Are innovative sensor concepts included in the funding programmes of the EU and Germany? Dr. Bernhard Ruf, VDI/VDE-IT

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1 Are innovative sensor concepts included in the funding programmes of the EU and Germany? Dr. Bernhard Ruf, VDI/VDE-IT

2 VDI/VDE IT: Who we are? Company Employees: ca. 270 Turnover (2012): 24,8 Mio. Share holder VDI GmbH (50%) VDE (50%) Executive directors Dipl.-Kaufm. Peter Dortans Dr. rer. Nat. Werner Wilke Location Berlin (Headquarter) München Dresden

3 Outline More Moore, More than Moore and funding policy EU Funding: Horizon2020 EU Funding: ENIAC, ECSEL, CATRENE German funding Bavarian funding

4 ITRS 2012: Moore s Law and More Source: Synopsis (

5 More Moore : Technology nodes

6 More Moore: Technology trends One Driving Force: Moore s Law -> smaller structure sizes New Transistor Technologies (FinFET, FDSOI) EUV-Lithography 450 mm Wafer -> Generally accepted roadmap: ITRS

7 Growth drivers More Moore More than Moore Source: CATRENE Report: Towards a More-than-Moore Roadmap, Nov. 2011

8 Trends for More than Moore MEMS Law * One Product = One Process No ITRS Roadmap for MEMS *Source: CATRENE Report: Towards a More-than-Moore Roadmap, Nov. 2011

9 More than Moore: ITRS Roadmap Suggestion 2012 System view

10 More than Moore : System view Embedded Systems, Cyber Physical Systems, Smart Systems, Smart Systems Integration, Industrie 4.0, Internet of things System view is essential for MEMS technology development and also for funding

11 EU Funding: Horizon 2020 Quelle:

12 Horizon 2020: Excellent Science 'Excellent Science' (24.6 bn ): European Research Council (13.2 bn ) Future and Emerging Technologies (FET) (3.1 bn ) Marie Sklodowska-Curie-measures (5.8 bn ) European Research Infrastructures (2.4 bn )

13 Horizon 2020: Societal Challenges Societal challenges' (31.7 bn ): Health, demographic change and well-being (8.0 bn ) Food security, sustainable agriculture, marine and maritime research and the bio-economy (4.2 bn ) Secure, clean and efficient energy (5.8 bn ) Smart, green and integrated transport (6.8 bn ) Climate action, environment, resource efficiency and raw materials (3.2 bn ) Inclusive, innovative, reflective and secure societies (3.8 bn )

14 Horizon 2020: Industrial Leadership Industrial Leadership' (17.9 bn ): Enabling and Industrial Technologies (13.8 bn ) - ICT: i.e. Cyber Physical Systems, Robotics, Smart system integration,.., KET: Micro- und Nanoelectronics, Photonics - Nanotechnologies - Advanced materials - Biotechnology (Biotechnologie) - Advanced manufacturing and processing - Space Access to risk finance (3.5 bn ) Innovation in KMU (619 m )

15 Horizon 2020: presence of ICT Source:

16 Horizon 2020 work programme 2014/2015: ICT 37 topics are identified (ICT1-ICT37) MEMS related topics: A new generation of component and systems ICT : Smart cyber physical systems ICT : Smart system integration Micro- and nano-electronics and photonics ICT : Generic micro- and nano-electronics technologies ICT : Photonics KET ICT : Photonics KET ICT : Cross-cutting ICT KETs Deadline for ICT1, ICT2 and ICT 26:

17 EU Funding: ENIAC and ECSEL From 2014 on ECSEL combines former ENIAC and ARTEMIS ENIAC: micro- and nano-electronics ARTEMIS: embedded systems, cyber physical systems Estimated total budget ( ): ~ 4.8 bn (100%) 25 % member states, 25 % EU, 50 % from industry First call expected mid 2014

18 EU (Funding): CATRENE CATRENE (Cluster for Application and Technology Research in Europe on NanoElectronics) CATRENE is continued until 2015 National funding for EU projects; no direct funding from EU Current call 7: Nanoelectronics for smart cities and Enabling Technologies Deadline for PO:

19 German Funding: High Tech Strategy 2020

20 German Funding of MEMS related topics Elektroniksysteme; Elektromobilität : Micro- and Nano-Electronic, Chip design, Power electronics, 3D- Integration, Electro mobility EU-Projects within ECSEL (ENIAC) and CATRENE No current call Last call (InPro3D) on heterogeneous 3D integration for industry 4.0 application KMU-Innovativ : No dedicated calls; Funding programme for SME; proposals are possible at any time

21 Bavarian Funding Mikrosystemtechnik Bayern : Sensors, MEMS, Micro- and nano-electronic, Systemintegration, Embedded Systems, no dedicated calls, proposals are possible at any time

22 Summary System and application view is essential for a technology roadmap for MEMS System and application view is essential for funding of MEMS related projects Many funding opportunities on EU and national level if this aspect is taken into account

23 Thank you for your attention!