Optics and photonics Preparation of drawings for optical elements and systems. Part 5: Surface form tolerances
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1 Provläsningsexemplar / Preview INTERNATIONAL STANDARD ISO Third edition Optics and photonics Preparation of drawings for optical elements and systems Part 5: Surface form tolerances Optique et photonique Indications sur les dessins pour éléments et systèmes optiques Partie 5: Tolérances de forme de surface Reference number ISO :2015(E) ISO 2015
2 ISO :2015(E) Provläsningsexemplar / Preview COPYRIGHT PROTECTED DOCUMENT ISO 2015, Published in Switzerland All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISO s member body in the country of the requester. ISO copyright office Ch. de Blandonnet 8 CP 401 CH-1214 Vernier, Geneva, Switzerland Tel Fax copyright@iso.org ii ISO 2015 All rights reserved
3 Provläsningsexemplar / Preview ISO :2015(E) Contents Page Foreword...iv Introduction...vi 1 Scope Normative references Terms and definitions Specification of tolerances for surface form deviation General Units Wavelength Indication in drawings General Structure of the indication based on code number General Code number Basic forms Additional forms Area Location Structure of the indication in tabular form Specification of deviations in sets of Zernike coefficients in tabular form Examples of tolerance indications Examples for indication based on code number Examples for indication based on a table Aspheric surface XY - polynomials described surface (Cartesian coordinates) ρφ-polynomials described surface (polar coordinates) Example for specification of deviations in sets of Zernike coefficients in tabular form...13 Annex A (informative) Relationship between power deviation tolerance and radius of curvature tolerance...15 Annex B (informative) Comparison of ISO and ISO corresponding nomenclature, functions, and values...16 Bibliography...20 ISO 2015 All rights reserved iii
4 ISO :2015(E) Provläsningsexemplar / Preview Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO member bodies). The work of preparing International Standards is normally carried out through ISO technical committees. Each member body interested in a subject for which a technical committee has been established has the right to be represented on that committee. International organizations, governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization. The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO documents should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC Directives, Part 2 (see Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any patent rights identified during the development of the document will be in the Introduction and/or on the ISO list of patent declarations received (see Any trade name used in this document is information given for the convenience of users and does not constitute an endorsement. For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment, as well as information about ISO s adherence to the WTO principles in the Technical Barriers to Trade (TBT) see the following URL: Foreword - Supplementary Information. The committee responsible for this document is ISO/TC 172, Optics and photonics, Subcommittee SC 1, Fundamental standards. This third edition cancels and replaces the second edition (ISO :2007), which has been technically revised with the following changes: a) nanometres have been introduced as the standard unit for specifying tolerances for certain types of surface form deviation replacing the former standard unit fringe spacings ; b) expansion of the scope now including surfaces of higher order such as aspheric, non-circular cylindric, and general surfaces; c) specification of deviations in tabular form has been added; d) a definition of sagitta deviation has been added; e) the name of quantity A has been changed to power deviation (reflecting the change in ISO ). For further details, see 5.2.3, NOTE 3; f) an informative Annex B has been added giving a comparison of ISO and ISO regarding corresponding nomenclature, functions, and values. ISO consists of the following parts, under the general title Optics and photonics Preparation of drawings for optical elements and systems: Part 1: General Part 2: Material imperfections Stress birefringence Part 3: Material imperfections Bubbles and inclusions Part 4: Material imperfections Inhomogeneity and striae Part 5: Surface form tolerances iv ISO 2015 All rights reserved
5 Provläsningsexemplar / Preview ISO :2015(E) Part 6: Centring tolerances Part 7: Surface imperfection tolerances Part 8: Surface texture; roughness and waviness Part 9: Surface treatment and coating Part 10: Table representing data of optical elements and cemented assemblies Part 11: Non-toleranced data Part 12: Aspheric surfaces Part 14: Wavefront deformation tolerance Part 17: Laser irradiation damage threshold Part 19: General description of surfaces and components ISO 2015 All rights reserved v
6 ISO :2015(E) Provläsningsexemplar / Preview Introduction This part of ISO refers to deviations in the form (shape) of an optical surface and provides a means of specifying tolerances for certain types of surface form deviation in terms of nanometres. As it is common practice to measure the surface form deviation interferometrically as the wavefront deformation caused by a single reflection from the optical surface at normal (90 to surface) incidence, it is possible to describe a single definition of interferometric data reduction that can be used in both cases, i.e. in surface form deviation as well as wavefront deformation. As the analysis of most measurements is software based, the deviations are expressed in nanometres. Interferometrical measurements, however, use the unit fringe spacings. One fringe spacing is equal to a surface form deviation that causes a deformation of the reflected wavefront of one wavelength. A value expressed in nanometres is an indication of the actual height deviation of the surface itself (and not that of the reflected wavefront). The surface under test, together with the test glass is, for example, such an interferometer. The surface form deviation is represented by the wavefront deformation which is the difference between the wavefront reflected by the actual surface and that reflected by the test glass surface. Due to the potential for confusion and misinterpretation, nanometres rather than fringe spacings are to be used. Where fringe spacings are used as units, the wavelength is also to be specified. In addition, tolerances for slope deviations of surfaces can be given in units of mrad, μrad, arcmin, or arcsec. vi ISO 2015 All rights reserved
7 Provläsningsexemplar / Preview INTERNATIONAL STANDARD ISO :2015(E) Optics and photonics Preparation of drawings for optical elements and systems Part 5: Surface form tolerances 1 Scope This International Standard specifies the presentation of design and functional requirements for optical elements and systems in technical drawings used for manufacturing and inspection. This part of ISO specifies rules for indicating the tolerance for surface form deviation. NOTE The terminology of interferometry employing the unit fringe spacings is widely used for the specification of tolerances. However, the usage of non-interferometric methods for testing of optical parts has recently become more important. Therefore, unlike in the earlier versions of this part of ISO 10110, nanometres shall now be the preferred and standard unit to express surface form deviations. The usage of fringe spacings is still permitted given that the base wavelength is explicitly stated. This part of ISO applies to surfaces of plano, spherical, aspheric, circular and non-circular cylindric, and toric form as well as to surfaces of other non-spherical shape such as generally described surfaces. It does not apply to diffractive surfaces, Fresnel surfaces, and micro-optical surfaces. 2 Normative references The following referenced documents, in whole or in part, are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO , Optics and photonics Preparation of drawings for optical elements and systems Part 1: General ISO , Optics and photonics Preparation of drawings for optical elements and systems Part 10: Table representing data of optical elements and cemented assemblies ISO , Optics and photonics Preparation of drawings for optical elements and systems Part 19: General description of surfaces and components ISO , Optics and photonics Interferometric measurement of optical elements and optical systems Part 4: Interpretation and evaluation of tolerances specified in ISO Terms and definitions For the purposes of this document, the terms and definitions given in ISO and the following apply. 3.1 surface form deviation function representing the distances normal to the surface between a nominal optical surface form and a measured form described as a measured wavefront deformation f WD or f WD,CY as defined in ISO Note 1 to entry: ISO provides the definitions for the deformation functions. ISO 2015 All rights reserved 1
8 ISO :2015(E) Provläsningsexemplar / Preview 3.2 sagitta deviation ΔZ function representing the distances along the z-axis between a nominal optical surface form and a measured form Note 1 to entry: Based on interferometric measurement, the values are available along the local surface normal and have to be converted to deviations in the z direction in order to compare them with ΔZ. Note 2 to entry: For simple optical surfaces, the z-axis is often also the optical axis. 4 Specification of tolerances for surface form deviation 4.1 General The tolerances for surface form deviation are indicated by specifying the maximum permissible values of the power deviation, irregularity, rotationally and/or translationally invariant irregularity. In addition, tolerances for root-mean-square (rms) measures of surface form deviation (rms total, rms irregularity, and rms rotationally and/or translationally varying wavefront irregularity) and tolerances for slope deviation (max and rms values) may be specified (see ISO for definitions). A surface form deviation based on a sagitta table can also be given in the z-direction and as irregularity as well as slope. Both the surface form tolerances and the tolerances of the slope deviations can vary in different sections and different orientations (x, y) or (ρ, φ). In this case, the sampling length and the spatial sampling interval can also deviate from each other. The surface form tolerance can also be defined as coefficients of a Zernike polynomial. NOTE 1 ISO provides a means of specifying only one single tolerance for the wavefront deformation without any need to specify tolerances for individual surfaces. NOTE 2 Methods for determining the amount of power deviation, irregularity, rotationally and/or translationally invariant irregularity, and slope deviation of a given surface are given in ISO Specifying a slope deviation tolerance or rms slope is recommended for non-spherical surfaces like aspheric, non-circular cylindric, or general surfaces. Depending on the application and complexity, the permissible max slope deviation might also be indicated as an absolute quantity in direction (x, y) or (ρ, φ). It is not necessary that tolerances are specified for all types of surface form deviation. All deviations of the surface but one is defined perpendicular to the theoretical surface. The sagitta deviation, ΔZ, is defined along the z-axis. 4.2 Units The maximum permissible values for power deviation, irregularity, and rotationally and/or translationally invariant irregularity shall be specified in units of nanometres or, if preferred, micrometers or fringe spacings. If a specification is to be given for one or more rms deviation types, it shall be given in units of nanometres or, if preferred, micrometers or fringe spacings. To avoid confusion, the unit wavelength of light should never be used for surface form deviations. When a surface is tested interferometrically by reflection at normal incidence, a surface form deviation of one-half the wavelength of light causes a wavefront deviation of one full wavelength. This results in an interference pattern in which the intensity varies from one bright fringe to the next or from one dark fringe to the next, i.e. one fringe spacing is visible. For the purpose of this part of ISO 10110, the words fringe spacings do not refer to the transverse distance between fringes, but to the fact that the 2 ISO 2015 All rights reserved
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