Q-Motion Miniature Linear Stage
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1 Q-Motion Miniature Stage Piezo Motors for Small Dimensions, High Resolution, and a Favorable Price Q-522 Only 22 mm in width and 10 mm in height Direct position measurement with incremental with up to 1 nm resolution Minimum incremental motion up to 2 nm XY mounting without adapter Q-622 rotation stage mountable without adapter Suitable for vacuum to 10-6 hpa, versions to 10-9 hpa available Piezo s are space-saving and affordable piezo-based drives with relatively high holding forces and a virtually unlimited travel. The principle is based on a single piezoelectric actuator that is controlled with a modified sawtooth voltage provided by special driver electronics. The actuator expands slowly and moves the runner. Due to its inertia, the runner is unable to follow the subsequent fast contraction of the actuator and remains at its position. With an operating frequency of up to 20 khz, the drives acting directly on the runner and achieve velocities of max. 10 mm/s. Direct-measuring principle Versions with noncontact optical linear available. Resolution 4 nm or 1 nm, depending on the version. Versions with have a reference point switch Vacuum and nonmagnetic environments All Q-Motion linear stages are suitable for operation in high vacuum to 10-6 hpa. Furthermore, ultrahigh vacuum variants are also available for 10-9 hpa. Nonmagnetic versions are available on request Application fields Microassembly, Photonics, Optical alignment, Microscopy, Beamline instrumentation, Semiconductor technology, Testing
2 Specifications Motion and positioning Q mm travel, resolution 4 nm Q / 6.5 mm travel, resolution 1 nm, UHV version Q mm travel, resolution 4 nm Q / 13 mm travel, resolution 1 nm, UHV version Q mm travel, resolution 4 nm Q / 26 mm travel, resolution 1 nm, UHV version Active axis X X X X X X X Q-522.x00 / Q-522.x0U 6.5 mm to 26 mm travel, open loop, UHV versions Q- 522.x0U Unit Travel to 26 mm Integrated sensor Sensor resolution nm Minimum incremental motion Unidirectional repeatability over entire travel Bidirectional repeatability over entire travel Unidirectional repeatability over 100 µm travel Bidirectional repeatability over 100 µm travel Pitch / yaw over entire travel Pitch / yaw over 100 µm travel Maximum velocity* nm nm nm nm µrad µrad mm/s - Mechanical properties Q Q / Q Q / Q Q / Q-522.x00 / Q-522.x0U Unit Load capacity N Push/pull force N Length to 42 mm Width mm Height mm Drive properties Motor type Q Q / Q Q / Q Q / Q-522.x00 / Q-522.x0U Unit
3 Miscellaneous Operating temperature Material Mass, including cabling Q Q / Q Q / Q Q / Q-522.x00 / Q-522.x0U 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 C to 88 g Cable length m Connector Sub-D Sub-D Sub-D Sub-D Sub-D Sub-D Sub-D Recommended controller E-871, E-873 E-871, E-873 E-871, E-873 E-871, E-873 E-871, E-873 E-871, E-873 E-872 Unit * Typical velocity at a control frequency of 20 khz For operation in a vacuum, we recommend a reduced duty cycle of 20% and a maximum motor push/pull force of 30% compared to a standard environment. The intrinsic mass of the slider plate must be considered accordingly.
4 Drawings / Images Q-522,000, dimensions in mm
5 Q-522,040, dimensions in mm
6 Q-522,100, dimensions in mm
7 Q-522,140, dimensions in mm
8 Q-522,200, dimensions in mm
9 Q-522,240, dimensions in mm Ordering Information Q Q-Motion Miniature linear stage, piezoelectric, 6.5 mm travel, without position sensor for open-loop operation, 1 N push/pull force, dimensions mm (W L H), vacuum compatible to 10-6 hpa Q U Q-Motion Miniature linear stage, piezoelectric, 6.5 mm travel, without position sensor for open-loop operation, 1 N push/pull force, dimensions mm (W L H), vacuum compatible to 10-9 hpa
10 Q Q-Motion Miniature linear stage, piezoelectric, 6.5 mm travel,, 4 nm resolution, 1 N push/pull force, dimensions mm (W L H), vacuum compatible to 10-6 hpa Q Q-Motion Miniature linear stage, piezoelectric, 6.5 mm travel,, 1 nm resolution, 1 N push/pull force, dimensions mm (W L H), vacuum compatible to 10-6 hpa Q-Motion Miniature linear stage, piezoelectric, 6.5 mm travel,, 1 nm resolution, 1 N push/pull force, dimensions mm (W L H), vacuum compatible to 10-9 hpa Q Q-Motion Miniature linear stage, piezoelectric, 13 mm travel, without position sensor for open-loop operation, 1 N push/pull force, dimensions mm (W L H), vacuum compatible to 10-6 hpa Q U Q-Motion Miniature linear stage, piezoelectric, 13 mm travel, without position sensor for open-loop operation, 1 N push/pull force, dimensions mm (W L H), vacuum compatible to 10-9 hpa Q Q-Motion Miniature linear stage, piezoelectric, 13 mm travel,, 4 nm resolution, 1 N push/pull force, dimensions mm (W L H), vacuum compatible to 10-6 hpa Q Q-Motion Miniature linear stage, piezoelectric, 13 mm travel,, 1 nm resolution, 1 N push/pull force, dimensions mm (W L H), vacuum compatible to 10-6 hpa Q-Motion Miniature linear stage, piezoelectric, 13 mm travel,, 1 nm resolution, 1 N push/pull force, dimensions mm (W L H), vacuum compatible to 10-9 hpa Q Q-Motion Miniature linear stage, piezoelectric, 26 mm travel, without position sensor for open-loop operation, 1 N push/pull force, dimensions mm (W L H), vacuum compatible to 10-6 hpa Q U Q-Motion Miniature linear stage, piezoelectric, 26 mm travel, without position sensor for open-loop operation, 1 N push/pull force, dimensions mm (W L H), vacuum compatible to 10-9 hpa Q Q-Motion Miniature linear stage, piezoelectric, 26 mm travel,, 4 nm resolution, 1 N push/pull force, dimensions mm (W L H), vacuum compatible to 10-6 hpa Q Q-Motion Miniature linear stage, piezoelectric, 26 mm travel,, 1 nm resolution, 1 N push/pull force, dimensions mm (W L H), vacuum compatible to 10-6 hpa Q-Motion Miniature linear stage, piezoelectric, 26 mm travel,, 1 nm resolution, 1 N push/pull force, dimensions mm (W L H), vacuum compatible to 10-9 hpa
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