FPS Sensor Systems. Real-Time Interferometric Displacement Analysis PAGE 32 PAGE 1. pioneers of precision

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1 PAGE 32 PAGE 1 pioneers of precision (c) 2017, attocube systems AG - Germany. attocube systems and the logo are trademarks of attocube systems AG. Registered and/or otherwise protected in various countries where attocube systems products are sold or distributed. Other brands and names are the property of their respective owners. FPS Sensor Systems Real-Time Interferometric Displacement Analysis attocube systems AG Königinstrasse 11a D München Germany Tel.: Fax: info@attocube.com Brochure version: pioneers of precision

2 Measurement System vs. Machine Sensor applicational range of FPS / IDS devices attocube s innovative optical displacement sensors surpass the performance of other presently available devices in terms of precision, speed, and compactness. The patented fiber-based, interferometric measurement principle offers unrivalled accuracy and stability, while the compact design enables strikingly simple adjustment even in spatially confined setups. Fiber-based sensor heads enable the operation in extreme environments, such as ultra high vacuum, cryogenic temperatures, or even hard radiation. displacement measurements with immediate data inspection. Typical fields of applications range from quality assurance to R&D. In contrast, the IDS sensor is ideally suited for machine integration and seamless connection to common industrial networks. A list of suitable applications for attocube s sensor products can be found to the right. FPS Two product lines have been established and adapted to perfectly meet existing market demands: The FPS system offers integrated measurement and analysis capabilities and is the perfect choice for contactless, ultra-high precision IDS application/software & interfaces displacement detection for QA thermal drift detection and control drive shaft runout detection pitch/ yaw/ roll measurement For further information on the IDS product line please refer to the IDS brochure or visit online vibration analysis closed-loop piezo scanning real-time process analysis fast servo control (closed-loop) active vibration compensation integration in industrial networks compatible application application not recommended integrated analysis software available only real-time data

3 Glossary technical terms Fabry-Pérot Interferometer Our FPS Sensor Systems is based on a low-finesse fiber-based Fabry- Pérot Interferometer. A great advantage of this technology over other displacement sensing techniques is their electronic-free sensor heads. The physical dimension of the sensor head is reduced to the millimeter range. This miniaturization makes the sensor ultra-compact and also compatible with extreme environments such as ultra high vacuum and low temperature. The fiber-based design allows flexible alignment, thus making multiaxis measurements and large distances of fiber length (even covering kilometer long distances) an easy task. Environmental Compensation Unit (ECU) The ECU provides a fully automated refractive index compensation for contactless interferometric measurements at ambient conditions. Variations in air pressure, temperature, and humidity are recorded and used to automatically compensate for changes in the refractive index. Focusing Sensor Head The focusing sensor heads D1.2/F7 (sensor head diameter of 1.2 mm with a focal length of 13 mm), D4/F8, D4/F13, and D12/F2.8 are suitable to measure on a wide range of target materials as well as target surface qualities with low, medium, or high surface reflectivity. For example, the focusing sensor heads make it possible to measure on a BK7 glass object with a reflectivity of only 4 %. Collimating Sensor Head The collimating sensor heads M12/C1.6 (sensor head with a M12 metric thread and a beam diameter of 1.6 mm) and M15.5/C1.6 including a flexure structure to adjust the beam path angle with ±1 are suited with a collimating optics type especially designed for the use with targets of high surface quality e.g. mirror or polished stainless steel. The sensor head M12/C7.6 is optimized to measure over longer distances on a retroreflector target. Single and Dual Pass Mode All focusing sensor heads and the collimated sensor heads utilized with a glass target or a retroreflector are working in single pass mode. This means the light is directly coupled back into the fiber after being reflected by the target only once. Collimated sensor heads in combination with plane mirror are used with the so called dual pass mode. Here, the light is travelling two times the distance between collimated sensor head and mirror. The main benefit is a wide alignment angle tolerance. Working Distance Distance between the front side of the sensor head and the target where a continuous measurement is possible (see figure below). Absolute Distance Distance between the end of the fiber, which is represented by the mechanical stop, and the target (see figure below). Focal Length The focal length F is the distance between the front side of the sensor head and the focal point (see figure below). Alignment Tolerance The alignment tolerance represents the maximum tilt angle of the sensor head in respect to the surface normal. Sensor Head absolute distance F working distance α

4 FPS Sensor Systems Key Features Accurate FPS Sensor Systems Displacement Sensing for Research The global trend towards miniaturization causes major challenges for advanced metrology: quality standards are increasing, requirements on accuracy and reliability are constantly rising, and failure tolerances in production processes are steadily reduced. Especially in applications such as quality assurance and research & development, instruments need to provide highest precision, while offering versatile implementation options and the immediate availability of data post-processing, analysis, and storage. Accurate The built-in DFB laser of the FPS is locked to a molecular absorption frequency reference, making the detected displacement traceable to international length standards. All measurements are therefore truly accurate in a metrological sense. With its advanced software automation, the FPS displacement and analysis system is the perfect solution for contactless, ultra-high precision and non-invasive displacement measurement tasks requiring immediate data inspection. Its plug-and-play architecture enables direct integration and versatile operation in a variety of applications within only few minutes. Radiation Hard Optional radiation-hard sensor heads and fiber packages are available for the operation in radiation harsh environments. All radiation-hard (/RAD) components are qualified for radiation doses of up to 10 MGy. Ultra Fast All FPS systems measure the position of the target with a bandwidth of 10 MHz and a resolution of 1 pm. At the same time, the sensor is compatible with displacement velocities of up to 2 m/s. Z Y X Multi Axis Multi Axis Operation up to 3 m The FPS provides three fully independent measurement axes, allowing parallel displacement measurements of three targets in real-time. The one axis version FPS1010 can be software-upgraded to two or three axes at any time. Dedicated Software Environmental Compensation Software FPS systems are delivered with a dedicated PC-based software, allowing synchronous data visualization, analysis, and storage. bar FPS sensors can be equipped with an optional environmental compensation unit (ECU). The ECU enables the operation of FPS sensors at ambient conditions, while maintaining an accuracy of better ± 1 ppm under a wide range of pressure, temperature, and humidity conditions. PC & Real-time Interfaces Non-invasive & Miniature Built in USB 2.0 and Ethernet (optional) interfaces enable plug-and-play communication with any personal computer. High-speed real-time interfaces further broaden the application spectrum of the FPS. XXS 150 µw With a laser power of 150 µw, the FPS sensor family is considered truly non-invasive. Combined with sensor dimensions down to 1.2 mm diameter and 8.5 mm length, sensors of the FPS family can be operated in the most demanding and space constraint applications.

5 Sensor Head Overview FPS Optical Targets and Materials measurements down to 4% surface reflectivity Being based on the same fundamental interferometer technology, both FPS and IDS sensors share the same sensor head designs and specifications. attocube offers a variety of sensor heads, which range from 2.8 mm ultra-compact for most confined spaces to larger designs for easy alignment and high dynamic range applications. An overview of the existing sensor heads and dynamic ranges can be found below. The FPS is compatible with a variety of targets and target materials. Most frequently, plane mirrors are being used in constrained (uniaxial) or xy-measurement applications (bi-axial). For long range sensing applications with reduced requiremets on alignment, retroreflectors are most typically used. Depending on sensor head type and sensor-target separation, the alignment tolerances range from 0.1 (glass, single pass) up to several degrees (retroreflectors). The sensors are further compatible with a variety of other materials such as technical surfaces (drive shaft, end mill, etc.) - please inquire for details. D12/F mm 5-9 mm Low reflective target D1.2/F mm High reflective target Only compatible with retroreflector Mirror & Retroreflector 6-10 mm Gold D4/F mm mm Silver Aluminium (& milled Aluminium) D4/F mm Steel (polished) Copper Silicon/Wafer M12/C1.6 M15.5/C1.6/FLEX Glass Ceramics Plastic Aluminium (black anodized) M12/C7.6 Working Distance up to 0 mm 20 mm 40 mm 60 mm 90 mm 100 mm 110 mm 2900 mm 3000 mm For further information on sensor heads, naming scheme & compatible environments please refer to

6 FPS3010 & FPS1010 table-top displacement sensing attocube s FPS3010/1010 is a fully automated interferometric displacement measurement system, compatible with up to three fiber-based sensor heads. TheFPS3010/1010 combines state of the art hardware with innovative software concepts, offering real-time data processing and storage, Fast-Fourier signal analysis for vibrometry applications, environmental index of refraction compensation (optional), and many other measurement options such as angular measurement software or customized trigger functionality. The flexible, FPGA-based architecture allows firmware upgrades at ease, ensuring that newest features and updates are available to users world wide. Real-time serial-word and incremental interfaces allow the connection of FPS3010 and FPS1010 devices with other electronics and host controllers. CUSTOMER FEEDBACK Prof. Dr. M. Tajmar The noise and stability of the attocube FPS interferometer is up to two orders of magnitude better than the second best system on the market. The installation and use of the sensor was so easy that we could obtain high quality measurements within two weeks after they first arrived at our lab thanks to the great support from attocube. CUSTOMER FEEDBACK Dipl.-Ing. Nanxi Kong The motion of a feed unit for micro manufacturing needs to be very precise and accurate. As linear encoders allow only the measurement of the position along one axis, the attocube FPS interferometer can be easily configured to directly measure the position of the tool center point at the feed unit in all directions. (Institute for Aerospace Engineering, Dresden University of Technology, Germany) (Institute of Production Engineering, Helmut Schmidt University, Hamburg Germany) Fields of Applications Sensor number of sensor axes 1 or 3, upgradeable 1) working distance sensor resolution mm 1 pm sensor repeatability 2 nm 2) max. target velocity measurement bandwidth signal stability (WD: 20 mm) 2 m/s 10 MHz nm (2σ) Metrology Microscopy Modes of Operation measurement modes remote operation output signal: electronics output signal: displacement measurement sensor alignment sensor initialization displacement, vibrometry USB2.0, ethernet port optional USB, ethernet 3), AquadB, HSSL laser light semi-automated via USB fully automated, turnkey 14 days delivery Semiconducter Research Synchrotron Interfaces digital interfaces Controller Hardware chassis weight power supply power consumption AquadB, HSSL (real-time) 21.4 x 21.4 x 4.5 cm³ 1.9 kg 100/115/230 V, Hz max. 100 W Environmental compensation unit ECU The environmental compensation unit enables sub-ppm accuracy in ambient conditions Machine & Tool Vibration Analysis Space Applications Measurement Laser laser source DFB laser (class 1) laser power 150 μw laser wavelength 1530 nm wavelength stability 50 ppb 1) The FPS1010 can be software-upgraded from one to two and three axis, respectively. 2) At 10 mm working distance (WD), 5 nm repeatability at 100 mm WD, in vacuum conditions. 3) upgrade option /SYNC.

7 FPS rack-mounted displacement sensing The ultra-slim 19 rack-mount version FPS is offered for operation in electrical cabinets such as widely used at research labs, synchrotron facilities, and in industry. The 19 version of the FPS is available in three axis configuration only and features the same specifications and functionalities as the table-top FPS3010. The FPS is particularly dedicated for applications where Ethernet accessibility of the device is key (TCP/IP and Epics optional). The FPS is compatible with fiber lengths of up to 500 m. CUSTOMER FEEDBACK Prof. Dr. M. Tajmar The noise and stability of the attocube FPS interferometer is up to two orders of magnitude better than the second best system on the market. The installation and use of the sensor was so easy that we could obtain high quality measurements within two weeks after they first arrived at our lab thanks to the great support from attocube. CUSTOMER FEEDBACK Dipl.-Ing. Nanxi Kong The motion of a feed unit for micro manufacturing needs to be very precise and accurate. As linear encoders allow only the measurement of the position along one axis, the attocube FPS interferometer can be easily configured to directly measure the position of the tool center point at the feed unit in all directions. (Institute for Aerospace Engineering, Dresden University of Technology, Germany) (Institute of Production Engineering, Helmut Schmidt University, Hamburg Germany) Fields of Applications Sensor number of sensor axes 3 working distance mm (depending on sensor head) sensor resolution 1 pm sensor repeatability 2 nm 1) max. target velocity measurement bandwidth signal stability (WD: 20 mm) 2 m/s 10 MHz nm (2σ) Metrology Microscopy Modes of Operation measurement modes remote operation output signal: electronics output signal: displacement measurement sensor alignment sensor initialization displacement, vibrometry USB2.0, ethernet port optional USB, ethernet 2), AquadB, HSSL laser light semi-automated via USB fully automated, turnkey 14 days delivery Semiconducter Research Synchrotron Interfaces digital interfaces Controller Hardware chassis weight power supply power consumption AquadB, HSSL (real-time) 48.2 x 26.5 x 4.5 cm³ 1.9 kg 100/115/230 V, Hz max. 100 W Environmental compensation unit ECU The environmental compensation unit enables sub-ppm accuracy in ambient conditions Machine & Tool Vibration Analysis Space Applications Measurement Laser laser source DFB laser (class 1) laser power 150 μw laser wavelength 1530 nm wavelength stability 50 ppb 1) At 10 mm working distance (WD), 5 nm repeatability at 100 mm WD, in vacuum conditions. 2) upgrade option /SYNC.

8 FPS Sensor Systems Interfaces real-time connectivity FPS sensor systems are designed for ease of use and simple connectivity. Measured displacement information can be transferred to a personal computer using USB or Ethernet (optional), where the advanced measurement software of the FPS allows synchronous data visualization, analysis, and storage. In addition to these standard interfaces, the FPS offers stand-alone operation capabilities through high-speed real-time digital interfaces. For each interferometer axis, an incremental AquadB and an absolute 8-48 bit high speed serial word (HSSL) interface is available. The resolution of both AquadB and HSSL interfaces is user-adjustable, as well as their clock rate (up to 25 MHz) Main Power Ethernet (optional) Serial USB GPIO (General Purpose Input/Output) 6 HSSL / AquadB 45 mm 45 mm mm mm mm DAT CLK C 0 1 er mm HSSL (digital; bandwith up to 25 MHz and 8-48 bit resolution): attocube's proprietary serial word protocol provides absolute position information - both in terms of the protocol and the measurement itself. The HSSL interface consists of one data and one clock signal (single ended or differential); position information is packed into one container of user-defineable bit-length, synchronization with the receiver is accomplished using the clock signal. The HSSL protocol is preferential if absolute displacement position data (i.e. sensor-target separation) is required or if incremental position counting is inacceptable. Interface Specifications target velocity [m/s] resolution USB (abs.) 64 bit, 100 khz [nm] resolution HSSL (abs.) 8-48 bit, up to 25 MHz [nm] resolution AquadB (inc.) at 25 MHz [nm] A B A B K AquadB (digital; bandwith up to 25 MHz; resolution freely assignable): The AquadB interface provides incremental displacement information on target displacement. Position resolution and (maximum) clock rate can be user defined using the software interface. For maximum data bandwidth, the AquadB interface is best used with differential signaling.

9 FPS Measurement Software nanometer accuracy made simple The completely new PC-based software of the attocube FPS sensor system not only enables simple data recording. Instead, it offers a ton of features making complex measurements simple - ranging from easy-to-use sensor alignment to synchronous data storage, data marking, and fast-fourier transformation. Some of the key features of the FPS software can be found on the right. 1 Synchronous Data Visualization The new FPS software allows the user to choose a common time base for all three axes in order to display displacement data synchronously. This feature makes visualizing crosstalks or interferences between measurement axes a simple task. If desired, the user can switch back to individual time bases for each axis at any time. 4 High-Speed FFT Analysis The FPS sensor software provides frequency analysis of displacement data at frequencies up to 5 MHz. This powerful tool makes measurement of resonance modes and according quality factors an easy operation. 2 Synchronous Data Storage 5 Data Marking In addition to choosing a common time base for visualization purposes, the FPS system allows synchronous data storage. Position data of all three axes will be saved into one common file with a word length of 64bits for each axis, making data evaluation as simple as never before. With the data marking feature, stored data can be correlated with or marked by external trigger events. This optional feature enables the user to correlate displacement information to external sources or events, greatly facilitating data evaluation. 3 Dynamic Link Libraries & Virtual Instruments With the included DLL and LabVIEW VI s, all features of the PC software can be accessed through C/C++/C# and LabVIEW, including tracking of alignment signal during a running measurement task. In addition, all general settings & parameters can be adjusted. 6 Improved Initialization Routine The new software includes push-button reinitialization of system parameters during ongoing measurements, significantly increasing alignment tolerances of sensor heads. The smart alignment feature further prevents misalignment errors (e.g. Abbé error) and improves signal-to noise ratio by presetting maximum target speeds.

10 Selected Applications FPS Sensor Systems FPS3010 in Quality Control Especially in the field of nanopositioning, it is important to maintain a high quality in production processes. Optical sensing in quality control can help to reduce risks to a minimum by achieving high quality standards. The FPS series of optical displacement measurement sensors with its broad range of optical collimators is ideally suited to detect and limit production errors to a minimum. (attocube application note SEN12, 2014) Highly precise micro manufacturing Ever increasing requirements for precision and size of machined parts have driven the development of highest-precision machining tools. The Square Foot Manufacturing concept separates well-known machining centers into small-sized sub-groups having standardized interfaces not only for power and data transmission but also for the transmission of processing forces and moments. Laser interferometry plays a key role in the piezo-based feed units of this concept as well as in the measurement of the reproducibility of these interfaces. (attocube application note SEN07, 2013) 2 µm Long Distance and High Speed Displacement Measurements The FPS interferometer allows the user to measure a target s relative displacement with sub-nanometer resolution and real-time position output at 10 MHz bandwidth. Various applications in industry as well as in science and research and development require the precise detection of a target s position at high velocities as well as long distances. As shown in the application note, the FPS3010 is now able to measure displacements at distances of up to 3 m and velocities of up to 2 m/s. Ultra precise contactless detection of bearing errors Error motions of rotating objects are of major interest in high precision mechanical engineering. In case of a high speed spindle, even sub-nm deviations from a perfect rotation can create undesired vibrations or error movements. Monitoring error motion with sub-nm resolution is therefore of prime necessity from state of the art mechanical engineering to nanotomography research. (attocube application note SEN08, 2013) (attocube application note SEN11, 2014) Contactless Frequency Analysis of Motor Vibrations Machine vibrations can be tracked using the FPS3010 and used for monitoring the health status of a gear or machine. Described in Application Note SEN13, a motor was rotated at different speeds and its vibrations measured on the outer shell of the motor. Eigen-resonances of the machine could be identified, which helped to improve the setup of a customer. With the FPS3010, attocube provides a perfect tool to efficiently and precisely characterize such vibrations. High resolution X-ray microscopy When developing an X-ray microscope capable of nm resolution, careful design is a must. Thermal and mechanical stability of the components and assemblies has to be followed throughout the process. The attofpsensor shows superior performance regarding its outstanding stability and its capability of measuring sub-nm displacements and is therefore the ideal supplement for the mechanical control of all components used in the described X-ray microscope setup achieving a resolution in the order of 40 nm. (attocube application note SEN13, 2014) (attocube application note SEN09, 2013)

11 Selected Measurements unsurpassed signal stability Selected Measurements high speed position detection Measured Long-Term Signal Stability working distance [mm] 2σ [nm] Measured Short-Term Signal Stability working distance [mm] 2σ [nm] Long-term FPS signal stability as demonstrated on a 20 mm long Titanium vacuum reference cavity. The cavity is cooled to liquid helium temperature (-269 C) in order to minimize thermal expansion/contraction. 68% of all position measurement data points lie within 286 pm, as measured at a 100 Hz bandwidth over 12 hrs. Short -term data are recorded at 10 Hz over 10 seconds. High-bandwidth displacement detection of a target mounted onto a linear drive stage. The drive operates at a maximum velocity of 2 m/s. The velocity is numerically derived from the time-dependent position data. Long-term picometer stability High-bandwidth application mastered with ease The intrinsic position signal stability of the FPS sensor is unsurpassed - making it challenging to demonstrate the performance of FPS sensors with standard tools and equipment. The measurements shown above were therefore recorded on an evacuated reference cavity with a relative length stability Δl/l well below This stability was achieved by temperature stabilizing the titanium cavity within few mk at liquid helium temperature (-269 C). Due to the low coefficient of thermal expansion at said temperature, the titanium cavity provides a reference in length approximately 10 times more stable than a corresponding ultra-low-expansion glass (ULE) cavity at ambient conditions. The plot shows position sensing data recorded on a 20 mm long cavity during a 12 hour period of time. The bandwidth of the measurement was 100 Hz. (attocube applications labs, 2012) Along with exceptional signal stability and picometer resolution, the FPS sensor family is designed to measure target position variations at very high pace. With a measurement bandwidth of 10 MHz, FPS sensors are able to master target displacement velocities of up to 2 m/s. This capability enables applications where objects are coarse-positioned at high speed while the target s final location needs to be recorded with nanometer resolution. A typical application is shown in the graph above where the target has been mounted onto a linear drive, providing travel velocities of up to 2 m/s over 0.5 m range. While the FPS sensor is capable to keep track with the position of the target even at the maximum travel velocity, it also shows the positional inaccuracy of the linear drive when approaching position B, indicated by a position overshoot by more than 5 microns (inlay). While only used for position measurement in this application, the FPS sensor is widely used for closed-loop control of drive units once connected to the drive controller by one of its real-time interfaces. (attocube applications labs, 2014) pioneers of precision

12 Selected Measurements real-time vibrometry measurements Selected Measurements highest precision in environmental conditions true value (compensation) measured value w/o (compensation) constant working distance constant environmental conditions Vibrometry measurements as performed on a piezoelectric ceramic, measured with a FPS system. Stunningly, vibration amplitudes of few picometers can be detected even at low frequency. Displacement measurements as performed at constant sensor/ target separation in variable pressure conditions (left) and at variable sensor/target separation in constant environmental conditions (right). The left plot shows the apparent position change upon pressure variation (uncompensated 100 ppm, compensated 1 ppm). The right plot shows the displacement sensing error of 194 µm over 90 cm travel range (uncompensated) vs <1 µm (compensated). Ultra-wide frequency range vibrometry Environmental compensation (optional) The FPS sensor is not only a very capable real-time displacement sensor but it also serves the user as a powerful vibrometer. With its built-in fast-fourier algorithm (FFT), the FPS series directly detects the distribution of vibrational modes/amplitudes in frequency space. Frequency and phase information of resonance peaks can be live-viewed on the PC-based FPS application software. The data above demonstrate the suitability of the FPS sensor for this type of application. In this specific case, the low-frequency noise behaviour of the FPS sensor was tested by exciting and measuring the vibration spectrum of a ceramic piezo at low frequency and ultra-low amplitude. As can be seen from the data, the noise floor of the measurement is at 10-6 microns equivalent to 1 picometer. Stunningly, this noise floor extends to very low frequency, enabling picometer resolution at frequencies as low as 2 Hz. Data are recorded at 100 Hz bandwidth. Any interferometric device operated in environmental conditions is negatively influenced by index of refraction fluctuations, caused by air temperature, pressure, and humidity variation. The influence of these parameters is significant and can reach deviations in measurement of up to 500 ppm, equivalent to a deviation of 500 µm per meter. To compensate these errors, attocube offers an environmental compensation unit (ECU) which precisely measures environmental parameters and determines the actual index of refraction n(t). This measurement allows to compensate environmental influences down to better 1 ppm and enables highly precise, accurate measurements in air. (attocube applications labs, 2014) (attocube applications labs, 2014)

13 PRODUCTS REVENUE SOFT/HARDWARE R&D ENGINEER Sensor Head Specifications FPS3010 Sensor Heads product name D12/F2.8 D1.2/F7 D4/F8 D4/F13 M12/C1.6 M15.5/C1.6/FLEX M12/C7.6 Modes of Operation optics type focussing focussing focussing focussing collimating collimating collimating dimensions Ø 12 mm, length 32.3 mm Ø 1.2 mm, length 7.5 mm Ø 4 mm, length 11.5 mm Ø 4 mm, length 11.5 mm Ø 14 mm, length 17.4 mm Ø 22 mm, length 20.6 mm Ø 14 mm, length 49.2 mm mounting clamped clamped clamped clamped metric M12 x 0.5 metric M15.5 x 0.5 metric M12 x 0.5 spot size mm 70 7 mm 70 8 mm mm 1.6 mm 1.6 mm 7.6 mm focal length 2.8 mm 7 mm 8 mm 13 mm infinity infinity infinity connector FC/PC none (fiber glued) none (fiber glued) none (fiber glued) FC/PC FC/PC FC/PC working environment /RT, /LT/HV, /UHV, /RAD /RT /RT, /LT/HV, /UHV, /RAD /RT, /LT/HV, /UHV, /RAD compatible targets glass, silicon wafer, mirror glass, silicon wafer, mirror glass, silicon wafer, mirror glass, silicon wafer, mirror glass and mirror glass and mirror retroreflector applications vibrometrie, profilometrie various applications various applications various applications various applications various applications long distance Measurement Specifications measurement mode (target: glass) single pass mode single pass mode single pass mode single pass mode single pass mode single pass mode - linear measurement range (target: glass) 2.8 mm 5..9 mm mm mm up to 5000 mm* up to 5000 mm* - alignment tolerance (target: glass) - ± 0.20 ± 0.35 ± 0.35 ± 0.03 ± measurement mode (target: mirror) - single pass mode single pass mode single pass mode dual pass mode dual pass mode - linear measurement range (target: mirror) mm mm mm 100 mm 100 mm - alignment tolerance (target: mirror) - ± 0.20 ± 0.35 ± 0.35 ± 50 mm ± 30 mm - measurement mode (target: retroreflector) single pass mode single pass mode single pass mode linear measurement range (target: retroreflector) up to 3000 mm up to 3000 mm up to 3000 mm alignment tolerance (target: retroreflector) ± 2 ± 2 ± 20 lateral alignment tolerance (target: retroreflector) ± 2 mm Compatible environments /RT (ambient conditions): C, 1x10-4 mbar.. 10 bar /HV (high vacuum): C, 1x10-8 mbar.. 10 bar /UHV (ultra high vacuum): C, 1x10-10 mbar.. 10 bar /LT (low temperature): /RAD (radiation hard): mk K (150 C 1x10-4 mbar.. 10 bar C, up to 10 MGy radiation dose Customized Sensor Heads Depending on your specific application, modifications concerning the type of optics, focal length, working environment or filter options are possible. For further information visit attoshop MIC available in our webshop shop.attocube.com

14 Environmental Compensation Unit accurate interferometrical measurements in ambient environment ECU/FPS3010 In order to reduce position inaccuracy due to air-induced variations of the index refraction, attocube supplies an environmental compensation unit (ECU). By locally measuring environmental parameters, an accuracy of typically better ± 1 ppm can be achieved in air. The ECU is plug and-play compatible with all FPS models and can be screw- or magnet mounted. FPS ECU Technical Specifications FPS art. no dimensions Ø 37 mm, height: 17.4 mm weight 36.5 g integrated sensors T, p, rh interface GPIO port sensor mount magnetic mount, screw mount working environment non condensing cable length 2,5 m Measurement Accuracy (Sensors) T-sensor ±0.1 C (0..50 C) p-sensor ±1 hpa ( mbar) rh-sensor ±2% (10..90%) typ. accuracy setup better ± 1 ppm For information on further accessories (fibers, targets, software upgrades... ), please visit