GLOBAL MARKETS, TECHNOLOGIES AND MATERIALS FOR THIN AND ULTRATHIN FILMS

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1 GLOBAL MARKETS, TECHNOLOGIES AND MATERIALS FOR THIN AND ULTRATHIN FILMS SMC057C August Margareth Gagliardi Project Analyst ISBN: BCC Research 49 Walnut Park, Building 2 Wellesley, MA USA (toll-free within the USA), or (+1)

2 TABLE OF CONTENTS CHAPTER 1 INTRODUCTION 2 STUDY GOALS AND OBJECTIVES 2 REASONS FOR DOING THIS STUDY 2 INTENDED AUDIENCE 3 SCOPE OF REPORT 4 METHODOLOGY AND INFORMATION SOURCES 5 RELATED BCC RESEARCH REPORTS 6 ANALYST'S CREDENTIALS 7 BCC RESEARCH WEBSITE 8 DISCLAIMER 9 CHAPTER 2 EXECUTIVE SUMMARY 11 SUMMARY TABLE GLOBAL MARKET FOR THIN FILM MATERIALS BY SEGMENT, THROUGH 2021 ($ SUMMARY FIGURE GLOBAL MARKET FOR THIN FILM MATERIALS BY SEGMENT, ($ CHAPTER 3 OVERVIEW 15 COATINGS AND FILMS 15 THICK, THIN AND ULTRATHIN FILMS 15 COST FACTOR AND MANUFACTURING PROCESSES 16 THICK FILM TECHNOLOGIES 16 TABLE 1 THICK FILM TECHNOLOGIES, 16 THIN, NANO AND ULTRATHIN FILM TECHNOLOGIES 18 Technological and Market Trends in the Thin Film Industry 19 FIGURE 1 GLOBAL THIN FILM METHODS (EQUIPMENT, MATERIALS, SERVICES) MARKET SHARE BY GROUP OF TECHNOLOGIES, (%) MILESTONES IN THE HISTORY OF THICK AND THIN FILM TECHNOLOGIES AND RECENT EVENTS TABLE 2 THICK FILM, THIN FILM AND PRINTING PROCESSES: TECHNOLOGICAL MILESTONES FIGURE 2 GLOBAL THIN FILMS PATENT APPLICATIONS AND PATENTS, (NO. OF PATENTS) APPLICATIONS FOR THIN AND ULTRATHIN FILMS 24 TABLE 3 APPLICATIONS FOR THIN FILMS, 24 ELECTRONICS 25 TABLE 4 THIN FILMS IN ELECTRONICS, 26 OPTOELECTRONICS 28 TABLE 5 THIN FILMS IN OPTOELECTRONICS, 29 MECHANICAL/CHEMICAL 30 TABLE 6 THIN FILMS IN THE MECHANICAL/CHEMICAL SECTOR, 30 SENSORS AND INSTRUMENTATION 31 TABLE 7 THIN FILMS IN THE SENSORS AND INSTRUMENTATION SECTOR, 31 ENERGY 32 TABLE 8 THIN FILMS IN THE ENERGY SECTOR, 32 OPTICAL COATINGS 33 TABLE 9 THIN FILMS IN THE OPTICAL COATINGS SECTOR,

3 LIFE SCIENCES 35 TABLE 10 THIN FILMS IN LIFE SCIENCES, 35 OTHERS 35 TABLE 11 THIN FILMS IN OTHER APPLICATIONS, 36 CHAPTER 4 TECHNOLOGIES AND MATERIALS FOR THIN AND ULTRATHIN FILMS 38 INTRODUCTION 38 THIN FILM FABRICATION 38 FIGURE 3 THIN FILM TYPES BASED ON FABRICATION PROCESS 38 COATINGS 39 TABLE 12 BASIC CONSTRUCTION STEPS OF A THIN FILM DEVICE, 39 SUBSTRATE SELECTION 39 TABLE 13 TYPICAL SUBSTRATE MATERIALS FOR THIN AND ULTRATHIN FILMS, 40 THIN FILM COATING AND PATTERNING 41 Patterned and Unpatterned Thin Films 42 CUTTING, FINISHING AND PACKAGING 42 THIN FILM COATING PROCESSES 42 SUBTRACTIVE METHODS 43 Coating Methods Used in Subtractive Processes 43 TABLE 14 THIN FILM COATING TECHNOLOGIES, 44 Physical Processes 47 Chemical Processes 48 Hybrid Processes 48 Deposition Technologies for Ultrathin Films 48 TABLE 15 DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS, 49 TABLE 16 DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS, 50 Lithography 50 Optical Lithography 51 Immersion Lithography 51 Nanostencil Lithography 51 Deep Ultraviolet Light Lithography 51 X-Ray Lithography 51 Electron Beam Lithography 51 Reflective E-beam Lithography 52 Ion Beam Lithography 52 Scanning Probe Lithography 52 Dip-pen Nanolithography 52 Nanoimprint 53 Thermoplastic Nanoimprint Lithography 53 Photo Nanoimprint Lithography 53 Laser-assisted Direct Imprint 53 Self-Aligned Imprint Lithography 53 Extreme Ultraviolet Lithography 54 Directed Self Assembly 54 Nanomotor Lithography 54 TABLE 17 LITHOGRAPHIC METHODS, (NM) 55 Etching 55

4 ADDITIVE METHODS 55 TABLE 18 THIN FILM PRINTING TECHNOLOGIES, 55 Production Process for Printed Thin Film Devices 56 TABLE 19 BASIC PRODUCTION PROCESS FOR PRINTED THIN FILM DEVICES 57 Screen Printing 57 TABLE 20 THIN FILMS RECENTLY MANUFACTURED BY SCREEN PRINTING, Stencil Printing 58 TABLE 21 THIN FILMS RECENTLY MANUFACTURED BY STENCIL PRINTING, Gravure 59 Direct Gravure 59 Reverse Gravure 59 Offset Gravure 59 Smooth Roll Gravure 59 Microgravure 60 TABLE 22 THIN FILMS RECENTLY MANUFACTURED BY GRAVURE, Pad Printing 60 Flexography 61 TABLE 23 THIN FILMS RECENTLY MANUFACTURED BY FLEXOGRAPHY, Transfer Printing 61 Offset Lithography 62 Inkjet Printing 62 Continuous Inkjet Printing 62 Drop-on-Demand Inkjet Printing 63 Thermal 63 Piezoelectric 63 Electrostatic 63 Acoustic 63 Phase-Change 63 TABLE 24 THIN FILMS RECENTLY MANUFACTURED BY INKJET PRINTING, Organic Vapor Jet Printing 65 TABLE 25 THIN FILMS RECENTLY MANUFACTURED BY ORGANIC VAPOR JET PRINTING, Laser Printing 65 TABLE 26 THIN FILMS RECENTLY MANUFACTURED BY LASER PRINTING, Micro-Spray Printing 66 Aerosol Jet Printing 66 Electrophotography 66 Ionography 66 Magnetography 67 Nanography 67 Thermography 67 Most Common Printing Processes for Thin Films 67 TABLE 27 FILM OR FEATURE THICKNESS ACHIEVABLE BY DIFFERENT PRINTING METHODS, (NM) FREE-STANDING THIN FILMS 68 THIN FILM DEPOSITION AND FILM RELEASE

5 Peeling 69 Lift-Off 69 Laser Lift-Off 69 Substrate Compression 69 Self-limiting Surface Modification 69 Chemical Dissolution 70 FILTRATION 70 FLOW COATING 70 FLOATING 70 TABLE 28 METHODS FOR FABRICATION OF FREE-STANDING THIN FILMS, 70 TABLE 29 FREE-STANDING THIN FILMS: FILM COMPOSITION AND APPLICATIONS, THIN FILM MATERIALS 72 MATERIALS FOR THIN-FILM COATINGS BY PHYSICAL PROCESSES 73 TABLE 30 PHYSICAL PROCESSES: TYPICAL DEPOSITION MATERIALS FOR THIN FILMS, MATERIALS FOR THIN-FILM COATINGS BY CHEMICAL PROCESSES 81 Chemical Vapor Deposition 81 TABLE 31 MATERIALS FOR THIN FILMS USED IN CHEMICAL VAPOR DEPOSITION, Functional Group Sources 82 Metal Sources 83 Metal Hydrides and Halides 83 Metalorganic Precursors 83 TABLE 32 COMMON METALORGANIC PRECURSORS, 85 Chemical Solution Deposition 86 Sol-gel Methods 86 Organic-Inorganic Hybrids 87 Metalorganic Deposition 87 TABLE 33 MATERIALS FOR THIN FILMS USED IN CHEMICAL SOLUTION DEPOSITION, Plating Type Methods 88 Electroplating 88 Electroless Plating 89 Electrophoretic Deposition 89 TABLE 34 MATERIALS FOR THIN FILMS USED IN PLATING TYPE METHODS, 90 Other Chemical Processes 91 Liquid Phase Epitaxy 91 Liquid Phase Deposition 91 Interfacial Polymerization 91 Langmuir-Blodgett Deposition 91 Self-Assembled Monolayer Deposition 92 Layer-by-Layer Assembly 92 Flame Hydrolysis 92 Spray Pyrolysis 93 Laser Reactive Deposition 93 TABLE 35 MATERIALS FOR THIN FILMS USED IN OTHER CHEMICAL PROCESSES,

6 MATERIALS FOR THIN FILM PRINTING 94 Nano Inks 95 TABLE 36 TYPES OF NANOMATERIALS, 95 TABLE 37 NANOMATERIALS FOR THIN FILMS, 96 Precursor Inks 98 Molecular Inks 98 LATEST TECHNOLOGICAL DEVELOPMENTS FROM 2014 TO 98 NANOWIRE INK FOR TRANSPARENT CONDUCTIVE FILMS 98 LOW-TEMPERATURE COPPER NANO INK 99 INK FOR INKJET PRINTING OF OPTOELECTRONIC DEVICES 100 CONDUCTIVE NANO INK FOR FLEXIBLE TOUCH SENSORS 101 AMINO-SILYL AMINE COMPOUND FOR ATOMIC LAYER DEPOSITION 102 COLLOIDAL IRON PYRITE FOR THIN-FILM SOLAR CELLS 102 TRIPHENYLAMINE DERIVATIVE FOR ELECTROLUMINESCENT DEVICES 103 OTHER RELEVANT R&D ACTIVITIES 104 TABLE 38 OTHER RELEVANT R &D ACTIVITIES, 104 TECHNOLOGICAL TRENDS FOR THIN FILM MATERIALS 105 FIGURE 4 TECHNOLOGICAL TRENDS IN THE THIN FILM INDUSTRY 105 CHAPTER 5 GLOBAL MARKETS 109 ANALYSIS OUTLINE 109 GLOBAL MARKET SUMMARY 109 TABLE 39 GLOBAL MARKET FOR THIN FILM MATERIALS BY SEGMENT, THROUGH 2021 ($ FIGURE 5 GLOBAL MARKET FOR THIN FILM MATERIALS BY SEGMENT, ($ CURRENT MARKET STATUS 111 CURRENT MARKET SUMMARY 111 TABLE 40 GLOBAL MARKET FOR THIN FILM MATERIALS, THROUGH ($ FIGURE 6 GLOBAL MARKET FOR THIN FILM MATERIALS, ($ 112 Revenues by Application 113 TABLE 41 GLOBAL MARKET FOR THIN FILM MATERIALS BY APPLICATION, THROUGH ($ FIGURE 7 GLOBAL THIN FILM MATERIALS MARKET SHARE BY APPLICATION, (%) Revenues by Deposition Technology 115 TABLE 42 GLOBAL MARKET FOR THIN FILM MATERIALS BY DEPOSITION TECHNOLOGY, THROUGH ($ FIGURE 8 GLOBAL THIN FILM MATERIALS MARKET SHARE BY DEPOSITION TECHNOLOGY, (%) Revenues by Film Thickness 118 TABLE 43 GLOBAL MARKET FOR THIN FILM MATERIALS BY FILM THICKNESS, THROUGH ($ FIGURE 9 GLOBAL THIN FILM MATERIALS MARKET SHARE BY FILM THICKNESS, (%) Revenues by Region 120 TABLE 44 GLOBAL THIN FILM MATERIALS MARKET BY REGION, THROUGH ($

7 FIGURE 10 GLOBAL THIN FILM MATERIALS MARKET SHARE BY REGION, (%) 120 MARKET GROWTH TRENDS 121 ELECTRONICS 121 Semiconductor Devices 121 TABLE 45 GLOBAL SEMICONDUCTORS MARKET BY REGION, THROUGH 2021 ($ MEMS and NEMS 122 TABLE 46 GLOBAL MEMS AND NEMS MARKET BY TYPE, THROUGH 2021 ($ Printed Circuits 123 Data Storage Devices 123 Hard Disk Drives 123 TABLE 47 GLOBAL PRODUCTION OF HARD DISK DRIVES BY TYPE, THROUGH 2021 (MILLION UNITS) Optical Storage Media 124 TABLE 48 GLOBAL PRODUCTION OF OPTICAL STORAGE MEDIA BY TYPE, THROUGH 2021 (MILLION UNITS) OPTOELECTRONICS 125 Advanced Displays 125 TABLE 49 GLOBAL ADVANCED DISPLAYS MARKET BY TYPE, THROUGH 2021 ($ Solid-state Lighting 127 Lasers 127 Optical Waveguides 127 TABLE 50 GLOBAL MARKET FOR OPTICAL FIBERS, THROUGH 2021 ($ MILLIONS/MILLION KILOMETERS) MECHANICAL/CHEMICAL 127 TABLE 51 GLOBAL AEROSPACE MARKET BY REGION, THROUGH 2021 ($ 128 TABLE 52 GLOBAL MARKET FOR PROTECTIVE COATINGS BY APPLICATIONS TYPE, THROUGH 2021 ($ ENERGY 129 Photovoltaic Cells 129 TABLE 53 GLOBAL PRODUCTION OF PHOTOVOLTAIC MODULES BY TYPE, THROUGH 2021 (MW) Flexible Solar Cells 130 Photothermal Devices 130 Batteries 131 Fuel Cells 131 TABLE 54 GLOBAL FUEL CELLS MARKET BY TYPE, THROUGH 2021 ($ 132 Thermoelectric Devices 132 OPTICAL COATINGS 132 Flat Glass 132 TABLE 55 GLOBAL FLAT GLASS MARKET BY SECTOR, THROUGH 2021 ($ 133 Eyewear 133 LIFE SCIENCES 134 Implantable Devices 134 TABLE 56 GLOBAL IMPLANTABLE DEVICES: MARKET BY REGION, THROUGH 2021 ($ Medical Instruments

8 Membranes 134 Advanced Drug Delivery Systems 135 Wearable Medical Devices 135 Wound Treatment 135 SENSORS AND OTHER APPLICATIONS 135 Sensors 135 TABLE 57 GLOBAL SENSORS MARKET BY TYPE, THROUGH 2021 ($ 136 Biosensors 136 TABLE 58 GLOBAL BIOSENSORS AND OTHER COMMON SENSORS MARKET BY TYPE, THROUGH 2021 ($ Other Industry Segments 137 TABLE 59 GLOBAL OTHER INDUSTRY SECTORS MARKET BY TYPE, THROUGH 2021 ($ TECHNOLOGICAL TRENDS 137 On-going Miniaturization in the Semiconductor Industry 137 Increasing Demand for Flexible Devices 138 Fast Growing Market for Transparent Electronics 139 Nanotechnology 139 TABLE 60 THE NANOTECHNOLOGY INDUSTRY, 140 TABLE 61 GLOBAL NANOTECHNOLOGY MARKET BY SEGMENT, THROUGH 2021 ($ FIGURE 11 GLOBAL NANOTECHNOLOGY MARKET SHARE BY SEGMENT, (%) 142 Manufacturing Efficiency, Product Mix and Environmental Factors 143 Others 143 REGIONAL TRENDS 143 MARKET FORECAST 144 REVENUES BY APPLICATION 144 TABLE 62 GLOBAL THIN FILM MATERIALS MARKET BY APPLICATION, THROUGH 2021 ($ FIGURE 12 GLOBALTHIN FILM MATERIALS MARKET SHARE BY APPLICATION, 2021 (%) Revenues by Deposition Technology 146 TABLE 63 GLOBAL THIN FILM MATERIALS MARKET BY DEPOSITION TECHNOLOGY, THROUGH 2021 ($ FIGURE 13 GLOBAL THIN FILM MATERIALS MARKET SHARE BY DEPOSITION TECHNOLOGY, 2021 (%) Revenues by Film Thickness 148 TABLE 64 GLOBAL THIN FILM MATERIALS MARKET BY FILM THICKNESS, THROUGH 2021 ($ FIGURE 14 GLOBAL THIN FILM MATERIALS MARKET SHARE BY FILM THICKNESS, 2021 (%) Revenues by Region 150 TABLE 65 GLOBAL THIN FILM MATERIALS MARKET BY REGION, THROUGH 2021 ($ FIGURE 15 GLOBAL THIN FILM MATERIALS MARKET SHARE BY REGION, 2021 (%) CHAPTER 6 GLOBAL INDUSTRY STRUCTURE 153 LEADING SUPPLIERS OF THIN FILM MATERIALS 153 TABLE 66 GLOBAL LEADING SUPPLIERS OF THIN FILM MATERIALS, 153

9 TABLE 67 GLOBAL LEADING SUPPLIERS OF THIN FILM MATERIALS BY PROCESS, TABLE 68 GLOBAL LEADING SUPPLIERS OF THIN FILM MATERIALS BY PROCESS AND REGION, OTHER PLAYERS IN THE THIN FILM INDUSTRY 165 TABLE 69 OTHER RELEVANT INDUSTRY PLAYERS, 165 COMPANY PROFILES 172 AIR LIQUIDE 172 AIR PRODUCTS AND CHEMICALS 173 AKZONOBEL 174 ALFA AESAR 175 ATOTECH 176 BASF 176 CORNING PRECISION MATERIALS KOREA 177 DAIDO STEEL 178 DOW 179 HERAEUS 180 TABLE 70 HERAEUS STANDARD TARGET MATERIALS, 181 JX NIPPON MINING & METALS 182 KOBE STEEL 183 LINDE 184 MACDERMID 184 MATERION 185 TABLE 71 MATERION TECHNOLOGIES 186 MITSUI KINZOKU 187 PRAXAIR 187 TOSOH 189 ULVAC 190 TABLE 72 ULVAC SPUTTERING TARGETS, 191 UMICORE 192 TABLE 73 UMICORE SPUTTERING TARGETS, CHAPTER 7 PATENT ANALYSIS 195 INTRODUCTION 195 SUMMARY OF RECENTLY AWARDED PATENTS 195 TABLE 74 THIN AND ULTRATHIN FILMS - RECENTLY AWARDED U.S. PATENTS 195 GENERAL TRENDS 201 TABLE 75 U.S. PATENT TRENDS FOR THIN AND ULTRATHIN FILMS, FIGURE 16 U.S. PATENT TRENDS FOR THIN AND ULTRATHIN FILMS, (NUMBER OF PATENTS) TRENDS BY COUNTRY AND REGION 203 FIGURE 17 PATENT SHARE OF THIN AND ULTRATHIN FILMS BY REGION (%) 203 FIGURE 18 PATENT SHARE OF THIN AND ULTRATHIN FILMS BY COUNTRY (%) 204 TRENDS BY ASSIGNEE 204 TABLE 76 ASSIGNEES OF U.S. PATENTS RELATED TO THIN AND ULTRATHIN FILMS 205 TRENDS BY PATENT CATEGORY 207 FIGURE 19 SHARES OF THIN AND ULTRATHIN FILMS PATENTS IN U.S. BY CATEGORY (%)

10 TRENDS BY DEPOSITION METHOD 208 FIGURE 20 SHARES OF THIN AND ULTRATHIN FILMS PATENTS IN U.S. BY DEPOSITION METHOD (%) 209

11 LIST OF TABLES TABLE HEADING SUMMARY TABLE GLOBAL MARKET FOR THIN FILM MATERIALS BY SEGMENT, THROUGH 2021 ($ TABLE 1 THICK FILM TECHNOLOGIES, 16 TABLE 2 THICK FILM, THIN FILM AND PRINTING PROCESSES: TECHNOLOGICAL MILESTONES TABLE 3 APPLICATIONS FOR THIN FILMS, 24 TABLE 4 THIN FILMS IN ELECTRONICS, 26 TABLE 5 THIN FILMS IN OPTOELECTRONICS, 29 TABLE 6 THIN FILMS IN THE MECHANICAL/CHEMICAL SECTOR, 30 TABLE 7 THIN FILMS IN THE SENSORS AND INSTRUMENTATION SECTOR, 31 TABLE 8 THIN FILMS IN THE ENERGY SECTOR, 32 TABLE 9 THIN FILMS IN THE OPTICAL COATINGS SECTOR, 34 TABLE 10 THIN FILMS IN LIFE SCIENCES, 35 TABLE 11 THIN FILMS IN OTHER APPLICATIONS, 36 TABLE 12 BASIC CONSTRUCTION STEPS OF A THIN FILM DEVICE, 39 TABLE 13 TYPICAL SUBSTRATE MATERIALS FOR THIN AND ULTRATHIN FILMS, 40 TABLE 14 THIN FILM COATING TECHNOLOGIES, 44 TABLE 15 DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS, 49 TABLE 16 DEPOSITION TECHNOLOGIES FOR ULTRATHIN FILMS, 50 TABLE 17 LITHOGRAPHIC METHODS, (NM) 55 TABLE 18 THIN FILM PRINTING TECHNOLOGIES, 55 TABLE 19 BASIC PRODUCTION PROCESS FOR PRINTED THIN FILM DEVICES 57 TABLE 20 THIN FILMS RECENTLY MANUFACTURED BY SCREEN PRINTING, TABLE 21 THIN FILMS RECENTLY MANUFACTURED BY STENCIL PRINTING, TABLE 22 THIN FILMS RECENTLY MANUFACTURED BY GRAVURE, TABLE 23 THIN FILMS RECENTLY MANUFACTURED BY FLEXOGRAPHY, TABLE 24 THIN FILMS RECENTLY MANUFACTURED BY INKJET PRINTING, TABLE 25 THIN FILMS RECENTLY MANUFACTURED BY ORGANIC VAPOR JET PRINTING, TABLE 26 THIN FILMS RECENTLY MANUFACTURED BY LASER PRINTING, TABLE 27 FILM OR FEATURE THICKNESS ACHIEVABLE BY DIFFERENT PRINTING METHODS, (NM) TABLE 28 METHODS FOR FABRICATION OF FREE-STANDING THIN FILMS, 70 TABLE 29 FREE-STANDING THIN FILMS: FILM COMPOSITION AND APPLICATIONS, TABLE 30 PHYSICAL PROCESSES: TYPICAL DEPOSITION MATERIALS FOR THIN FILMS, TABLE 31 MATERIALS FOR THIN FILMS USED IN CHEMICAL VAPOR DEPOSITION, 82 TABLE 32 COMMON METALORGANIC PRECURSORS, 85 TABLE 33 MATERIALS FOR THIN FILMS USED IN CHEMICAL SOLUTION DEPOSITION, TABLE 34 MATERIALS FOR THIN FILMS USED IN PLATING TYPE METHODS, 90 TABLE 35 MATERIALS FOR THIN FILMS USED IN OTHER CHEMICAL PROCESSES, 93 TABLE 36 TYPES OF NANOMATERIALS, 95 TABLE 37 NANOMATERIALS FOR THIN FILMS, 96 TABLE 38 OTHER RELEVANT R &D ACTIVITIES, 104 TABLE 39 GLOBAL MARKET FOR THIN FILM MATERIALS BY SEGMENT, THROUGH 2021 ($

12 TABLE HEADING TABLE 40 GLOBAL MARKET FOR THIN FILM MATERIALS, THROUGH ($ 112 TABLE 41 GLOBAL MARKET FOR THIN FILM MATERIALS BY APPLICATION, THROUGH ($ TABLE 42 GLOBAL MARKET FOR THIN FILM MATERIALS BY DEPOSITION TECHNOLOGY, THROUGH ($ TABLE 43 GLOBAL MARKET FOR THIN FILM MATERIALS BY FILM THICKNESS, THROUGH ($ TABLE 44 GLOBAL THIN FILM MATERIALS MARKET BY REGION, THROUGH ($ TABLE 45 GLOBAL SEMICONDUCTORS MARKET BY REGION, THROUGH 2021 ($ TABLE 46 GLOBAL MEMS AND NEMS MARKET BY TYPE, THROUGH 2021 ($ 123 TABLE 47 GLOBAL PRODUCTION OF HARD DISK DRIVES BY TYPE, THROUGH 2021 (MILLION UNITS) TABLE 48 GLOBAL PRODUCTION OF OPTICAL STORAGE MEDIA BY TYPE, THROUGH 2021 (MILLION UNITS) TABLE 49 GLOBAL ADVANCED DISPLAYS MARKET BY TYPE, THROUGH 2021 ($ TABLE 50 GLOBAL MARKET FOR OPTICAL FIBERS, THROUGH 2021 ($ MILLIONS/MILLION KILOMETERS) TABLE 51 GLOBAL AEROSPACE MARKET BY REGION, THROUGH 2021 ($ 128 TABLE 52 GLOBAL MARKET FOR PROTECTIVE COATINGS BY APPLICATIONS TYPE, THROUGH 2021 ($ TABLE 53 GLOBAL PRODUCTION OF PHOTOVOLTAIC MODULES BY TYPE, THROUGH 2021 (MW) TABLE 54 GLOBAL FUEL CELLS MARKET BY TYPE, THROUGH 2021 ($ 132 TABLE 55 GLOBAL FLAT GLASS MARKET BY SECTOR, THROUGH 2021 ($ 133 TABLE 56 GLOBAL IMPLANTABLE DEVICES: MARKET BY REGION, THROUGH 2021 ($ TABLE 57 GLOBAL SENSORS MARKET BY TYPE, THROUGH 2021 ($ 136 TABLE 58 GLOBAL BIOSENSORS AND OTHER COMMON SENSORS MARKET BY TYPE, THROUGH 2021 ($ TABLE 59 GLOBAL OTHER INDUSTRY SECTORS MARKET BY TYPE, THROUGH 2021 ($ TABLE 60 THE NANOTECHNOLOGY INDUSTRY, 140 TABLE 61 GLOBAL NANOTECHNOLOGY MARKET BY SEGMENT, THROUGH 2021 ($ TABLE 62 GLOBAL THIN FILM MATERIALS MARKET BY APPLICATION, THROUGH 2021 ($ TABLE 63 GLOBAL THIN FILM MATERIALS MARKET BY DEPOSITION TECHNOLOGY, THROUGH 2021 ($ TABLE 64 GLOBAL THIN FILM MATERIALS MARKET BY FILM THICKNESS, THROUGH 2021 ($ TABLE 65 GLOBAL THIN FILM MATERIALS MARKET BY REGION, THROUGH 2021 ($ TABLE 66 GLOBAL LEADING SUPPLIERS OF THIN FILM MATERIALS, 153 TABLE 67 GLOBAL LEADING SUPPLIERS OF THIN FILM MATERIALS BY PROCESS, 160 TABLE 68 GLOBAL LEADING SUPPLIERS OF THIN FILM MATERIALS BY PROCESS AND REGION, TABLE 69 OTHER RELEVANT INDUSTRY PLAYERS, 165 TABLE 70 HERAEUS STANDARD TARGET MATERIALS,

13 TABLE HEADING TABLE 71 MATERION TECHNOLOGIES 186 TABLE 72 ULVAC SPUTTERING TARGETS, 191 TABLE 73 UMICORE SPUTTERING TARGETS, 193 TABLE 74 THIN AND ULTRATHIN FILMS - RECENTLY AWARDED U.S. PATENTS 195 TABLE 75 U.S. PATENT TRENDS FOR THIN AND ULTRATHIN FILMS, TABLE 76 ASSIGNEES OF U.S. PATENTS RELATED TO THIN AND ULTRATHIN FILMS 205

14 LIST OF FIGURES FIGURE TITLE SUMMARY FIGURE GLOBAL MARKET FOR THIN FILM MATERIALS BY SEGMENT, ($ FIGURE 1 GLOBAL THIN FILM METHODS (EQUIPMENT, MATERIALS, SERVICES) MARKET SHARE BY GROUP OF TECHNOLOGIES, (%) FIGURE 2 GLOBAL THIN FILMS PATENT APPLICATIONS AND PATENTS, (NO. OF PATENTS) FIGURE 3 THIN FILM TYPES BASED ON FABRICATION PROCESS 38 FIGURE 4 TECHNOLOGICAL TRENDS IN THE THIN FILM INDUSTRY 105 FIGURE 5 GLOBAL MARKET FOR THIN FILM MATERIALS BY SEGMENT, ($ FIGURE 6 GLOBAL MARKET FOR THIN FILM MATERIALS, ($ 112 FIGURE 7 GLOBAL THIN FILM MATERIALS MARKET SHARE BY APPLICATION, (%) 114 FIGURE 8 GLOBAL THIN FILM MATERIALS MARKET SHARE BY DEPOSITION TECHNOLOGY, (%) FIGURE 9 GLOBAL THIN FILM MATERIALS MARKET SHARE BY FILM THICKNESS, (%) FIGURE 10 GLOBAL THIN FILM MATERIALS MARKET SHARE BY REGION, (%) 120 FIGURE 11 GLOBAL NANOTECHNOLOGY MARKET SHARE BY SEGMENT, (%) 142 FIGURE 12 GLOBALTHIN FILM MATERIALS MARKET SHARE BY APPLICATION, 2021 (%) 145 FIGURE 13 GLOBAL THIN FILM MATERIALS MARKET SHARE BY DEPOSITION TECHNOLOGY, 2021 (%) FIGURE 14 GLOBAL THIN FILM MATERIALS MARKET SHARE BY FILM THICKNESS, 2021 (%) FIGURE 15 GLOBAL THIN FILM MATERIALS MARKET SHARE BY REGION, 2021 (%) 151 FIGURE 16 U.S. PATENT TRENDS FOR THIN AND ULTRATHIN FILMS, (NUMBER OF PATENTS) FIGURE 17 PATENT SHARE OF THIN AND ULTRATHIN FILMS BY REGION (%) 203 FIGURE 18 PATENT SHARE OF THIN AND ULTRATHIN FILMS BY COUNTRY (%) 204 FIGURE 19 SHARES OF THIN AND ULTRATHIN FILMS PATENTS IN U.S. BY CATEGORY (%) FIGURE 20 SHARES OF THIN AND ULTRATHIN FILMS PATENTS IN U.S. BY DEPOSITION METHOD (%)

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