Large-Actuator-Count MEMS. Deformable Mirror Development
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1 Large-Actuator-Count MEMS Deformable Mirror Development Michael A. Helmbrecht Iris AO, Inc. NIH/NEI Phase II SBIR: 2 R44 EY A1 NASA Phase I SBIR: NNX09CE01P Approved for public release; unlimited distribution June 7 th, 2010 NASA Mirror Technology Days
2 Small Business Innovation Research PTT489-5 Segmented PTT Deformable Mirror INNOVATION Iris AO, Inc. Berkeley, CA PTT489 Segmented MEMS Deformable Mirror: A 489 actuator, piston/tip/tilt positionable deformable mirror used to correct optical aberrations. Conducting production runs Iris AO Contact Dr. Michael Helmbrecht, michael.helmbrecht@irisao.com ACCOMPLISHMENTS Dramatic improvement in reliability and failure proofing Beta devices delivered with > 99% segment yield Segment figure < 5 nm rms Dielectric coatings demonstrated Path-finding research demonstrating 3000 actuator devices Beta devices purchased from NASA GSFC and by customers using them for other SBIR projects COMMERCIALIZATION PTT489, 489 actuator piston/tip/tilt deformable mirror 6 patents awarded, 1 patent pending PTT111 and PTT489 DM currently being sold DMs purchased by NASA/GSFC and researchers in vision science, astronomy, and defense Factory calibrated position controller linearizes operation and limits operation to safe bounds. Larger stroke than competing large-actuator technologies while maintaining speed Rigid mirror segments enable dielectric coatings PTT489-5 DM GOVERNMENT/SCIENCE APPLICATIONS June 7 th, 2010 projects NASA Mirror Technology Days High-stroke micromachined deformable mirror to correct aberrations caused by turbulence or to actively correct optical system aberrations Extend to 1000 actuator devices for high turbulence imaging and laser communication applications (DOD) and 3000 actuators for high-contrast imaging applications (NASA) Actual applications: Nulling coronagraphs for exoplanet imaging, Atmospheric turbulence compensation for free-space laser communication, laser guide star uplink correction Actual applications: Potential applications: High-speed focus correction for laser machining Phase III purchase of DM by NASA GSFC for Extrasolar Planetary Imaging Coronagraph (EPIC), GSFC, Clampin et al. Purchases of PTT489 by DOD SBIR winners using DM for their
3 Outline Background: PTT111-X (S37-X) PTT111 Improvements Scaling up: PTT489-X and beyond 10 3 segment DM pathfinding research June 7 th, 2010 NASA Mirror Technology Days
4 TT111: A Solid Foundation June 7 th, 2010 NASA Mirror Technology Days
5 DM Segment Schematic 700 µm Rigid High-Qua lity Mirror Segment Bondsites Actua tor Pla tform Electrodes Tempera ture Insensitive Bimorph Flexure 3 DOF: Piston/tip/tilt electrostatic actuation Hybrid fabrication process 3-poly surface micromachining Single-crystalsilicon assembled mirror Unit cell easily tiled to create large arrays June 7 th, 2010 NASA Mirror Technology Days
6 1 st Generation DM Attributes High Stroke: 5 µm, 8 µm 10+ µm in controlled environments Flat mirror segments: < 30 nm rms nm PV bow / C Fast mirror rise time 120/140 µs rise/fall times, 20-80%; 1.63 µm, 36 V Precision factory-calibrated controller Linear, open-loop operation Implements position limiting Compact drive electronics Open-air operation Tested >1000 hrs, 20-70% RH Smart Driver II 128 USB 128 Channels High resolution 14 bit, 200 V Low Noise:< 4mV rms Factory calibrated June 7 th, 2010 NASA Mirror Technology Days
7 PTT111-X Design and Process Improvements: Better, then Bigger June 7 th, 2010 NASA Mirror Technology Days
8 PTT111 DM Improvements Flatter mirror segments <5 nm rms Improved reliability Snap-in prevention structures Relatively high-laser fluence demonstrated Off-the shelf DM w/ protected-aluminum coating: ~95 W/cm 2 Dielectric coatings demonstrated June 7 th, 2010 NASA Mirror Technology Days
9 Anti Snap-In Device: After 100,000,000 Snap-In Events Segments Over Driven Voltage Removed Center segment fails because no snap-in protection Adjacent segment with protection survives Testing stopped after 100,000,000 snap-in events with no failure June 7 th, 2010 NASA Mirror Technology Days
10 High-Quality Dielectric Coatings >99.9% reflectance dielectric 532 nm < 30 nm rms residual surface figure errors ~1.5 µm thick coating Backside stress compensation layer Protected-Al coatings survived ~95 W/cm 2 Off-the-shelf DMs Laser testing done at Laboratory for Adaptive Optics (LAO) Expect off-the-shelf dielectric coated DMs to be at least 10X higher June 7 th, 2010 NASA Mirror Technology Days
11 Scaling Up: PTT489-X DM June 7 th, 2010 NASA Mirror Technology Days
12 PTT489-5 DM with Removable Cover June 7 th, 2010 NASA Mirror Technology Days
13 PTT489-5 DM June 7 th, 2010 NASA Mirror Technology Days
14 1 st Generation DM: PTT111 PTT111 used to develop basic systems and conduct testing MEMS process development Electrical characterization Calibration Software drivers AO controllers Reliability testing Optical coating development Most aspects were tailored to PTT111 June 7 th, 2010 NASA Mirror Technology Days
15 Scaling Up: Creating an Extensible Design MEMS design/process inherently scales well Demonstrated stepper and contact photolithography Existing design extensible to ~4000 actuators Larger possible with development of interconnect New electrical tester for MEMS testing and characterization Extensible to > 10,000 of actuators New calibration interferometer (ARRA Stimulus grant from NIH) Larger FOV Precision field stitching Extensible to 100 mm aperture New PC-based software driver Unlimited extensibility Much faster update rates June 7 th, 2010 NASA Mirror Technology Days
16 Standing start to delivery of beta devices in <2 years Timeline Tape out May 2008 Actuator mechanical-only run August 2008 Actuator electrical run March 2009 Mirror wafer run August 2009 Beta device delivery March 2010 Production runs: Mirror wafers: June 2010 Actuator wafers: August MEMS Process Development June 7 th, 2010 NASA Mirror Technology Days
17 PCI/PCIe interface: v1.0 PTT Controller Speed Enhancements 2.5 khz array update rates for PTT111 DM controller PCI/PCIe driver: v khz PTT489 array update rates Custom FPGA PTT controller demonstrated Array update rates > 35 khz June 7 th, 2010 NASA Mirror Technology Days
18 Pathfinding Research: 3x10 3 Actuator DMs June 7 th, 2010 NASA Mirror Technology Days
19 925 Segment Path Finder Segment DM Path-Finding Research mm June 7 th, 2010 NASA Mirror Technology Days
20 Summary PTT111 DM Improvements Flatter segments Faster interface Dielectric coatings Anti snap-in devices Technology scaled to PTT489 Beta DMs delivered All infrastructure revamped to be extensible Path-finding research demonstrates ability to scale to 3x10 3 actuator DMs June 7 th, 2010 NASA Mirror Technology Days
21 Acknowledgements Funding Sources NASA SBIRs, (DM control, DM Fabrication) Phase I/II: NNG07CA06C, Phase I: NNX09CE01P Center for Adaptive Optics (DM Process Development) National Science Foundation Science and Technology: No. AST National Eye Institute Phase II SBIR (DM Process Development) 2 R44 EY A1 National Science Foundation Phase II SBIR (2-Poly Process Development) DMI R&D Fabrication Facility Berkeley Microfabrication Laboratory Research Collaboration Berkeley Sensor & Actuator Center June 7 th, 2010 NASA Mirror Technology Days
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