LED technology: MOCVD for SSL. Challenges & Solutions
|
|
- Shon Oliver
- 5 years ago
- Views:
Transcription
1 SEMICON Europe 2009 Emerging Markets LED technology: MOCVD for SSL Challenges & Solutions Dr. Frank Schulte AIXTRON AG
2 Outline The LED market and its requirements Productivity and cost challenges Solutions provided by MOCVD Summary
3 Global Presence Global Customers Global Growth Markets AIXTRON - Revenue 2008: 270 Mio - Employees: ca. 650 AIXTRON Ltd. Cambridge, UK AIXTRON AB Lund, Sweden AIXTRON Korea Co. Ltd. Seoul, South Korea AIXTRON KK Tokyo, Japan AIXTRON Inc. Sunnyvale, CA, USA AIXTRON AG Aachen, Germany Headquarters AIXTRON Europe AIXTRON AG Shanghai, P.R.China AIXTRON Taiwan Co. Ltd.; Hsinchu Representation
4 AIXTRON s Business Positioning End Applications Display, Lighting, Signage, Data/Telecom, Storage, Mobile Appliance, Automotive DRAM, Flash, MIM Devices and layers LED, Solar, Laser, OLED High-k Dielectric, Gate Metal Markets Photonics / Opto(electronic) Electronics Deposition Technology MOCVD, OVPD CVD, AVD, ALD Material Markets Compound Semiconductor (incl. Organics) Silicon Semiconductor Key Competence Gas Phase Deposition Equipment
5 LEDs where do we stand today? Technology is proven huge volumes have been manufactured for mobile phones (key pad and display) Next boom just started: backlight units for large size LCD Notebook PC: penetration of LEDs > 50% by 2010 TV: very large quantities of LEDs will be required Challenges of automotive applications met (front light feasible) Straight forward way to SSL?
6 The way to SSL lm/w must go up $/lm must go down No need to worry look at Haitz law 1.E+04 1.E+03 1.E+02 Cost/Lumen Flux/Package 1.E+01 1.E+00 1.E-01 1.E-02 1.E-03-10x/Decade +20x/Decade But is this really going to happen? And how can this be achieved?
7 MOCVD Key Technolgy in LED Manufacturing lm/w must go up i.e. η int must go further up Reactor design must guarantee to grow highest crystal quality, new device structure at high yield Vertical LED structure entirely produced by MOCVD LED performance (brightness, Vf, ESD, ) critically depends on MOCVD $/lm going down MOCVD yield and troughput is key for cost efficient LED manufacturing
8 SSL LED manufacturing with MOCVD: productivity and cost analysis Cost per Wafer (area) High growth efficiency Reactor scaling Larger wafer size Cycle time Uptime Cost per Chip Device structure & design Chip design On wafer uniformity Wafer to wafer uniformity Run to run reproducibility Productivity/Efficiency Yield
9 Cost per Wafer (area) High growth efficiency Reactor scaling Larger wafer size Cycle time Uptime Cost per Chip Device structure & design Chip design On wafer uniformity Wafer to wafer uniformity Run to run reproducibility Productivity/Efficiency Yield
10 Reactor Scaling History: CCS Reactors 31x2 19x2 6x2 3x
11 Reactor Scaling History: GaN Planetary Reactors 42x2 24x2 11x2 6x
12 Cost per Wafer (area) High growth efficiency Reactor scaling Larger wafer size Cycle time Uptime Cost per Chip Device structure & design Chip design On wafer uniformity Wafer to wafer uniformity Run to run reproducibility Productivity/Efficiency Yield
13 Larger wafer size: GaN LEDs LED manufacturers moving to 4 4 Cost and throughput advantage
14 Larger wafer size: GaN LEDs MOCVD equipment is ready for % cost advantage Identical processes for 2 and 6 Substrate availability/prices?
15 On wafer wavelength distribution of a blue LED on 6 6 sapphire 1 nm std dev corresponding to 3 nm absolute wavelength 459 nm
16 Close Coupled Showerhead (CCS ) 300mm 200m/300mm: Silicon Industry standard GaN/Si process started sucessfully
17 Cost per Wafer (area) High growth efficiency Reactor scaling Larger wafer size Cycle time Uptime Cost per Chip Device structure & design Chip design On wafer uniformity Wafer to wafer uniformity Run to run reproducibility Productivity/Efficiency Yield
18 Cycle time improvement: AIX 2800G4-R with automatic wafer handling
19 Cost per Wafer (area) High growth efficiency Reactor scaling Larger wafer size Cycle time Uptime Cost per Chip Device structure & design Chip design On wafer uniformity Wafer to wafer uniformity Run to run reproducibility Productivity/Efficiency Yield
20 Wafer uniformity: CRIUS showerhead design Dual plenum shower head with 15,000 injectors Identical gas phase composition across the entire susceptor surface
21 Blue MQW Wavelength Uniformity (31x2 ) Wavelength Ave.: 456.7nm On-wafer std dev.: 0.9nm 470 W-to-W std dev. : 0.8nm Wavelength, nm A1 B1 B2 B3 B4 B5 B6 C1 C2 C3 C4 C5 C6 C7 C8 C9 C10 C11 C12 Wafer number D1 D2 D3 D4 D5 D6 D7 D8 D9 D10 D11 D STD, nm All data with 2mm edge exclusion
22 Wafer uniformity: AIX 2800 G4 HT Triple gas injector Stable and reproducible gas phase Fine tuning of uniformity
23 42x2 Fully Loaded Run λ (nm) λ σ Wafer 5,0 4,0 3,0 2,0 1,0 0,0 σ (nm) Total spread between all 42 wafers Average on-wafer uniformity σ = 1.9 nm σ = 1,2 nm
24 Cost per Wafer (area) High growth efficiency Reactor scaling Larger wafer size Cycle time Uptime Cost per Chip Device structure & design Chip design On wafer uniformity Wafer to wafer uniformity Run to run reproducibility Productivity/Efficiency Yield
25 Improved Yield and Reproducibility by In Situ Control Monitoring and control of surface temperature, film thickness, bowing and uniformity during growth Significant improvement of chip yield
26 In Situ Control: Monitoring of all Wafers simultaneously During Epi (e.g. 6x6 LED growth) Wafer 1 Wafer 2 Wafer 3 Wafer 4 Wafer 5 Wafer 6 Growth time
27 Summary HB-LEDs: advanced + mature technology ; having further challenges to guarantee outstanding perfomance UHB LED Significant progress in productivity and manufacturing cost foreseeable by larger substrates through more automation by yield improvement (uniformity, insitu, etc.) MOCVD is key technology SSL will turn into reality Progress in MOCVD technology will make sure that this happens
28
AIXTRON Investor Presentation. Excerpt of the IR Master Presentation 9M/2014 (FSE: AIXA, ISIN DE000A0WMPJ6, NASDAQ: AIXG, ISIN: US )
AIXTRON Investor Presentation Excerpt of the IR Master Presentation 9M/2014 (FSE: AIXA, ISIN DE000A0WMPJ6, NASDAQ: AIXG, ISIN: US0096061041) AIXTRON INVESTOR PRESENTATION 2 Forward-Looking Statements This
More informationAIXTRON Investor Presentation. IR Presentation 9M/2016 (FSE: AIXA, ISIN DE000A0WMPJ6; AIXC, ISIN DE000A2BPYT0; NASDAQ: AIXG, ISIN: US )
AIXTRON Investor Presentation IR Presentation 9M/2016 (FSE: AIXA, ISIN DE000A0WMPJ6; AIXC, ISIN DE000A2BPYT0; NASDAQ: AIXG, ISIN: US0096061041) AIXTRON Investor Relations, November 2016 Disclaimer 2 Additional
More informationAIXTRON Investor Presentation. IR Presentation FY 2016 (FSE: AIXA, ISIN DE000A0WMPJ6)
AIXTRON Investor Presentation IR Presentation FY 2016 (FSE: AIXA, ISIN DE000A0WMPJ6) AIXTRON Investor Relations, February 2017 Disclaimer 2 Forward-Looking Statements This document may contain forward-looking
More informationLITE /LAB /SCAN /INLINE:
Metis Metis LITE /LAB /SCAN/ INLINE Metis LITE /LAB /SCAN /INLINE: Spectral Offline and Inline Measuring System, using Integrating Sphere, for coatings on foils/web and on large size glasses To ensure
More informationAccelerating Growth and Cost Reduction in the PV Industry
Accelerating Growth and Cost Reduction in the PV Industry PV Technology Roadmaps and Industry Standards An Association s Approach Bettina Weiss / SEMI PV Group July 29, 2009 SEMI : The Global Association
More informationVolume 21 Issue IV News Review, News Analysis, Features, Research Review and much more.
Volume 21 Issue IV 2015 @compoundsemi www.compoundsemiconductor.net Exposing a fl aw in p-type GaN Making MOSFETs for motoring Veeco A brighter future for LEDs Shares: The good, bad and ugly Instant imaging
More informationSystem100Pro. Production tools for wafer processing. The Business of Science
System100Pro Production tools for wafer processing The Business of Science Process tools & modules Oxford Instruments' System100Pro production tools are built on 200 mm, 300 mm and multiwafer batch process
More informationUVISEL. Spectroscopic Phase Modulated Ellipsometer. The Ideal Tool for Thin Film and Material Characterization
UVISEL Spectroscopic Phase Modulated Ellipsometer The Ideal Tool for Thin Film and Material Characterization High Precision Research Spectroscopic Ellipsometer The UVISEL ellipsometer offers the best combination
More informationIon beam etch and deposition systems
Ion beam etch and deposition systems The Business of Science Ion beam systems Ion beam technology offers unique abilities in etch and deposition Oxford Instruments offers a single tool, allowing the flexibility
More informationInnovative Technologies for RF & Power Applications
Innovative Technologies for RF & Power Applications > Munich > Nov 14, 2017 1 Key Technologies Key Technologies Veeco Market Focus Advanced Packaging, MEMS & RF Lighting, Display & Power Electronics Lithography
More informationHermetic Packaging Solutions using Borosilicate Glass Thin Films. Lithoglas Hermetic Packaging Solutions using Borosilicate Glass Thin Films
Hermetic Packaging Solutions using Borosilicate Glass Thin Films 1 Company Profile Company founded in 2006 ISO 9001:2008 qualified since 2011 Headquarters and Production in Dresden, Germany Production
More informationLED Cost and Technology Trends: How to enable massive adoption in general lighting
LED Cost and Technology Trends: How to enable massive adoption in general lighting SEMICON West 2011 Moscone Center, San Francisco June 13 th 2011 Lumileds Lumileds OSRAM Aixtron CREE OSRAM OKI OSRAM 45
More informationSäntis 300 Full wafer cathodoluminescence control up to 300 mm diameter
Säntis 300 Full wafer cathodoluminescence control up to 300 mm diameter Overview The Säntis 300 system has been designed for fully automated control of 150, 200 and 300 mm wafers. Attolight s Quantitative
More informationDOMINANT. Opto Technologies Innovating Illumination. 250 InGaN White : NAW-HHG DATA SHEET : Primax TM. Features: Applications:
DATA SHEET : Primax TM 250 InGaN White : NAW-HHG Primax TM Synonymous with function and performance, enter the Primax, the new era of high intensity illumination in LED. With its high flux output and high
More informationSurface Mount Package SOT-363/SC70. Pin Connections and Package Marking. AHx
Agilent ABA-5153 3.5 GHz Broadband Silicon RFIC Amplifier Data Sheet Description Agilent s ABA-5153 is an economical, easy-to-use, internally 5-ohm matched silicon monolithic broadband amplifier that offers
More informationDOMINANT. Opto Technologies Innovating Illumination. 60 InGaN Warm White : NAF-BSG DATA SHEET : Primax TM. Features: Applications:
DATA SHEET : Primax TM 60 InGaN Warm White : NAF-BSG Primax TM Synonymous with function and performance, enter the Primax, the new era of high intensity illumination in LED. With its high flux output and
More informationSemiconductor Materials for Power Electronics (SEMPEL) GaN power electronics materials
Semiconductor Materials for Power Electronics (SEMPEL) GaN power electronics materials Kjeld Pedersen Department of Physics and Nanotechnology, AAU SEMPEL Semiconductor Materials for Power Electronics
More informationDOMINANT. Opto Technologies Innovating Illumination. 150 InGaN White : NAW-BHG DATA SHEET : Primax TM. Features: Applications:
DATA SHEET : Primax TM 150 InGaN White : NAW-BHG Primax TM Synonymous with function and performance, enter the Primax, the new era of high intensity illumination in LED. With its high flux output and high
More informationTR5050 LEDs CxxxTR5050-Sxx000
TR5050 LEDs CxxxTR5050-Sxx000 Data Sheet Cree s TR5050 LEDs are the next generation of solid-state LED emitters that combine highly efficient InGaN materials with Cree s proprietary device technology and
More informationDATA SHEET: GaP : DDx-GJS
DATA SHEET: DomiLED TM GaP : DDx-GJS DomiLED TM Synonymous with function and performance, the DomiLED TM series is perfectly suited for a variety of cross-industrial applications due to its small package
More informationA Perspective on Semiconductor Equipment. R. B. Herring March 4, 2004
A Perspective on Semiconductor Equipment R. B. Herring March 4, 2004 Outline Semiconductor Industry Overview of circuit fabrication Semiconductor Equipment Industry Some equipment business strategies Product
More informationGSM OPTICAL MONITORING FOR HIGH PRECISION THIN FILM DEPOSITION
OPTICAL MONITORING FOR HIGH PRECISION THIN FILM DEPOSITION OPTICAL MONITORING TECHNOLOGIES ENABLING OUR NEW WORLD! - ACHIEVING MORE DEMANDING THIN FILM SPECIFICATIONS - DRIVING DOWN UNIT COSTS THE GSM1101
More informationTriple i - The key to your success
Triple i - The key to your success The needs and challenges of today s world are becoming ever more demanding. Standards are constantly rising. Creativity, reliability and high performance are basic prerequisites
More informationDATA SHEET: InGaN White : DDW-LJG. With the intense colors that seem to glow with energy and its significant brightness, DomiLED TM
DATA SHEET: DomiLED TM InGaN White : DDW-LJG DomiLED TM With the intense colors that seem to glow with energy and its significant brightness, DomiLED TM white LED is a highly reliable design device. Its
More informationDOMINANT. DomiLED. Opto Technologies Innovating Illumination. InGaN Warm White : DDF-MJG DATA SHEET: DomiLED. Features: Applications:
DATA SHEET: DomiLED InGaN Warm White : DDF-MJG DomiLED With the intense colors that seem to glow with energy and its significant brightness, DomiLED white LED is a highly reliable design device. Its dynamic
More informationDisplay Materials and Components Report - Glass Slimming 2013
Display Materials and Components Report - Glass Slimming 2013 May 2013 Doo.Kim@ihs.com www.displaybank.com 1/130 No material contained in this report may be reproduced in whole or in part without the express
More informationDATA SHEET: GaN : DDx-JJx-I1
DATA SHEET: DomiLED TM DomiLED TM Synonymous with function and performance, the DomiLED TM series is perfectly suited for a variety of cross-industrial applications due to its small package outline, durability
More informationLED Video Displays White LEDs Automotive Dashboard Lighting Cellular Phone Backlighting Audio Product Display Lighting Single Wire Bond Structure
Features UltraBright LED Performance 3.8mW min (460nm) Deep Blue 3.4mW min () Blue 2.5mW min () Signal Green 1.7mW min (527nm) Green Sorted to Wavelength and Power Bins Applications LED Video Displays
More informationPierre Brondeau Vice President, Business Group Executive Electronic Materials Regional Director - Europe Lehman Brothers Conference Call November
Pierre Brondeau Vice President, Business Group Executive Electronic Materials Regional Director - Europe Lehman Brothers Conference Call November 2006 Forward Looking Statement The presentation today may
More information2018 Mini/ Micro LED
18 Mini/ Micro LED About Lextar Lextar Electronics Corp. is a global leader in LED solutions with a strategic advantage of integrating upper stream epitaxial, middle stream chip, downstream package and
More informationDATA SHEET : AlInGaP : NAx-SSG
DATA SHEET : Primax TM AlInGaP : NAx-SSG Primax TM Synonymous with function and performance, enter the Primax, the new era of high intensity illumination in LED. With its high flux output and high luminous
More informationMidaz Micro-Slab DPSS Lasers:
Midaz Micro-Slab DPSS Lasers: Higher power & pulse rate for higher speed micromachining Professor Mike Damzen Midaz Laser Ltd 4 June 2008 AILU Meeting Industrial opportunities in laser micro and nano processing
More informationCree TR5050M LEDs CxxxTR5050M-Sxx000
Cree TR55M LEDs CxxxTR55M-Sxx Data Sheet Cree s TR55M LEDs are the next generation of solid-state LED emitters that combine highly efficient InGaN materials with Cree s proprietary device technology and
More informationBRIDGELUX BLUE POWER DIE BXDA 40 mil x 40 mil
PRODUCT DATA SHEET DS-C28 The Bridgelux family of blue power die enables high performance and cost effective solutions to serve solid state lighting market. This next generation flip chip technology delivers
More information1B John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2
1A John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE 3450
More informationDATA SHEET: InGaN White : DNW-PJG
DATA SHEET: Mini DomiLED TM InGaN White : DNW-PJG Mini DomiLED TM With the intense colors that seem to glow with energy and its significant brightness, Mini DomiLED TM white LED is a highly reliable design
More informationVCSEL SENSOR FLAT WINDOW TO CAN
DATA SHEET VCSEL SENSOR FLAT WINDOW TO CAN SV3637-001 FEATURES: Designed for low drive currents between 7 and 15mA Flat Window TO-46 style package High speed 1 Ghz The SV3637 combines many of the desired
More informationDATASHEET: SpiceLED TM
DATASHEET: SpiceLED TM InGaN White S-Spice BLU : SSW-GLM SpiceLED TM Like spice, its diminutive size is a stark contrast to its standout performance in terms of brightness, durability and reliability.
More informationDATA SHEET: GaP : DDx-GRS
DATA SHEET: DomiLED TM DomiLED TM Synonymous with function and performance, the DomiLED TM series is perfectly suited for a variety of cross-industrial applications due to its small package outline, durability
More informationSpecification SFT825Z-S
Technical ZPower LED Data X10490 Sheet Specification SFT825ZS Drawn SSC Approval CUSTOMER Approval Document No. : SSCQP70724 (Rev.00) Technical ZPower LED Data X10490 Sheet CONTENTS 1. Feature & Application
More informationProperty right statement: Copyright of charts, tables and sentences in this report belongs to
The Vertical Portal for China Business Intelligence. Semiconductor Equipment Industry Report, 2009 Nov/2009 Property right statement: Copyright of charts, tables and sentences in this report belongs to
More informationWHITE LED STEP-UP CONVERTER General Description. Features. Applications
General Description The is an inductor-based DC/DC converter designed to drive up to six white LEDs in series for backlight. Only one feedback resistor is needed to control the LED current and obtain satisfied
More informationDATA SHEET: Bi-Color DKxx-NJS
DATA SHEET: Multi DomiLED TM Multi DomiLED TM Synonymous with function and performance, the Multi DomiLED TM series is perfectly suited for a variety of cross-industrial applications due to its small package
More informationDOMINANT. Opto Technologies Innovating Illumination. AlInGaP : DSx-NSS. DATA SHEET: Right Angle DomiLED TM. DomiLED TM. Features: Applications:
DATA SHEET: Right Angle DomiLED TM AlInGaP : DSx-NSS DomiLED TM Synonymous with function and performance, the DomiLED TM series is perfectly suited for a variety of cross-industrial applications due to
More informationLSI ON GLASS SUBSTRATES
LSI ON GLASS SUBSTRATES OUTLINE Introduction: Why System on Glass? MOSFET Technology Low-Temperature Poly-Si TFT Technology System-on-Glass Technology Issues Conclusion System on Glass CPU SRAM DRAM EEPROM
More informationDATA SHEET: RGB 250 : NMRTB-WSG
DATA SHEET: SPNovaLED TM RGB 250 : NMRTB-WSG SPNovaLED TM Featuring a staggering brilliance and significant flux output, the SPNovaLED showcases the latest technological advent in this range. With its
More informationMeasurement results of DIPIX pixel sensor developed in SOI technology
Measurement results of DIPIX pixel sensor developed in SOI technology Mohammed Imran Ahmed a,b, Yasuo Arai c, Marek Idzik a, Piotr Kapusta b, Toshinobu Miyoshi c, Micha l Turala b a AGH University of Science
More informationDATA SHEET : PrimaxPlus
DATA SHEET : PrimaxPlus 100 InGaN White : PQW-SSG Primax TM Synonymous with function and performance, enter the Primax, the new era of high intensity illumination in LED. With its high flux output and
More informationA Laser-Based Thin-Film Growth Monitor
TECHNOLOGY by Charles Taylor, Darryl Barlett, Eric Chason, and Jerry Floro A Laser-Based Thin-Film Growth Monitor The Multi-beam Optical Sensor (MOS) was developed jointly by k-space Associates (Ann Arbor,
More informationChemnitzer Seminar System Integration Technologies. Solder Jetting, Rework & electroless UBM Deposition
Chemnitzer Seminar System Integration Technologies June 14 15, 2016 Solder Jetting, Rework & electroless UBM Deposition Made in Germany PacTech Group - Milestones 1995 PacTech founded in Berlin, Germany
More informationCLUSTERLINE RAD VERSATILE DYNAMIC SPUTTER SYSTEM OPTOELECTRONICS, MEMS, PHOTONICS, WIRELESS
CLUSTERLINE RAD VERSATILE DYNAMIC SPUTTER SYSTEM OPTOELECTRONICS, MEMS, PHOTONICS, WIRELESS CLUSTERLINE RAD Enabling your roadmap in thin film deposition The combination of Evatec s process know-how and
More information1206 Reverse Package Super Red LED TSP3-QF3216A3. Features. Descriptions. Applications. Device Selection Guide
1206 Reverse Package Super Red LED 1206 Reverse Package Super Red LED Features Package in 8mm tape on 7 diameter reel Compatible with automatic placement equipment Compatible with infrared and vapor phase
More informationCompany Profile. Cool Laser Machining.
Company Profile Cool Laser Machining www.synova.ch Innovative Laser Machining Systems Synova is the pioneer of a revolutionary water jet guided laser technology providing state-of-the-art cutting and
More informationEE 232 Lightwave Devices. Course Information (1)
EE 232 Lightwave Devices Lecture 1: Introduction Instructor: Ming C. Wu University of California, Berkeley Electrical Engineering and Computer Sciences Dept. EE232 Lecture 1-1 Course Information (1) Website
More informationDATA SHEET: InGaN : DDT-TJS
DATA SHEET: DomiLED TM DomiLED TM Synonymous with function and performance, the DomiLED TM series is perfectly suited for a variety of cross-industrial applications due to its small package outline, durability
More informationDOMINANT. DomiLED. Opto Technologies Innovating Illumination. InGaN Warm White : DDF-WJG-2X5X-1 DATA SHEET : DomiLED. Features: Applications:
DATA SHEET : DomiLED InGaN Warm White : DomiLED With the intense colors that seem to glow with energy and its significant brightness, DomiLED white LED is a highly reliable design device. Its dynamic nature
More informationDATA SHEET: InGaN : DDx-xRx
DATA SHEET: DomiLED DomiLED Synonymous with function and performance, the DomiLED series is perfectly suited for a variety of cross-industrial applications due to its small package outline, durability
More informationMeRck. nlof 2000 Series. technical datasheet. Negative Tone Photoresists for Single Layer Lift-Off APPLICATION TYPICAL PROCESS
MeRck technical datasheet AZ Negative Tone Photoresists for Single Layer Lift-Off APPLICATION AZ i-line photoresists are engineered to simplify the historically complex image reversal and multilayer lift-off
More informationCree EZ290 Gen II LEDs Data Sheet CxxxEZ290-Sxx00-2
Data Sheet: CPR3EJ, Rev - Cree EZ290 Gen II LEDs Data Sheet CxxxEZ290-Sxx00-2 Cree s EZBright LEDs are the next generation of solid-state LED emitters that combine highly efficient InGaN materials with
More informationData Sheet. MGA GHz 3 V, 14 dbm Amplifier. Description. Features. Applications. Simplified Schematic
MGA-8153.1 GHz 3 V, 1 dbm Amplifier Data Sheet Description Avago s MGA-8153 is an economical, easy-to-use GaAs MMIC amplifier that offers excellent power and low noise figure for applications from.1 to
More information850NM SINGLE MODE VCSEL TO-46 PACKAGE
DATA SHEET 850NM SINGLE MODE VCSEL TO-46 PACKAGE HFE4093-332 FEATURES: Designed for drive currents between 1 and 5 ma Optimized for low dependence of electrical properties over temperature High speed 1
More informationCMP for More Than Moore
2009 Levitronix Conference on CMP Gerfried Zwicker Fraunhofer Institute for Silicon Technology ISIT Itzehoe, Germany gerfried.zwicker@isit.fraunhofer.de Contents Moore s Law and More Than Moore Comparison:
More informationAdvanced Packaging Solutions
Advanced Packaging Solutions by USHIO INC. USHIO s UX Series Providing Advanced Packaging Solutions Page 2 USHIO s UX Series Models Featured @ SEMICON West 2013 Page 2 Large-Size Interposer Stepper UX7-3Di
More informationGaN electronics: what can epitaxy enable
GaN electronics: what can epitaxy enable nmi meeting Integrating wide bandgap and high performance silicon semiconductors into systems Cranfield University: 22 nd Oct 2015 Trevor Martin FinstP, IQE Cardiff
More informationDOMINANT. Opto Technologies Innovating Illumination. AlInGaP S-Spice : SSx-NLD DATA SHEET: SpiceLED TM. Features: Applications:
DATA SHEET: SpiceLED TM SpiceLED TM Like spice, its diminutive size is a stark contrast to its standout performance in terms of brightness, durability and reliability. Despite being the smallest in size
More informationMulti SMD LED RGB FEATURES APPLICATIONS. WAVELENGTH (nm) at I F (ma)
Multi SMD LED RGB VLMRGB611.. DESCRIPTION The VLMRGB611.. is a high brightness tricolor LED designed primarily for interior automotive lighting, RGB displays and backlights. It is using the popular 358
More informationMEMS On-wafer Evaluation in Mass Production Testing At the Earliest Stage is the Key to Lowering Costs
MEMS On-wafer Evaluation in Mass Production Testing At the Earliest Stage is the Key to Lowering Costs Application Note Recently, various devices using MEMS technology such as pressure sensors, accelerometers,
More informationReview. Optical Lithography. LpR
www.led-professional.com ISSN 1993-890X Review The leading worldwide authority for LED & OLED lighting technology information May/June 2013 Issue 37 LpR Optical Lithography 2 New Optical Lithography Method
More informationCree EZ1000 Gen 2 LEDs Data Sheet (Cathode-up) CxxxEZ1000-Sxx000-2
Data Sheet: CPR3EC Rev. B Cree EZ1 Gen 2 LEDs Data Sheet (Cathode-up) CxxxEZ1-Sxx-2 Cree s EZBright LEDs are the next generation of solid-state LED emitters that combine highly efficient InGaN materials
More informationM J.A. Woollam Co., Inc. Ellipsometry Solutions
M-2000 J.A. Woollam Co., Inc. Ellipsometry Solutions Speed Discover the Difference Focused M-2000 The M-2000 line of spectroscopic ellipsometers is engineered to meet the diverse demands of thin film characterization.
More informationMGA GHz 3 V, 17 dbm Amplifier. Data Sheet. Features. Description. Applications. Surface Mount Package. Simplified Schematic
MGA-853.1 GHz 3 V, 17 dbm Amplifier Data Sheet Description Avago s MGA-853 is an economical, easy-to-use GaAs MMIC amplifier that offers excellent power and low noise figure for applications from.1 to
More informationDATA SHEET : PrimaxPlus
DATA SHEET : PrimaxPlus 150 InGaN White : Primax Synonymous with function and performance, enter the Primax, the new era of high intensity illumination in LED. With its high flux output and high luminous
More informationLithography in our Connected World
Lithography in our Connected World SEMI Austin Spring Forum TOP PAN P R INTING CO., LTD MATER IAL SOLUTIONS DIVISION Toppan Printing Co., LTD A Broad-Based Global Printing Company Foundation: January 17,
More informationSpecification. Technical Data Sheet X RoHS. July Document No. : SSC-QP (Rev.02)
Specification RoHS X42180-08 1 Technical Z-Power LED Data X10490 Sheet Description X42180-08 Z-Power series is designed for high current operation and high flux output applications. Z-Power LED's thermal
More informationDATASHEET SpiceLED RGB SNRTB-RLG
DATASHEET SpiceLED RGB SNRTB-RLG SpiceLED Like spice, its diminutive size is a stark contrast to its standout performance in terms of brightness, durability and reliability. Despite being the smallest
More informationPRELIMINARY DATA SHEET D6RTB-GJG
PRELIMINARY DATA SHEET Multi DomiLED TM Multi DomiLED TM Synonymous with function and performance, the Multi DomiLED TM series is perfectly suited for a variety of cross-industrial applications due to
More informationDOMINANT. Opto Technologies Innovating Illumination. InGaN White : DSW-HSG. DATA SHEET: Right Angle DomiLED. DomiLED. Features: Applications:
DATA SHEET: Right Angle DomiLED DomiLED Synonymous with function and performance, the DomiLED series is perfectly suited for a variety of cross-industrial applications due to its small package outline,
More informationMeRck. AZ nlof technical datasheet. Negative Tone Photoresist for Single Layer Lift-Off APPLICATION TYPICAL PROCESS. SPIN CURVE (150MM Silicon)
MeRck technical datasheet AZ nlof 5510 Negative Tone Photoresist for Single Layer Lift-Off APPLICATION AZ nlof 5510 i-line photoresist is engineered to simplify the historically complex image reversal
More informationInGaN White : DSW-FSG. Carrier Tape Change for all Right Angle DomiLED DSx Product Change Notice issued on 18 May 2015.
DATA SHEET: Right Angle DomiLED TM Carrier Tape Change for all Right Angle DomiLED DSx Product Change Notice issued on 18 May 2015. DomiLED TM Synonymous with function and performance, the DomiLED TM series
More information1206 Reverse Package Super Blue LED TSP3-BF3216-N1P2. Features. Descriptions. Applications. Device Selection Guide
1206 Reverse Package Super Blue LED 1206 Reverse Package Super Blue LED Features Package in 8mm tape on 7 diameter reel Compatible with automatic placement equipment Compatible with infrared and vapor
More informationLNJ757W86RA. High Bright Surface Mounting Chip LED. ESS Type. Absolute Maximum Ratings T a = 25 C. Lighting Color
High Bright Surface Mounting Chip LED ESS Type Absolute Maximum Ratings T a = 5 C Power dissipation P D 75 mw Forward current I F 0 ma Pulse forward current * I FP 70 ma Reverse voltage V R 5 V Operating
More informationElectroless Bumping for 300mm Wafers
Electroless Bumping for 300mm Wafers T. Oppert Internepcon 2006 Tokyo Big Sight, Japan Outline Short Company Profile Electroless Ni/Au Under Bump Metallization UBM for Copper Devices Solder Bumping: Stencil
More informationBRIDGELUX BLUE POWER DIE BXCD 26 mil x 30 mil
PRODUCT DATA SHEET DS-C30 The Bridgelux family of blue power die enables high performance and cost effective solutions to serve solid state lighting market. This next generation chip technology delivers
More informationCMOS Digital Integrated Circuits Lec 2 Fabrication of MOSFETs
CMOS Digital Integrated Circuits Lec 2 Fabrication of MOSFETs 1 CMOS Digital Integrated Circuits 3 rd Edition Categories of Materials Materials can be categorized into three main groups regarding their
More informationCree EZ500-p LEDs Data Sheet (Anode-up) CxxxEZ500-Sxxx00-x
Cree EZ5-p LEDs Data Sheet (Anode-up) CxxxEZ5-Sxxx-x Cree s EZBright LEDs are the latest generation of solid-state LED emitters that combine highly efficient InGaN materials with Cree s proprietary optical
More informationNanofluidic Diodes based on Nanotube Heterojunctions
Supporting Information Nanofluidic Diodes based on Nanotube Heterojunctions Ruoxue Yan, Wenjie Liang, Rong Fan, Peidong Yang 1 Department of Chemistry, University of California, Berkeley, CA 94720, USA
More informationDOMINANT. Semiconductors Innovating Illumination. InGaN White High Lumens : NPW-TSD DATA SHEET: SPNovaLED TM. Features: Applications:
DOMINANT TM DATA SHEET: SPNovaLED TM SPNovaLED TM Featuring a staggering brilliance and significant flux output, the SPNovaLED showcases the latest technological advent in this range. With its extremely
More informationDATA SHEET: With the intense colors that seem to glow with energy and its significant brightness, DomiLED TM
DATA SHEET: DomiLED TM InGaN White : DomiLED TM With the intense colors that seem to glow with energy and its significant brightness, DomiLED TM white LED is a highly reliable design device. Its dynamic
More informationPGEW Series of Single- and Multi-epi 905 nm Pulsed Semiconductor Lasers Low-Cost High-Power Laser-Diode Family for Commercial Range Finding
DATASHEET Photon Detection PGEW Series of Single- and Multi-epi 905 nm Pulsed Semiconductor Lasers Low-Cost High-Power Laser-Diode Family for Commercial Range Finding The PGEW Series is ideal for commercial
More informationMGA GHz 3 V, 17 dbm Amplifier. Data Sheet
MGA-853.1 GHz 3 V, 17 dbm Amplifier Data Sheet Description Avago s MGA-853 is an economical, easy-to-use GaAs MMIC amplifier that offers excellent power and low noise figure for applications from.1 to
More informationDATA SHEET: RGB SPNova: 20mA
DATA SHEET: SPNova TM RGB SPNova: 2mA SPNova TM Featuring a staggering brilliance and significant flux output, the SPNova showcases the latest technological advent in this range. With its extremely high
More informationLecture: Integration of silicon photonics with electronics. Prepared by Jean-Marc FEDELI CEA-LETI
Lecture: Integration of silicon photonics with electronics Prepared by Jean-Marc FEDELI CEA-LETI Context The goal is to give optical functionalities to electronics integrated circuit (EIC) The objectives
More informationDATA SHEET : AlInGaP : NAx-SSG
DATA SHEET : Primax TM AlInGaP : NAx-SSG Primax TM Synonymous with function and performance, enter the Primax, the new era of high intensity illumination in LED. With its high flux output and high luminous
More informationSemiconductor Manufacturing and Inspection Technologies for the 0.1 µm Process Generation
Hitachi Review Vol. 49 (2000), No. 4 199 Semiconductor Manufacturing and Inspection Technologies for the 0.1 µm Process Generation Takafumi Tokunaga Katsutaka Kimura Jun Nakazato Masaki Nagao, D. Eng.
More informationBRIDGELUX BLUE POWER DIE BXDA 26 mil x 30 mil
PRODUCT DATA SHEET DS-C34 The Bridgelux family of blue power die enables high performance and cost effective solutions to serve solid state lighting market. This next generation flip chip technology delivers
More informationETi-KA358A-BL LED Chip of Specifications
ETi-KA358A-BL LED Chip of Specifications Elec-Tech International Co., Ltd. SPECIFICATIONS No. : Product: ETi-KA358A-BL VERSION: V1.0 Date: 2015-01-29 ETi-KA358A-BL Introduction ETi-KA358A-BL LEDs are high
More informationCree EZ400-n LED Data Sheet CxxxEZ400-Sxxx00-2
Cree EZ4-n LED Data Sheet CxxxEZ4-Sxxx-2 Cree s EZBright LEDs are the next generation of solid-state LED emitters that combine highly efficient InGaN materials with Cree s proprietary optical design and
More informationPlan Optik AG. Plan Optik AG PRODUCT CATALOGUE
Plan Optik AG Plan Optik AG PRODUCT CATALOGUE 2 In order to service the high demand of wafers more quickly, Plan Optik provides off the shelf products in sizes from 2 up to 300mm diameter. Therefore Plan
More informationCompany Profile.
Company Profile www.synova.ch Innovative Micro-Machining Systems Synova is the pioneer of a revolutionary water jet guided laser technology providing state-of-theart cutting and dicing solutions as well
More informationDOMINANT. Opto Technologies Innovating Illumination. InGaN Warm White : DWF-UJG DATA SHEET: Power DomiLED TM. Features: Applications:
DATA SHEET: Power DomiLED TM Power DomiLED TM With its significant power in terms brightness, viewing angle and variety of application possibilities, Power DomiLED truly is a standout performer! Ideal
More information