration of fabrication procedure of MoS 2 /hon a 300- BN/graphene heterostructures. a, CVD-grown b, Graphene was patterned into graphene strips by oxygen monolayer
More informationSupplementary information for
Supplementary information for Rational design of metallic nanocavities for resonantly enhanced four-wave mixing Euclides Almeida and Yehiam Prior Department of Chemical Physics, Weizmann Institute of Science,
More informationRealization of Polarization-Insensitive Optical Polymer Waveguide Devices
644 Realization of Polarization-Insensitive Optical Polymer Waveguide Devices Kin Seng Chiang,* Sin Yip Cheng, Hau Ping Chan, Qing Liu, Kar Pong Lor, and Chi Kin Chow Department of Electronic Engineering,
More informationTransfer of micro and nano-photonic silicon nanomembrane waveguide devices on flexible substrates
Transfer of micro and nano-photonic silicon nanomembrane waveguide devices on flexible substrates Afshin Ghaffari 1, Amir Hosseini 1, Xiaochuan Xu 1, David Kwong 1, Harish Subbaraman 2, and Ray T. Chen
More informationFeedback-Dependent Threshold of Electrically Pumped VECSELs
Feedback in Electrically Pumped VECSELs 37 Feedback-Dependent Threshold of Electrically Pumped VECSELs Wolfgang Schwarz We present the investigation of the feedback-dependent threshold of an 8 nm wavelength
More informationIST IP NOBEL "Next generation Optical network for Broadband European Leadership"
DBR Tunable Lasers A variation of the DFB laser is the distributed Bragg reflector (DBR) laser. It operates in a similar manner except that the grating, instead of being etched into the gain medium, is
More informationOPTI510R: Photonics. Khanh Kieu College of Optical Sciences, University of Arizona Meinel building R.626
OPTI510R: Photonics Khanh Kieu College of Optical Sciences, University of Arizona kkieu@optics.arizona.edu Meinel building R.626 Announcements Homework #3 is due today No class Monday, Feb 26 Pre-record
More informationHigh-Q Photonic Crystal Microcavities in InAsP/InGaAsP Multi-Quantum-Well Membranes
125 Chapter 3 High-Q Photonic Crystal Microcavities in InAsP/InGaAsP Multi-Quantum-Well Membranes 3.1 Introduction With the high-q photonic crystal microcavity designs of chapter 2 in hand, the next step
More informationSupporting Information. Vertical Graphene-Base Hot-Electron Transistor
Supporting Information Vertical Graphene-Base Hot-Electron Transistor Caifu Zeng, Emil B. Song, Minsheng Wang, Sejoon Lee, Carlos M. Torres Jr., Jianshi Tang, Bruce H. Weiller, and Kang L. Wang Department
More information~r. PACKARD. The Use ofgain-switched Vertical Cavity Surface-Emitting Laser for Electro-Optic Sampling
r~3 HEWLETT ~r. PACKARD The Use ofgain-switched Vertical Cavity Surface-Emitting Laser for Electro-Optic Sampling Kok Wai Chang, Mike Tan, S. Y. Wang Koichiro Takeuchi* nstrument and Photonics Laboratory
More informationSupplementary Materials for
advances.sciencemag.org/cgi/content/full/2/4/e1501489/dc1 Supplementary Materials for A broadband chip-scale optical frequency synthesizer at 2.7 10 16 relative uncertainty Shu-Wei Huang, Jinghui Yang,
More informationIntegration of GaAs-based VCSEL array on SiN platform with HCG reflectors for WDM applications
Integration of GaAs-based VCSEL array on SiN platform with HCG reflectors for WDM applications Sulakshna Kumari a,b, Johan S. Gustavsson c, Ruijun Wang a,b, Emanuel P. Haglund c, Petter Westbergh c, Dorian
More information