Filter & Spectrometer Electron Optics
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1 Filter & Spectrometer Electron Optics Parameters Affecting Practical Performance Daniel Moonen & Harold A. Brink
2 Did Something Go Wrong? ev 1
3 Content The Prism Chromatic Aberrations Spectrum Diffraction Mixing The Basics Post Column spectrometers The Slit The Projection System Quadrupoles Distortion Chromatic Aberrations Summary 2
4 The Basics Illumination Energy Dispersion Energy Selection Projection Detection sample ENFINA GIF 3
5 Basics - Post Column TEM provides: Illumination GIF provides: Energy Dispersion Energy Selection Projection Detection 4
6 The Prism Large Energy Dispersion 6.5 mm/ev Optimal energy selection Second Order Corrected Small Chromatic Aberrations Pre-prism multipoles Correct for imperfections 7
7 Prism - Chromatic Aberrations Spectrum mode: Imaging mode: Electron optical energy resolution Non-isochromaticity E 0 + ev E 0 Y ev Spectrum E 0 - ev Imaging Plane X 8
8 Prism - Chromatic Aberrations Spectrum mode: Imaging mode: Electron optical energy resolution Non-isochromaticity Chromatic aberration means: Electrons of the same energy but coming from the specimen with different angles are focused at different positions in the spectrum. Chromatic aberration means: Electrons of the same energy but from different positions in the specimen are focused at different positions in the slit. 9
9 Prism - Chromatic Aberrations GIF Example: Al - 3 wt% Li alloy with Al-Li δ (Al 3 Li) precipitates Al 3 Li precipitates Al matrix Intensity nm Slit Energy-loss [ev] 20 10
10 Prism - Chromatic Aberrations un/mis-corrected filter + 3 ev + 2 ev 13.5eV; 6eV slit + 1 ev Inverted contrast 0 ev -1 ev limited field of view 13.5eV; ~1eV slit 11
11 Prism - Chromatic Aberrations un/mis-corrected filter + 3 ev + 2 ev + 1 ev 0 ev -1 ev Corrected Filter limited field of + 3 view ev + 2 ev + 1 ev 0 ev -1 ev 12
12 Prism - Chromatic Aberrations Corrected Filter + 3 ev + 2 ev 13.5eV; 6eV slit + 1 ev 0 ev -1 ev limited field of view 13.5eV; ~1eV slit 13
13 Prism - Chromatic Aberrations Tuning corrects chromatic aberrations by adjusting the multipoles: ev ev Low energy resolution High energy resolution 14
14 Prism - Spectrum Diffraction Mixing Mechanism: Projection lens cross-over, or diffraction pattern, is not a mathematical point. Prism images the diffraction pattern on the slit plane. A convolution of the diffraction pattern and energy dispersion results. 15
15 Prism - Spectrum Diffraction Mixing Effects depend on: Spectrometer Design TEM Magnification Objective Aperture Small spectra Large spectra diffraction spots diffraction spots 16
16 Prism - Spectrum Diffraction Mixing Consult user manual: 17
17 The Slit Fully computer controlled slit Calibrated in ev Beam trap in spectroscopy mode Zero loss Beam trap 18
18 The Projection System Enfina: Multipole Optics 4 Quadrupoles Wide dispersion range 0.05 ev to 1.5 ev / pixel 75 to 2000 ev range GIF: Multipole Optics 4 Quadrupoles 5 Sextupoles 1 Octupole Low distortions < 1% Low chromatic aberrations < 1 pixel Wide dispersion range 0.05 ev to 1 ev / pixel 50 to 1000 ev range 19
19 Projection System - Quadrupoles Advantages of Quadrupole Optics: Low distortion Much stronger than round lenses Do not rotate the image Allow different magnification in X and Y direction 20
20 Projection System - Distortion Distortion: Causes image deformation Is introduced by round lenses as well as quadrupoles Is correctable with multipoles Is auto-tuned for the GIF 25 Hole Mask Pattern 21
21 Projection System - Distortion Seamless montage of EFTEM images: Distortion 1.5 % Distortion 0.3% 22
22 Projection System - Distortion Fourier Transform of Crystal Lattice: Distortion 2.7 % Distortion 0.5% 23
23 Projection System - Chromatic Aberrations Chromatic aberration means: Electrons from the same position in the specimen but of different energy are focused at different positions in the image. Specimen Detector Electron Optics E = E 0-25 ev E = E 0 E = E ev 24
24 Projection System - Chromatic Aberrations Chromatic aberrations are measured by changing the beam energy and observing the mask pattern. Chromatic aberration tuning is automated for the GIF. E = E 0-25 ev E = E ev 25
25 Projection System - Chromatic Aberrations Example: 50 ev slit & 3.0 mm/ev 50 ev slit & 0.3 mm/ev 26
26 Summary Energy Dispersion Chromatic Aberrations Isochromaticity Energy resolution Spectrum Diffraction Mixing Correction with multipoles The Slit Energy filtering Beam trap The Projection System Quadrupole optics Distortion Chromatic Aberrations Correction with multipoles 27
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