OPTINO. SpotOptics VERSATILE WAVEFRONT SENSOR O P T I N O

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1 Spotptics he software people for optics VERSALE WAVEFR SESR Accurate metrology in single and double pass Lenses, mirrors and laser beams Any focal length and diameter Large dynamic range Adaptable for production Wide wavelength range with different cameras (193nm-10.6µ) Different lenslets available according to application

2 ptino: models 2 -MU Small Footprint. Max: 45x45 spots USB3 Wavelength range: 380nm-1100nm Readout speed: 90Hz rocessing speed: 15Hz 37(H) x 30(W) x 79(L) mm -UV-VS Max 75x75 spots hinned CCD chip Gigabit Ethernet Wavelength range: 193nm-1100nm Readout speed: 7.5Hz rocessing speed: 7.5Hz -SWR Max 45x45 spots ngaas camera Gigabit Ethernet Wavelength range: 950nm-1700nm Readout speed: 100Hz rocessing speed: 50Hz Spotptics s.r.l., Via urazza adova, taly

3 Focal ratios covered echnical Specifications: Hardware ractically any focal ratio can be tested with appropriate collimator Diameter of optical element that can be tested in parallel light est setup Diameter and focal length of standard lenslets ractically any diameter can be tested with appropriate accessories Double or single pass (0.2mm, 11mm), (0.2mm, 22mm), (0.3mm, 41mm). thers: (0.13mm, 7mm). Special 3 Camera - connections o of spots (0.2mm diameter lenslet array and USB3 camera). 9mm pupil Maximum no. of spots (array with Gigabit camera). 15mm pupil Measure aspherical elements Cameras with Gigabit and USB2 and USB3 connection available. 10-bits to 16-bits 45x45 with (with 0.2mm array). 69x69 spots (with 0.13mm array) 75x75 (with 0.2mm array). 115x115 spots (with 0.13mm array) 15% variation in longitudinal spherical aberration RMS repeatability of computation of Zernike polynomials 1-2nm rms (λ/600-λ/300) at 633nm RMS repeatability of wavefront measurements < λ/200 Accuracy λ/10- λ/100 depending on the accuracy of the calibration elements Dynamic range of measurements sub-pupil (tilt subtracted) -±50 λ Wavelength range Light sources Software (control and analysis) Acquisition speed rocessing speed ower requirement for collimator stepper motor (motorized version) rigger UV ( μ), Vis ( μ), μ LEDs, LDs and Halogen lamps available (at one wavelength or in white light) Sensoft Hz (camera dependent) Hz (camera and C dependent) 12V/2A DC L 5V Spotptics s.r.l., Via urazza adova, taly

4 SESF: HE SFWARE Sensoft: he modular software package Hardware control of ptino (camera, light source and motor) Full Shack-Hartmann (SH) analysis Zernike aberration coefficients: Annular, Standard and Fringe 4 Aberration coefficients: Seidel Wavefront: Zonal and modal MF, SF and EE Strehl ratio Spot diagram and Diagnostics (alignment and best focal plane) Loop mode for on-line alignment and best focal plane) using coma, astigmatism and spherical aberration Loop mode for on-line adjustment of spacing of elements to get best focal plane using spherical aberration Average of SH images to decrease noise Automatic control of exposure time ptino in your production line: ptino with its own C - can easily be adapted to the production line Work in a closed-loop with the C of the manufacturing machine A software module defines the communication protocol and transfers the results between the control C of ptino and the production C, minimizing cost and time to develop special software to install on user C Spotptics s.r.l., Via urazza adova, taly

5 -LE ALGME A FAS L MF MEASUREMES 5 Alignment started Coma decreases he alignment of complex optical systems becomes easy by monitoring coma and astigmatism in a continuous loop he individual (x, y) components of coma and astigmatism, as well as the total coefficients are displayed he optimization can be done for one component at a time, as the software can display one component of interest MF after subtracting the contributions of tilt and defocus present in the data. Spotptics s.r.l., Via urazza adova, taly

6 Lenslet array (fl 11, 22 and 41 mm). thers available on request Collimator or test lens mounted here. Beam expanders can also be used Cameras from 193nm (UV) to 1700nm (R) and 8-12µ LWR) LAYU Cameras from 45x45 to 75x75 spots (0.2m lenslet array) Different light sources: LED, LD or halogen Stepper motor for internal collimator for use at different wavelengths HYSCAL Dimensions: 17 (L) x 10 (W) x 10 (H) cm Weight: 3 Kg Cameras: USB3, Gigabit Ethernet Motor power supply: 12V, 2A KEY FEAURES Measurement technique Shack-Hartmann wavefront sensor est in parallel light or at the lens focus arallel light (with a collimator) At the focus of the lens (with a pinhole) Light sources with different wavelength available Calibration High-quality parallel light source inhole calibration unit /20 Spherical and flat reference mirrors Versatile est any element in double or single pass Accessories Full set of accessories available SFWARE Easy alignment of lens group via software: the software gives graphical indication of the misalignment of the optical system, using coma and astigmatism. 6 Spotptics s.r.l., Via urazza adova, taly

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