A Study on the Micro Tool Fabrication using Electrolytic In-process Dressing

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1 A Study on the Micro Tool Fabrication using Electrolytic In-process Dressing Hyunwoo Lee 1, Jaeyoung Choi 1, Haedo Jeong 1 Seokwoo Lee 2, Honzong Choi 2 1 Department of Precision Mechanical Engineering, Pusan National University San 30, Changjeon-Dong, Kumjeong-Ku, Pusan, , Korea 2 Korea Institute of Industrial Technology 35-3, Hongchon-Ri, Ibjang-Myum, Chonan, Korea Abstract. In this study, micro tools(wc) to produce micro-structures and parts, were fabricateded on a cylindrical grinding machine using ELID(Electrolytic In-process Dressing) technique. The shape of the micro-carbide tool was circle, square, corn, rounded square, rectangular and ellipse. The size of the micro-carbide tool was measured less than 100µm respectively and minimum 3µm by SEM(Scanning Electron Microscope). Surface roughness was measured Ra 55nm-94nm by AFM(Atomic Force Microscope). Furthermore, We have studied on the characteristics of micro-drilling by the micro-carbide tools. We have also compared normal micro-machining with ultrasonic micro machining using a vibration table. It was confirmed that the micro-carbide tool fabricated by ELID grinding, can be broadly used in a variety of micro-machining field. Keywords: Micro Tool(WC), ELID(Electrolytic In-process Dressing), Micro Drilling, Ultrasonic. 1. Introduction With increased demand for micro and precision parts, micro mechanical fabrication methods like cutting and grinding are considered more important than before, because they are methods by which the products of the 3D complicated form and of materials having various physical and mechanical properties can be machined efficiently and accurately. Concerning tool materials, single crystalline diamond and cemented carbide have been applied to machining of micro structures and parts. To make these hard brittle micro tools, EDM and grinding have been used. Although in the former method machining force is negligibly small, it is not so efficient and leaves electric discharge marks on work surface. On the other hand, in making micro tools by grinding it is necessary to reduce the grinding forces. Also, according as down sizing of micro tools, the tool easily breaks away on machining or results in poor dimensional accuracy. Surface cracks or scratches are also one of the reasons why micro tools are easily broken down.[1] The purpose of this study is to examine micro tools with less than 100µm tips, by applying ELID grinding method to reduce the grinding force and scratches on tool surface. Another goal is to evaluate the characteristics of micro-drilling on Si wafer using the developed micro-carbide tool. To improve the workability, ultrasonic vibration was introduced and compared to general micro-machining. 2. The mechanism of ELID process Fig.1 shows the flow chart of the ELID process. After truing, the wheel surface has a flat face (Fig.1!). A pre-dressing process using the electrolytic dressing is required to maintain the protrusion of the diamond abrasive on the wheel surface (Fig.1"). Since insulation is formed on the wheel surface during the electrolytic dressing as a result of hydration or oxidation of the bonded

2 material, the electrolytic effect is gradually reduced and finally stabilized (Fig.1#). Excessive electrolysis is prevented by the above mentioned formation of the insulating layer and thus the pre-dressing stage ends. After grinding with the pre-dressed wheel begins, the grains are worn and the insulating layer on the wheel surface is removed (Fig.1$,%).[2-4] 1 After Truing 2 Dressing started 3 Dressing completed Flat face 2+ Fe ions Protruding grain (Hydroxide, oxide) Insulating layer 5 Process stabilized 4 Process started Worn Oxide layer removed Contacted Fig.1 ELID grinding flow chart Scraped oxide Chip 3. Experimental method 3.1 Experimental system Fig.2 shows the cylindrical grinding machine with the ELID system. Fig.3 shows the process flow chart. The grinding machine has three axes: X, Y and Z. All linear axes are supported by a rolling contact bearing a cross a roller guide, and are driven by a step motor. The accuracy of X, Y and Z axes positioning is 0.25µm (semiclosed-loop control is used). The positioning step of the X, Y, Z axes is within 0.5µm. The main spindle is driven with a brushless motor for better rigidity. The maximum speed of the main spindle is 40,000rpm. The ultrasonic vibration table was installed for ultrasonic machining. The frequency and amplitude were 20kHz and 5µm, respectively. A PC-based NC unit was used for the control of the linear axes movement. Fig. 2 Grinding machine chart

3 Fig.3 Process flow chart 3.2 Experimental method and machining condition Before grinding, the grinding wheel must be trued and electrically pre-dressed. Fig.4 shows the ELID grinding system and the change of current and voltage during the pre-dressing of a wheel. The grinding wheel becomes a positive pole, and the truing wheel becomes a negative electrode. Mist-type grinding fluid is supplied for cooling. The graph showed that the current sharply decreases after 30 seconds, whereas the voltage goes up. After 160 seconds, both the current and the voltage become constant. These changes are due to the oxidized layers being formed during the dressing time. Table 1 shows the experimental conditions Wheel speed:20000rpm Ip:0.5, Voltage:90V 0.25 Current Voltage Current(A) Voltage(V) Time(s) (a) ELID Grinding System (b) Electrical characteristics Fig.4 Truing and Dressing process in ELID system Table 1 Experimental conditions Raw material Cemented carbide (200µm) Grinding wheel #2000 Cutting depth 1µm Rotation speed 20000rpm Grinding fluid Solution type (50:1)

4 4. Experimental results 4.1 The machining experiments on the micro tool Fig.5 shows an overview of differently shaped micro tools. The dimension of the tool was measured using SEM. The measurement results show good shape accuracy with high straightness and high dimensional accuracy. Also, we have measured surface roughness using an AFM. The measurement results show the surface roughness of 55nm-94nm. Therefore, the ELID grinding method was confirmed to reduce the grinding force and the scratching of the tool surface. Fig.6 shows surface roughness of the micro tool. Fig. 5 SEM pictures of differently shaped micro tools Fig.6 AFM measurement results of surface roughness of micro tool

5 Fig.7 shows a view of a conically-shaped micro tool. The measurement shows that the endpoint of the micro tool is 3µm wide. This is because of the worn corner of the grinding wheel. The corner of wheel was not absolutely vertical. Because it has a slope, this section was used. Fig.8 shows micro-structures fabricated by different processing methods on the desk top cylindrical grinding machine. The measurement shows that the endpoint of micro-structure is 50 50µm. Fig.7 SEM picture of a cone micro tool Fig.8 SEM picture of the manufactured micro structures 4.2 The machining experiments on micro drilling We applied the micro tool to the micro drilling of the brittle material. When the micro tool goes down to Si substrate, machining characteristics are compared for the normal machining and the ultrasonic micro machining using the vibration table. Fig.9 shows a view of the micro tool applied to micro drilling. Table 2 also shows the micro drilling test conditions. Fig.10 shows the result of micro drilling on the Si substrate. The Si substrate is a representative hard brittle material. So the result of pure mechanical micro drilling shows that silicon is difficult-to-drill. Finally, the tool was broken in drilling. But by adding of ultrasonic vibration, the hole was clearly removed with high roundness without chipping.[5] Fig.9 SEM picture of micro tool applied to micro drilling

6 Table 2 Drilling Test Conditions Micro tool Square (W: 80µm, H: 80µm) Rotation speed 20000rpm Feed rate 10µm/s Dwell time 500µs Drilling depth 250µm Workpiece Si wafer Cutting fluid Water Vibration table Frequency (20kHz), Amplitude (5µm) 5. Conclusion (a) Conventional micro drilling (b) Ultra sonic micro pattern machining Fig.10 Compare conventional with ultrasonic machining in micro drilling(si substrate) In this study, we have made a number of differently shaped micro tools and micro-structures using cylindrical grinding with ELID. The surface roughness was Ra 55nm ~ 94nm by AFM measurement. The ELID is thought to reduce the grinding force and the surface roughness. Next, the micro tool was used for micro-drilling. In micro-drilling, ultrasonic vibration improved the form accuracy on the hard brittle Si substrate. The results confirmed that the micro tool fabricated by ELID grinding could be used for micro machining field. References [1] H.Onikura,O.Ohnishi,Y.Take, On Annals of the CIRP Vol.49,(2000)p.257 [2] Masuzawa T, Fujino M., Kobayashi, K, On Annals of the CIRP, Vol.34/1, (1985), p431. [3] Yeo, S. H, Balon, S. A. P, On Proc. of the EuSpen, (1999), p155 [4] H.Ohmori, T.Nakagawa, On Annals of the CIRP, Vol. 39, ( 1990),p329 [5] Bong Gu Lee, Heon Zong Choi, On Spring Conference of KSPE, pp , 2002

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