OPAL. SpotOptics. AUTOMATED WAVEFRONT SENSOR Single and double pass O P A L

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Margaret Little
5 years ago
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metrology of spherical and flat mirrors =0.

1 Spotptics The software people for optics UTMTED WVEFRNT SENSR Single and double pass ccurate metrology of standard and aspherical lenses ccurate metrology of spherical and flat mirrors =0.3 to =60 mm F/1 to F/15 ccurate motor for z-movement ccurate XY and tilt stages for easy centering of lenses

2 Measurement Technique Measurement software Measurement Capability (single pass) Measurement Capability (double pass) Wavelength Mounting Computer Software Motorized xis ength Measurement Resolution of stepper motor Repeatability of home position Measurement range ength measurement uncertainty Speed Control software Size Weight Technical Specifications Shack-Hartmann wavefront sensor Sensoft Wavefronts of small lenses and optical systems in transmission Measurement of reflecting surfaces White light or any wavelength of choice using a filter Vertical User supplied standard C. n request, Spotptics can supply it Control and analysis software Sensoft for Windows 8/ Windows 10 TW MTRIZED STGES Vertical z-axis Stepper motor with integrated magnetic encoder 0.02μm (for a screw with pitch of 1mm) 0.8μm 300mm 8μm Maximum 50 mm/sec Integrated with analysis software Sensoft DIMENSINS ( x H x D) 600 x 370 x 320 mm (approx) approx. 20 kg CCURCY (all values at 632.8nm) Zernike coefficient repeatability λ/300 Measurement Uncertainty λ/20 2

Measuring a spherical hemisphere E N T I N Method 1 It is important to note that a

of less than 0.68, which in double pass becomes 1.

37, covering an angle =21.7. See Table 1, row 1.

3 Measuring a spherical hemisphere E N T I N Method 1 It is important to note that a high-quality sphere is required to calibrate out the aberrations of the collimator and the MI system. For practical reasons, it is not possible to have a reference sphere that has an F/# of less than 0.68, which in double pass becomes 1.36 (since the sphere is used at its radius of curvature). This corresponds to N=0.37, covering an angle =21.7. See Table 1, row 1. Method 2 pal can also be calibrated in single pass using a pinhole light source supplied with the instrument. In this case, the limit to the angle that can be tested is set by the N of the collimator (i.e. =64.1 ). See Table 1, row 2. 3

4 lpha (degrees) N of collimator No. N Collimator F/# ngle covered (deg) Focal length (mm) Working distance (mm) Diameter of output beam (mm) Number of spots x x18

SENSFT: THE SFTWRE Sensoft: The modular software package: - Fully controls the hardware of entino - erforms the Shack-Hartmann (SH) analysis 5 - Computes Zernike

production line: - pal with its own C - can easily be adapted to the production line - It can work in a closed-loop with the C of the manufacturing machine - software

5 SENSFT: THE SFTWRE Sensoft: The modular software package: - Fully controls the hardware of entino - erforms the Shack-Hartmann (SH) analysis 5 - Computes Zernike coefficients, diagnostics (alignment and correct focal plane), wavefront, MTF, spot diagram - Has a oop mode for on-line adjustment of optical system pal in your production line: - pal with its own C - can easily be adapted to the production line - It can work in a closed-loop with the C of the manufacturing machine - software module defines the communication protocol and transfers the results between the Cs - dditional package for remote setup of pal and communication of output results over the ocal rea Network

6 N-INE IGNMENT F CMEX TIC SYSTEM IN FST 6 - The alignment of complex optical systems becomes easy by monitoring coma and astigmatism in a continuous loop - The individual (x, y) components of coma and astigmatism, as well as the total coefficients are displayed - The optimization can be done for one component at a time, as the software can display one component of interest - ptimal alignment is reached when the coma and astigmatism components converge towards a given tolerance

7 MTF MESUREMENTS 7 MTF after subtracting the contributions of tilt and defocus present in the data

8 The instrument with beam expander arge format CCD camera. ther cameras available 8 Small beam expander no. 1 (motorized) Beam expander lens no. 2 (motorized). Up to =58mm

9 9 - Shack-Hartmann wavefront sensor for use in production line and laboratory - Insensitive to vibrations - Modular design allows measurement on a variety of surfaces (flat and spherical components) - Can be used in double pass or single pass, giving flexibility - enses can be tested in transmission using parallel light or pinhole - bsolute and relative radius of curvature measurements as well as focal length - utomated measurement - High-resolution integrated encoder in stepper motor - Built-in autocollimator for ensuring that the lens mounting is parallel to the axis of MI

SpotOptics. The software people for optics OPAL O P A L

SpotOptics. The software people for optics OPAL O P A L Spotptics The software people for optics UTMTED WVEFRNT SENSR ccurate metrology of standard and aspherical lenses (single pass) ccurate metrology of spherical and flat mirrors (double pass) =0.3 to =50