Q-Motion Miniature Linear Stage
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1 Q-Motion Miniature Stage Smallest linear stage with position control, high resolution and affordable price Q-521 Only 21 mm wide and 10 mm high Direct position measurement with integrated incremental, up to 1 nm resolution (optional) Up to 1 nm resolution Up to 2 nm minimum incremental motion Multi-axis system setups with adapter plate or bracket (available as an option) Velocity 10 mm/s Suitable for vacuum to 10-6 hpa, versions to 10-9 hpa available Precision-class micropositioning stage Q-Motion stages are distinguished by their extremely small design and high position resolution in the nanometer. The piezomotor drive principle and the electrical operation are inexpensive and can be customized. PIShift piezo s Self-locking when at rest, therefore no heat generation and no servo jitter. Velocity to 10 mm/s. 1 N push/pull force. Direct-measuring principle Versions with noncontact optical linear available. Resolution 4 nm or 1 nm, depending on the version. Versions with feature a reference point switch. Vacuum and nonmagnetic environments All Q-Motion stages are suitable for operation in high vacuum to 10-6h hpa. Furthermore, ultrahigh vacuum variants for 10-9 hpa are also available. Nonmagnetic versions are available on request. Fields of application Industry and research, metrology, microscopy, micromanipulation, biotechnology, and automation.
2 Specifications Motion and positioning Q mm travel, resolution 4 nm Q / 12 mm travel, resolution 1 nm, UHV version Q mm travel, resolution 4 nm Q / Q-521.U 22 mm travel, resolution 1 nm, UHV version Q-521.U Q mm travel, resolution 4 nm Q / 32 mm travel, resolution 1 nm, UHV version Active axis X X X X X X X Q-521.x00 / Q- 521.x0U 12 mm to 32 mm travel, open loop, UHV versions Q-521.x0U Unit Travel to 32 mm Integrated sensor Sensor resolution nm Minimum incremental motion Unidirectional entire travel Bidirectional entire travel Unidirectional 100 µm travel Bidirectional 100 µm travel Pitch / yaw over entire travel Pitch / yaw over 100 µm travel Maximum velocity* Mechanical properties nm nm nm nm µrad µrad Load capacity N Length to 42.2 mm Width mm Height mm Drive properties Motor type - Push / pull force N Holding force, power off Miscellaneous Operating temperature N 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 C mm/ s
3 Q Q / Q Q / Q-521.U Q Q / Q-521.x00 / Q- 521.x0U Material stainless steel stainless steel stainless steel stainless steel stainless steel stainless steel stainless steel Unit Cable length m Connector Sub-D Sub-D Sub-D Sub-D Sub-D Sub-D Sub-D Mass incl. cable and connector Mass without cable and connector Recommended controller 110 Q : 110 : 66 Q : : Q-521.0: 126 Q-521.U: 78 Q-521.0: Q-521.U: Q : 135 : 92 Q : 48 : 48 E-871, E-873 E-871, E-873 E-871, E-873 E-871, E-873 E-871, E-873 E-871, E-873 E-870 Q : 110 Q : 126 Q : 135 Q U: 66 Q U: 78 Q U: 92 Q : Q : 34 Q : 48 Q U: Q U: 34 Q U: 48 g g * Typical velocity at a control frequency of 20 khz
4 Drawings and Images Q-521.1xx, Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
5 Q-521.2xx, Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
6 Q-521.3xx, Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
7 Ordering Information Q Q-Motion miniature linear stage, 12 mm travel, without position sensor for open-loop operation, 1 N push/pull force, dimensions mm (W L H), piezoelectric, vacuum compatible to 10-6 hpa Q Q-Motion miniature linear stage, 12 mm travel, linear, 4 nm resolution, 1 N push/pull force, dimensions mm (W L H), piezoelectric, vacuum compatible to 10-6 hpa Q Q-Motion miniature linear stage, 12 mm travel, linear, 1 nm resolution, 1 N push/pull force, dimensions mm (W L H), piezoelectric, vacuum compatible to 10-6 hpa Q-Motion miniature linear stage, 12 mm travel, linear, 1 nm resolution, 1 N push/pull force, dimensions mm (W L H), piezoelectric, vacuum compatible to 10-9 hpa Q Q-Motion miniature linear stage, 22 mm travel, without position sensor for open-loop operation, 1 N push/pull force, dimensions mm (W L H), piezoelectric, vacuum compatible to 10-6 hpa Q Q-Motion miniature linear stage, 22 mm travel, linear, 4 nm resolution, 1 N push/pull force, dimensions mm (W L H), piezoelectric, vacuum compatible to 10-6 hpa Q Q-Motion miniature linear stage, 22 mm travel, linear, 1 nm position resolution, 1 N push/pull force, dimensions mm (W L H), piezoelectric, vacuum compatible to 10-6 hpa Q-521.U Q-Motion miniature linear stage, 22 mm travel, linear, 1 nm position resolution, 1 N push/pull force, dimensions mm (W L H), piezoelectric, vacuum compatible to 10-9 hpa Q Q-Motion miniature linear stage, 32 mm travel, without position sensor for open-loop operation, 1 N push/pull force, dimensions mm (W L H), piezoelectric, vacuum compatible to 10-6 hpa Q Q-Motion miniature linear stage, 32 mm travel, linear, 4 nm resolution, 1 N push/pull force, dimensions mm (W L H), piezoelectric, vacuum compatible to 10-6 hpa Q Q-Motion miniature linear stage, 32 mm travel, linear, 1 nm position resolution, 1 N push/pull force, dimensions mm (W L H), piezoelectric, vacuum compatible to 10-6 hpa Q-Motion miniature linear stage, 32 mm travel, linear, 1 nm position resolution, 1 N push/pull force, dimensions mm (W L H), piezoelectric, vacuum compatible to 10-9 hpa Ask about custom designs!
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